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1. 发明授权

US5289494A Distributed feedback semiconductor laser 失效
标题翻译：分布式反馈半导体激光器
公开(公告)号：US5289494A
公开(公告)日：1994-02-22
申请号：US899860
申请日：1992-06-17
申请人： Kunio Tada , Yoshiaki Nakano , Takeshi Inoue , Yi Luo , Takeshi Irita , Shin-ichi Nakajima , Hideto Iwaoka
发明人： Kunio Tada , Yoshiaki Nakano , Takeshi Inoue , Yi Luo , Takeshi Irita , Shin-ichi Nakajima , Hideto Iwaoka
IPC分类号： H01S5/12 , H01S5/323 , H01S3/08
CPC分类号： H01S5/1228 , H01S5/32391
摘要： This invention relates to a distributed feedback semiconductor laser which achieves distributed feedback by gain coupling by providing periodical changes in the thickness of the active layer (5) or the absorptive layer, and aims to achieve light distributed feedback mainly of periodical perturbation of the gain factor by diminishing the periodical perturbation of refractive index caused by the changes in the thickness of the active layer (5) or the absorptive layer. This invention is characterized by a refractive index canceling structure comprising a combination of layers (6) and (7) of different refractive indices to cancel periodical changes in refractive index caused by the periodical structure of the active layer (5) or the absorptive layer.
摘要翻译： PCT No.PCT / JP91 / 01418 Sec。 371日期：1992年6月17日 102（e）日期1992年6月17日PCT 1991年10月17日PCT公布。公开号WO92 / 07401 本发明涉及一种分布式反馈半导体激光器，其通过增加耦合实现分布式反馈，通过提供有源层（5）或吸收层的厚度的周期性变化，目的是实现主要的光分布反馈通过减少由活性层（5）或吸收层的厚度变化引起的折射率的周期性扰动来增益因子的周期性扰动。本发明的特征在于包括具有不同折射率的层（6）和（7）的组合的折射率消除结构，以消除由有源层（5）或吸收层的周期性结构引起的折射率的周期性变化。

2. 发明授权

US07317848B2 Optical switch 失效
标题翻译：光开关
公开(公告)号：US07317848B2
公开(公告)日：2008-01-08
申请号：US10898927
申请日：2004-07-27
申请人： Shinji Iio , Masayuki Suehiro , Shin-ichi Nakajima , Yoshiyuki Asano , Chie Sato , Akira Miura , Tsuyoshi Yakihara , Shinji Kobayashi , Sadaharu Oka
发明人： Shinji Iio , Masayuki Suehiro , Shin-ichi Nakajima , Yoshiyuki Asano , Chie Sato , Akira Miura , Tsuyoshi Yakihara , Shinji Kobayashi , Sadaharu Oka
IPC分类号： G02B6/26
CPC分类号： G02F1/3138 , G02F2201/12 , G02F2203/60
摘要： An optical switch in which the adverse effect of heating can be restrained is realized. An optical switch for switching a transmission path of an optical signal by a change in refractive index due to carrier injection comprises: a semiconductor substrate; an optical waveguide layer which is formed on the semiconductor substrate and in which an optical waveguide is formed, the optical signal being incident on the optical waveguide from one side, then branched into two at a halfway part and emitted from the optical waveguide; a first electrode formed on the optical waveguide layer and at a branching part of the optical waveguide; a second electrode formed on the optical waveguide layer and near the branching part of the optical waveguide; and a third electrode formed on the optical waveguide layer and on a side opposite to the first electrode as viewed from the second electrode; wherein when the optical switch is on, carriers are injected from the first and second electrodes, and when the optical switch is off, carriers are injected from the second and third electrodes.
摘要翻译：实现了可以抑制加热的不利影响的光开关。用于通过载流子注入引起的折射率变化来切换光信号的传输路径的光开关包括：半导体衬底; 形成在半导体基板上并形成有光波导的光波导层，光信号从一侧入射到光波导上，然后中途分支成两个，并从光波导发射; 形成在所述光波导层上和所述光波导的分支部的第一电极; 形成在光波导层上且靠近光波导的分支部分的第二电极; 以及第三电极，其形成在所述光波导层上并且与所述第一电极相反的一侧从所述第二电极观察; 其中当所述光开关导通时，从所述第一和第二电极注入载流子，并且当所述光开关断开时，载流子从所述第二和第三电极注入。

