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    • 5. 发明申请
    • POLISHING PAD AND MANUFACTURING METHOD THEREFOR
    • 抛光垫及其制造方法
    • US20140038503A1
    • 2014-02-06
    • US14111888
    • 2012-04-16
    • Kouki ItoyamaFumio Miyazawa
    • Kouki ItoyamaFumio Miyazawa
    • B24B37/24B24B37/22H01L21/304
    • B24B37/24B24B37/22C08G18/10C08G18/4854C08G18/7621C08G2101/0008C08J9/12C08J2207/00C08J2375/04H01L21/304C08G18/3814C08G18/4829
    • A polishing pad for polishing a semiconductor device and manufacturing method therefor, the polishing pad comprising a polishing layer having a polyurethane-polyurea resin foam containing substantially spherical cells, wherein an M-component of the polyurethane-polyurea resin foam has a spin-spin relaxation time T2 of 160 to 260 μs, the polyurethane-polyurea resin foam has a storage elastic modulus E′ of 1 to 30 MPa, the storage elastic modulus E′ being measured at 40° C. with an initial load of 10 g, a strain range of 0.01 to 4%, and a measuring frequency of 0.2 Hz in a tensile mode, and the polyurethane-polyurea resin foam has a density D in a range from 0.30 to 0.60 g/cm3. The polishing pad remedies the problem of scratches occurring when a conventional hard (dry) polishing pad is used, which is excellent in polishing rate and polishing uniformity, and can be used for primary polishing or finish polishing.
    • 一种用于抛光半导体器件的抛光垫及其制造方法,所述抛光垫包括具有聚氨酯 - 聚脲树脂泡沫的抛光层,所述聚氨酯 - 聚脲树脂泡沫体含有基本上为球形的泡孔,其中聚氨酯 - 聚脲树脂泡沫的M成分具有自旋 - 自旋松弛 时间T2为160〜260μs,聚氨酯 - 聚脲树脂发泡体的储能弹性模量E'为1〜30MPa,储能弹性模量E'在40℃下初始负荷为10g,应变 范围为0.01〜4%,拉伸模式为0.2Hz的测定频率,聚氨酯 - 聚脲树脂发泡体的密度D为0.30〜0.60g / cm 3。 抛光垫补救了当使用常规的硬(干)抛光垫时发生划痕的问题,其抛光速率和抛光均匀性极好,可用于一次抛光或精抛光。
    • 6. 发明申请
    • POLISHING PAD AND MANUFACTURING METHOD THEREFOR
    • 抛光垫及其制造方法
    • US20140033615A1
    • 2014-02-06
    • US14112009
    • 2012-04-16
    • Kouki ItoyamaFumio Miyazawa
    • Kouki ItoyamaFumio Miyazawa
    • B24B37/24
    • B24B37/24C08G18/10C08G18/14C08G18/4854C08G2101/0008C08G2101/0083C08J9/12C08J2207/00C08J2375/04C08G18/48C08G18/3814
    • Provided are a polishing pad which remedies the problem of scratches occurring when a conventional hard (dry) polishing pad is used, which is excellent in polishing rate and polishing uniformity, and which can be used for not only primary polishing but also finish polishing, and a manufacturing method therefor. The polishing pad is a polishing pad for polishing a semiconductor device, comprising a polishing layer having a polyurethane-polyurea resin foam containing substantially spherical cells, wherein the polyurethane-polyurea resin foam has a hard segment content (HSC) in a range from 26 to 34%, and has a density D in a range from 0.30 to 0.60 g/cm3, the hard segment content (HSC) being determined by the following formula (1): HSC=100×(r−1)×(Mdi+Mda)÷(Mg+r×Mdi+(r−1)×Mda)  (1).
    • 提供了一种抛光垫,其补救当使用常规的硬(干)抛光垫时发生划痕的问题,其抛光速率和抛光均匀性优异,并且不仅可用于初次抛光,而且可用于精加工抛光,以及 其制造方法。 抛光垫是用于抛光半导体器件的抛光垫,其包括具有聚氨酯 - 聚脲树脂泡沫体的抛光层,该聚氨酯 - 聚脲树脂泡沫体含有基本上为球形的电池,其中聚氨酯 - 聚脲树脂泡沫体的硬链段含量(HSC)为26〜 34%,密度D在0.30〜0.60g / cm 3的范围内,硬链段含量(HSC)由下式(1)决定:HSC = 100×(r-1)×(Mdi + Mda )÷(Mg + r×Mdi +(r-1)×Mda)(1)。
    • 7. 发明授权
    • Receiver having a function to tune and set a channel and channel setup method
    • 接收机具有调谐和设置频道和频道设置方法的功能
    • US07375771B2
    • 2008-05-20
    • US10626846
    • 2003-07-25
    • Nobuaki NaoiFumio Miyazawa
    • Nobuaki NaoiFumio Miyazawa
    • H04N5/50
    • H03J1/0075H03J1/0058H03J1/0066H03J7/18H03J7/183
    • When channel setup is carried out under poor receiving condition, the previous channel information that has been stored on a channel map in the channel setup carried out under normal receiving condition is replaced with the later channel information that is stored on the channel map including less acquired channel information formed in the channel setup carried out later. Existence of broadcast signal is judged only on channels other than channels that are registered based on the fact that the channels include a broadcast signal on a channel map stored in the previous channel setup, and the channel information of the broadcast signal detected later is registered additionally on the channel map in a flash memory as the channel including the broadcast signal.
    • 当在不良接收条件下执行信道建立时,在正常接收条件下进行的信道建立中存储在信道映射上的先前信道信息被存储在包含较少获取的信道映射的信道映射后面的信道信息所取代 在以后进行的频道设置中形成的频道信息。 广播信号的存在仅基于通过在前一频道建立中存储的频道图上的信道包括广播信号的事实而登记的频道以外的频道进行判断,并且再次登记后述的广播信号的频道信息 在作为包括广播信号的频道的闪存中的频道地图上。