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    • 5. 发明申请
    • NANOSENSOR AND METHOD OF MANUFACTURING SAME
    • 纳米传感器及其制造方法
    • US20140202866A1
    • 2014-07-24
    • US14224770
    • 2014-03-25
    • Jeo-young SHIMTae-han JeonDong-ho LeeHee-jeong JeongSeong-ho Cho
    • Jeo-young SHIMTae-han JeonDong-ho LeeHee-jeong JeongSeong-ho Cho
    • G01N27/447
    • G01N27/44791G01N33/48721
    • A nanosensor may include a substrate that has a hole formed therein, a first insulating layer that is disposed on the substrate and has a nanopore formed therein, first and second electrodes that are disposed on the first insulating layer and are spaced apart from each other, first and second electrode pads that are disposed on the first and second electrodes, respectively, and a protective layer disposed on the first and second electrode pads. A method of manufacturing a nanosensor may include forming a first insulating layer, graphene, and a metal layer on a substrate, patterning the metal layer and the graphene, forming a protective layer on a portion of the graphene and the metal layer, exposing a portion of the graphene by removing a portion of the protective layer, forming a hole in the substrate, and forming a nanopore in the first insulating layer and the graphene to be connected to the hole.
    • 纳米传感器可以包括其中形成有孔的基板,设置在基板上并且在其中形成有纳米孔的第一绝缘层,设置在第一绝缘层上并彼此间隔开的第一和第二电极, 分别设置在第一和第二电极上的第一和第二电极焊盘以及设置在第一和第二电极焊盘上的保护层。 制造纳米传感器的方法可以包括在基板上形成第一绝缘层,石墨烯和金属层,图案化金属层和石墨烯,在石墨烯和金属层的一部分上形成保护层,将部分 通过去除保护层的一部分,在衬底中形成孔,并在第一绝缘层中形成纳米孔和与孔连接的石墨烯。