3. 发明授权

US06693713B1 Mark detection method, exposure method, device manufacturing method, mark detection apparatus, exposure apparatus, and device 失效
标题翻译：标记检测方法，曝光方法，装置制造方法，标记检测装置，曝光装置和装置
公开(公告)号：US06693713B1
公开(公告)日：2004-02-17
申请号：US09743989
申请日：2001-01-18
申请人： Shin-ichi Nakajima
发明人： Shin-ichi Nakajima
IPC分类号： G01B1100
CPC分类号： G03F9/7092 , G03F9/70 , G03F9/7088
摘要： The object of the present invention is to provide a mark detection method, an exposure method, a device manufacturing method, a mark detection apparatus, an exposure apparatus, and a device manufactured by the use of the exposure apparatus, which are capable of reducing a position measurement error in a short time even in the case where a sampling interval must be set to about 0.2 times or more of a lower limit of a minimum periodic component. In the present invention, a mark formed on an object is irradiated with a detection beam, an image of the mark is picked up through an image-forming system, the image of the mark formed on an image pickup device is converted into an electrical image signal, a signal related to the image signal is output at predetermined sampling intervals, and a signal related to the image signal is interpolated in a cycle equal to or less than the predetermined sampling interval.
摘要翻译：本发明的目的是提供一种标记检测方法，曝光方法，装置制造方法，标记检测装置，曝光装置和使用曝光装置制造的装置，其能够减少即使在将采样间隔设定为最小周期分量的下限的约0.2倍以上的情况下，也能够在短时间内进行位置测量误差。在本发明中，在物体上形成的标记用检测光束照射，通过图像形成系统拾取标记的图像，将形成在图像拾取装置上的标记的图像转换为电图像信号，以预定的采样间隔输出与图像信号相关的信号，并且以等于或小于预定采样间隔的周期内插与图像信号相关的信号。

4. 发明授权

US06891986B2 Optical switch 失效
标题翻译：光开关
公开(公告)号：US06891986B2
公开(公告)日：2005-05-10
申请号：US10763277
申请日：2004-01-26
申请人： Shinji Iio , Masayuki Suehiro , Shin-ichi Nakajima , Yoshiyuki Asano , Akira Miura , Tsuyoshi Yakihara , Shinji Kobayashi , Sadaharu Oka , Morio Wada , Shoujirou Araki , Machio Dobashi , Chie Sato , Yasukazu Akasaka
发明人： Shinji Iio , Masayuki Suehiro , Shin-ichi Nakajima , Yoshiyuki Asano , Akira Miura , Tsuyoshi Yakihara , Shinji Kobayashi , Sadaharu Oka , Morio Wada , Shoujirou Araki , Machio Dobashi , Chie Sato , Yasukazu Akasaka
IPC分类号： G02F1/313 , G02B6/12
CPC分类号： G02F1/3138 , G02F2203/023
摘要： In an optical switch, a carrier-accumulating layer in which injected carriers are accumulated is provided on a semiconductor substrate having a waveguide formed thereon so that injected effective carriers tend to be accumulated in an effective part, and the burden on a driving circuit is thus reduced to realize high-speed operation. At the same time, when a clad on the carrier injection side, of clad layers formed on both sides of the waveguide, is a second clad layer, and a clad on the substrate side is a first clad layer, a third clad layer is formed on the first clad layer to reduce propagation loss in the waveguide.
摘要翻译：在光开关中，在其上形成有波导的半导体衬底上设置有其中注入有载流子的载流子积聚层，使得注入的有效载流子倾向于积聚在有效部分，并且因此驱动电路的负担减少实现高速运行。同时，当在波导两侧形成的包层的载流子注入侧的包层为第二覆盖层时，基板侧的包层为第一覆盖层，形成第三覆盖层在第一包层上减少波导中的传播损耗。

