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    • 3. 发明授权
    • Genus tower light controller
    • 塔灯控制器
    • US5446450A
    • 1995-08-29
    • US145700
    • 1993-11-04
    • Paul Knutson
    • Paul Knutson
    • B23Q17/00H01L21/00H01L21/02H01L21/677G08B21/00
    • H01L21/67276H01L21/67259
    • A tower light controller comprises logic circuitry that easily connects with equipment used in the production of semiconductor wafers. The tower light controller uses the existing signals in the production equipment, namely a process signal, an alarm signal, left and right cassette present signals, and left and right atmosphere signals, to appropriately drive a light tower comprised of a yellow lamp, a red lamp, and a green lamp. The logic circuitry turns on the green lamp when a product is being run. A yellow lamp is continuously driven when the equipment has wafers that are ready to be unloaded and the yellow lamp is flashed when the equipment is ready to be loaded with wafers. The red lamp is flashed during alarm conditions and is driven continuously when the equipment is placed in a repair or in a preventative maintenance mode. The logic circuitry also comprises an oscillator formed by a series connection of three inverters. A pair of resistors are connected in series with each other and across the first and third inverters. A capacitor has one terminal connected between the second and the third inverters and the other terminal connected between the two resistors. The circuit additionally comprises a pair of LEDs, reverse biased with respect to each other, connected across the second inverter. With the addition of the two LEDs, the frequency of the oscillating signal may be lowered past the typical floor of 4 to 7 Hz down to about 0.25 Hz.
    • 塔灯控制器包括与生产半导体晶片所用设备很容易连接的逻辑电路。 塔灯控制器使用生产设备中的现有信号,即过程信号,报警信号,左和右盒存在信号以及左右大气信号,以适当地驱动由黄灯,红灯 灯和绿灯。 当产品运行时,逻辑电路将打开绿色指示灯。 当设备具有准备卸载的晶片并且当设备准备装载晶片时,黄色灯闪烁,黄色灯被连续驱动。 在报警条件下,红灯闪烁,当设备处于维修或预防性维护模式时,它会持续驱动。 逻辑电路还包括由三个反相器的串联连接形成的振荡器。 一对电阻器彼此串联并跨越第一和第三逆变器。 电容器具有连接在第二和第三反相器之间的一个端子,另一个端子连接在两个电阻器之间。 该电路还包括一对LED,其相对于彼此反向偏置,跨越第二反相器连接。 通过添加两个LED,可以将振荡信号的频率降低到典型的4到7Hz的底部,直到大约0.25Hz。
    • 9. 发明授权
    • Six channel dual display MFC monitor
    • 六通道双显示MFC显示器
    • US5541576A
    • 1996-07-30
    • US527388
    • 1995-09-13
    • Paul Knutson
    • Paul Knutson
    • G01D7/00G01F1/00G01F15/06G01F25/00G05D7/00G08C19/30G08B26/00
    • G01F25/0007
    • Disclosed is an apparatus having a plurality of interfaces, each corresponding to one of a plurality of MFCs which provide voltage signals corresponding to the control voltages controlling the MFCs; a plurality of wires for transmitting the voltage signals from the interfaces; a position switch coupled to the plurality of wires for selecting voltage signals corresponding to one of the MFCs; and a plurality of displays coupled to the switch for providing a visual display of the values of said voltage signals corresponding to one of the MFCs. The invention enables an operator to monitor/calibrate a plurality of MFC operating voltages simultaneously without interfering with other operations of a system using MFCs.
    • 公开了具有多个接口的装置,每个接口对应于多个MFC中的一个,提供与控制MFC的控制电压对应的电压信号; 用于从接口传送电压信号的多条电线; 耦合到所述多根导线的位置开关,用于选择与所述MFC之一相对应的电压信号; 以及耦合到开关的多个显示器,用于提供对应于一个MFC的所述电压信号的值的可视显示。 本发明使得操作者能够同时监视/校准多个MFC操作电压,而不会干扰使用MFC的系统的其他操作。