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    • 2. 发明申请
    • Method for magnetron sputter deposition
    • 磁控溅射沉积方法
    • US20060251917A1
    • 2006-11-09
    • US11397878
    • 2006-04-04
    • Kuang-Tsan ChiangRonghua WeiEdward Langa
    • Kuang-Tsan ChiangRonghua WeiEdward Langa
    • C23C14/32B32B15/20
    • C23C14/046C23C14/165C23C14/225C23C14/352C23C14/355H01J37/3405Y10T428/12903
    • A method for depositing a nanostructured coating comprising chromium or a copper-chromium mixture on a workpiece. The workpiece may comprise a hollowed structure such as a rocket or jet engine combustion chamber liner. The method comprises providing a magnetron and an external sputter target material comprising chromium or a copper-chromium composite and effecting a magnetron sputter deposition to deposit a substantially uniform nanostructured coating comprising said sputter target material on said workpiece. The method may include plasma enhancement wherein a filament is utilized to produce a plasma that effects an ion bombardment on the workpiece during the magnetron sputter deposition process. The invention also includes the nanostructured coatings deposited by these methods and workpieces coated thereby.
    • 一种在工件上沉积包含铬或铜 - 铬混合物的纳米结构涂层的方法。 工件可以包括中空结构,例如火箭或喷气式发动机燃烧室衬套。 该方法包括提供磁控管和包含铬或铜 - 铬复合材料的外部溅射靶材料,并进行磁控溅射沉积,以将包含所述溅射靶材料的基本均匀的纳米结构涂层沉积在所述工件上。 该方法可以包括等离子体增强,其中使用丝来产生在磁控溅射沉积工艺期间对工件进行离子轰击的等离子体。 本发明还包括通过这些方法沉积的纳米结构涂层和由此涂覆的工件。
    • 3. 发明授权
    • Method for depositing coatings on the interior surfaces of tubular structures
    • 在管状结构的内表面上沉积涂层的方法
    • US07052736B2
    • 2006-05-30
    • US10807039
    • 2004-03-23
    • Ronghua WeiChristopher RinconJames Arps
    • Ronghua WeiChristopher RinconJames Arps
    • B05D7/22C23C14/22
    • B05D7/22B05D1/62B05D7/52B05D2254/04F41A21/04Y10T428/13
    • A method is disclosed for substantially uniformly coating an interior surface of a ferromagnetic tubular structure such as a ferromagnetic tube having a high aspect ratio. The method entails inducing a magnetic field of a given magnitude within the tubular structure. Further, a bias is applied at a given voltage to the tubular structure. Then, the interior surface of the tubular structure is exposed to a gaseous precursor material under conditions effective to convert a quantity of the gaseous precursor material to ionize gaseous precursor material. The given magnitude and voltage is such that it is effective to deposit the ionized the gaseous precursor material onto the interior surface and converts the ionized gaseous precursor material to a substantially uniform protective coating in the interior surface.
    • 公开了一种基本上均匀地涂覆铁磁管状结构的内表面的方法,例如具有高纵横比的铁磁管。 该方法需要在管状结构内引起给定量值的磁场。 此外,在给定电压下施加偏压到管状结构。 然后,管状结构的内表面在有效地将一定量的气态前体材料转化成电离气态前体材料的条件下暴露于气态前体材料。 给定的量值和电压使得将离子化的气态前体材料沉积到内表面上并将离子化的气态前体材料转化成内表面中基本均匀的保护涂层是有效的。