5. 发明授权

US06930623B2 Optical signal processing system 失效
标题翻译：光信号处理系统
公开(公告)号：US06930623B2
公开(公告)日：2005-08-16
申请号：US10761372
申请日：2004-01-22
申请人： Shinji Iio , Masayuki Suehiro , Shin-ichi Nakajima , Yoshiyuki Asano , Hiroyuki Matsuura , Akira Miura , Tsuyoshi Yakihara , Shinji Kobayashi , Sadaharu Oka , Hirotoshi Kodaka
发明人： Shinji Iio , Masayuki Suehiro , Shin-ichi Nakajima , Yoshiyuki Asano , Hiroyuki Matsuura , Akira Miura , Tsuyoshi Yakihara , Shinji Kobayashi , Sadaharu Oka , Hirotoshi Kodaka
IPC分类号： H04B10/07 , H04B10/27 , H04B10/29 , H04B10/524 , H04B10/556 , H04J14/08 , H03M9/00
CPC分类号： H04J14/08
摘要： The present invention aims at achieving an optical signal processing system which converts a higher speed optical signal to electrical signals by time-demultiplexing the signal with low-speed electrical signals.The present invention offers an improved optical signal processing system that converts a serial pulse train optical signal with transmission speed N to parallel pulse train electrical signals. This system is characterized by providing a serial-parallel converter in which at least two optical switches are cascaded, each of which outputs optical signals with transmission speed M (N>M) to one of the two output terminals and outputs the remaining optical signals to the alternative one of said two output terminals by switching connection to said output terminal, receiving parts which convert optical signals from one of the two output terminals of each of the above optical switches to electrical signals, a synchronizing circuit which outputs timing signals in synchronization with electrical signals output from these receiving parts, and drivers which cause the above described optical switches to switch their connections based on timing signals output from the above synchronizing circuit.
摘要翻译：本发明旨在实现一种光信号处理系统，其通过用低速电信号对信号进行时分解，将高速光信号转换成电信号。本发明提供一种改进的光信号处理系统，其将具有传输速度N的串行脉冲序列光信号转换为并行脉冲串电信号。该系统的特征在于提供一种串并联转换器，其中至少两个光开关级联，其中每一个将传输速度M（N> M）的光信号输出到两个输出端之一，并将剩余的光信号输出到所述两个输出端子中的另一个通过切换到所述输出端子的连接;接收部件，其将来自上述每个光开关的两个输出端之一的光信号转换成电信号;同步电路，其与从这些接收部输出的电信号，以及使上述光开关根据从上述同步电路输出的定时信号切换连接的驱动器。

6. 发明申请

US20050041913A1 Optical switch matrix 失效
标题翻译：光开关矩阵
公开(公告)号：US20050041913A1
公开(公告)日：2005-02-24
申请号：US10901173
申请日：2004-07-29
申请人： Shinji Iio , Masayuki Suehiro , Shin-ichi Nakajima , Yoshiyuki Asano , Chie Sato , Akira Miura , Tsuyoshi Yakihara , Shinji Kobayashi , Sadaharu Oka
发明人： Shinji Iio , Masayuki Suehiro , Shin-ichi Nakajima , Yoshiyuki Asano , Chie Sato , Akira Miura , Tsuyoshi Yakihara , Shinji Kobayashi , Sadaharu Oka
IPC分类号： G02B6/12 , G02F1/29 , G02F1/313 , G02B6/26
CPC分类号： G02F1/3138 , G02B2006/12173 , G02F1/293
摘要： A matrix optical switch that can switch the transmission path of an optical signal without requiring a driving unit for each optical switch is realized. A matrix optical switch for switching a transmission path of an optical signal by connecting plural input sides and plural output sides, respectively, comprises: a semiconductor optical waveguide substrate; a photo mask choosing system for selecting and arranging one photo mask from plural photo masks each of which has printed thereon a pattern connecting plural input sides to plural output sides; and a light source for casting output light having larger energy than a band gap of the semiconductor optical waveguide substrate onto a photon injection area between the plural input sides and the plural output sides on the semiconductor optical waveguide substrate via the selected photo mask.
摘要翻译：实现了可以切换光信号的传输路径而不需要每个光开关的驱动单元的矩阵光开关。用于通过连接多个输入侧和多个输出侧来切换光信号的传输路径的矩阵光开关包括：半导体光波导基片; 一种光掩模选择系统，用于从多个照相掩模中选择和布置一个照片掩模，每个照片掩模上印有将多个输入侧连接到多个输出侧的图案; 以及用于将具有比半导体光波导基板的带隙更大的能量的输出光通过所选择的光掩模投射到半导体光波导基板上的多个输入侧和多个输出侧之间的光子注入区域上的光源。

7. 发明申请

US20050041903A1 Optical switch 失效
标题翻译：光开关
公开(公告)号：US20050041903A1
公开(公告)日：2005-02-24
申请号：US10898927
申请日：2004-07-27
申请人： Shinji Iio , Masayuki Suehiro , Shin-ichi Nakajima , Yoshiyuki Asano , Chie Sato , Akira Miura , Tsuyoshi Yakihara , Shinji Kobayashi , Sadaharu Oka
发明人： Shinji Iio , Masayuki Suehiro , Shin-ichi Nakajima , Yoshiyuki Asano , Chie Sato , Akira Miura , Tsuyoshi Yakihara , Shinji Kobayashi , Sadaharu Oka
IPC分类号： G02F1/025 , G02F1/313 , G02F1/295
CPC分类号： G02F1/3138 , G02F2201/12 , G02F2203/60
摘要： An optical switch in which the adverse effect of heating can be restrained is realized. An optical switch for switching a transmission path of an optical signal by a change in refractive index due to carrier injection comprises: a semiconductor substrate; an optical waveguide layer which is formed on the semiconductor substrate and in which an optical waveguide is formed, the optical signal being incident on the optical waveguide from one side, then branched into two at a halfway part and emitted from the optical waveguide; a first electrode formed on the optical waveguide layer and at a branching part of the optical waveguide; a second electrode formed on the optical waveguide layer and near the branching part of the optical waveguide; and a third electrode formed on the optical waveguide layer and on a side opposite to the first electrode as viewed from the second electrode; wherein when the optical switch is on, carriers are injected from the first and second electrodes, and when the optical switch is off, carriers are injected from the second and third electrodes.
摘要翻译：实现了可以抑制加热的不利影响的光开关。用于通过载流子注入引起的折射率变化来切换光信号的传输路径的光开关包括：半导体衬底; 形成在半导体基板上并形成有光波导的光波导层，光信号从一侧入射到光波导上，然后中途分支成两个，并从光波导发射; 形成在所述光波导层上和所述光波导的分支部的第一电极; 形成在光波导层上且靠近光波导的分支部分的第二电极; 以及第三电极，其形成在所述光波导层上并且与所述第一电极相反的一侧从所述第二电极观察; 其中当所述光开关导通时，从所述第一和第二电极注入载流子，并且当所述光开关断开时，载流子从所述第二和第三电极注入。

8. 发明授权

US07787777B2 Optical packet network system 有权
标题翻译：光分组网系统
公开(公告)号：US07787777B2
公开(公告)日：2010-08-31
申请号：US11502534
申请日：2006-08-11
申请人： Shinji Iio , Masayuki Suehiro , Katsuya Ikezawa , Akira Miura , Sadaharu Oka , Chie Sato , Mamoru Hihara , Tsuyoshi Yakihara , Shin-ichi Nakajima , Morio Wada , Daisuke Hayashi , Shinji Kobayashi , Yoshiyuki Asano
发明人： Shinji Iio , Masayuki Suehiro , Katsuya Ikezawa , Akira Miura , Sadaharu Oka , Chie Sato , Mamoru Hihara , Tsuyoshi Yakihara , Shin-ichi Nakajima , Morio Wada , Daisuke Hayashi , Shinji Kobayashi , Yoshiyuki Asano
IPC分类号： H04B10/00 , H04B10/20
CPC分类号： H04J14/0227 , H04J14/0201 , H04J14/0221 , H04J14/0241 , H04J14/0282 , H04J14/0283 , H04J14/0284 , H04Q11/0062 , H04Q11/0066 , H04Q2011/0049 , H04Q2011/0092
摘要： An optical packet network system of a ring type, capable of preventing degradation of an optical signal, can be implemented by providing a mechanism relatively simple in structure, capable of erasing light noise if the optical packet signal does not exists. In the optical packet network system made up by interconnecting respective nodes adjacent to each other, and connecting a sending source of an optical packet signal to a ring, a light noise removal function block is provided between the respective nodes adjacent to each other.
摘要翻译：可以通过提供一种结构相对简单的机构来实现能够防止光信号劣化的环形光分组网络系统，如果光分组信号不存在则能够擦除光噪声。在通过互相相邻的各个节点互连并将光分组信号的发送源连接到环的光分组网络系统中，在彼此相邻的相应节点之间提供光噪声去除功能块。

9. 发明申请

US20070047957A1 Optical packet network system 有权
标题翻译：光分组网系统
公开(公告)号：US20070047957A1
公开(公告)日：2007-03-01
申请号：US11502534
申请日：2006-08-11
申请人： Shinji Iio , Masayuki Suehiro , Katsuya Ikezawa , Akira Miura , Sadaharu Oka , Chie Sato , Mamoru Hihara , Tsuyoshi Yakihara , Shin-ichi Nakajima , Morio Wade , Daisuke Hayashi , Shinji Kobayashi , Yoshiyuki Asano
发明人： Shinji Iio , Masayuki Suehiro , Katsuya Ikezawa , Akira Miura , Sadaharu Oka , Chie Sato , Mamoru Hihara , Tsuyoshi Yakihara , Shin-ichi Nakajima , Morio Wade , Daisuke Hayashi , Shinji Kobayashi , Yoshiyuki Asano
IPC分类号： H04B10/20
CPC分类号： H04J14/0227 , H04J14/0201 , H04J14/0221 , H04J14/0241 , H04J14/0282 , H04J14/0283 , H04J14/0284 , H04Q11/0062 , H04Q11/0066 , H04Q2011/0049 , H04Q2011/0092
摘要： An optical packet network system of a ring type, capable of preventing degradation of an optical signal, can be implemented by providing a mechanism relatively simple in structure, capable of erasing light noise if the optical packet signal does not exists. In the optical packet network system made up by interconnecting respective nodes adjacent to each other, and connecting a sending source of an optical packet signal to a ring, a light noise removal function block is provided between the respective nodes adjacent to each other.
摘要翻译：可以通过提供一种结构相对简单的机构来实现能够防止光信号劣化的环形光分组网络系统，如果光分组信号不存在则能够擦除光噪声。在通过互相相邻的各个节点互连并将光分组信号的发送源连接到环的光分组网络系统中，在彼此相邻的相应节点之间提供光噪声去除功能块。

10. 发明授权

US07116856B2 Optical switch matrix 失效
标题翻译：光开关矩阵
公开(公告)号：US07116856B2
公开(公告)日：2006-10-03
申请号：US10901173
申请日：2004-07-29
申请人： Shinji Iio , Masayuki Suehiro , Shin-ichi Nakajima , Yoshiyuki Asano , Chie Sato , Akira Miura , Tsuyoshi Yakihara , Shinji Kobayashi , Sadaharu Oka
发明人： Shinji Iio , Masayuki Suehiro , Shin-ichi Nakajima , Yoshiyuki Asano , Chie Sato , Akira Miura , Tsuyoshi Yakihara , Shinji Kobayashi , Sadaharu Oka
IPC分类号： G02B6/26
CPC分类号： G02F1/3138 , G02B2006/12173 , G02F1/293
摘要： A matrix optical switch that can switch the transmission path of an optical signal without requiring a driving unit for each optical switch is realized. A matrix optical switch for switching a transmission path of an optical signal by connecting plural input sides and plural output sides, respectively, comprises: a semiconductor optical waveguide substrate; a photo mask choosing system for selecting and arranging one photo mask from plural photo masks each of which has printed thereon a pattern connecting plural input sides to plural output sides; and a light source for casting output light having larger energy than a band gap of the semiconductor optical waveguide substrate onto a photon injection area between the plural input sides and the plural output sides on the semiconductor optical waveguide substrate via the selected photo mask.
摘要翻译：实现了可以切换光信号的传输路径而不需要每个光开关的驱动单元的矩阵光开关。用于通过连接多个输入侧和多个输出侧来切换光信号的传输路径的矩阵光开关包括：半导体光波导基片; 一种光掩模选择系统，用于从多个照相掩模中选择和布置一个照片掩模，每个照片掩模上印有将多个输入侧连接到多个输出侧的图案; 以及用于将具有比半导体光波导基板的带隙更大的能量的输出光通过所选择的光掩模投射到半导体光波导基板上的多个输入侧和多个输出侧之间的光子注入区域上的光源。

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