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    • 1. 发明授权
    • Method of manufacturing thermal assisted magnetic write head
    • 制造热辅助写磁头的方法
    • US08578593B2
    • 2013-11-12
    • US12902755
    • 2010-10-12
    • Kosuke TanakaShinji HaraTsutomu ChouYasutoshi Fujita
    • Kosuke TanakaShinji HaraTsutomu ChouYasutoshi Fujita
    • G11B5/187G11B7/08
    • G11B5/314G11B5/6088G11B2005/001G11B2005/0021
    • A method of manufacturing a thermally-assisted magnetic write head is provided. The method includes steps of: forming a laminate structure including the waveguide; the plasmon generator, and the magnetic pole in order; performing a first polishing process to planarize an end surface of the laminate structure; performing a first etching process to remove impurity attached on the end surface of the laminate structure, and to allow the plasmon generator to be recessed from the waveguide and the magnetic pole, thereby forming a recessed region on the end surface of the laminate structure; forming a protection layer on the end surface of the laminate structure such that at least the recessed region is filled; and performing a second polishing process on the end surface of the laminate structure formed with the protection layer until the plasmon generator is exposed, thereby completing the air bearing surface.
    • 提供一种制造热辅助写磁头的方法。 该方法包括以下步骤:形成包括波导的层压结构; 等离子体发生器和磁极; 执行第一抛光工艺以使层压结构的端面平坦化; 执行第一蚀刻工艺以去除附着在层压结构的端面上的杂质,并允许等离子体激元发生器从波导和磁极凹陷,从而在层压结构的端面上形成凹陷区域; 在所述层压结构的端面上形成保护层,使得至少所述凹陷区域被填充; 并在形成有保护层的叠层结构的端面进行第二抛光处理,直到等离子体激元发生器露出为止,从而完成空气支承面。
    • 3. 发明授权
    • Thermal-assisted magnetic recording head having dielectric waveguide, metal waveguide and near-field light generating element
    • 具有介质波导,金属波导和近场光产生元件的热辅助磁记录头
    • US08462593B1
    • 2013-06-11
    • US13367767
    • 2012-02-07
    • Eiji KomuraKoji ShimazawaTsutomu ChouShinji HaraKosuke Tanaka
    • Eiji KomuraKoji ShimazawaTsutomu ChouShinji HaraKosuke Tanaka
    • G11B11/00
    • G11B5/314G11B5/6088G11B2005/0021
    • A magnetic head includes a dielectric waveguide to propagate propagation light; a metal waveguide facing the dielectric waveguide, coupling to the propagation light propagating through the dielectric waveguide in a surface plasmon mode, generating first surface plasmon with larger wavenumber than that of the propagation light, and propagating the first surface plasmon; a near-field light generating element facing the metal waveguide and extending to ABS, coupling to the first surface plasmon propagating on the metal waveguide in a surface plasmon mode, generating second surface plasmon with wavenumber larger than that of the first surface plasmon, propagating the second surface plasmon to an end part on the ABS side, and generating near-field light at the end part on the ABS side; and a recording magnetic pole provided in the vicinity of the near-field light generating element and having an end part positioned on the ABS.
    • 磁头包括传播传播光的电介质波导; 面向电介质波导的金属波导,以表面等离子体模式耦合到通过电介质波导传播的传播光,产生波数比传播光波数大的第一表面等离子体,并传播第一表面等离子体; 面向金属波导并延伸到ABS的近场光产生元件,以表面等离子体模式耦合到在金属波导上传播的第一表面等离子体激元,产生波数大于第一表面等离子体波的第二表面等离子体,传播 第二表面等离子体激元到ABS侧的端部,并且在ABS侧的端部产生近场光; 以及设置在近场光产生元件附近并具有位于ABS上的端部的记录磁极。
    • 4. 发明授权
    • Near-field light generator and thermally-assisted magnetic recording head
    • 近场光发生器和热辅助磁记录头
    • US08264920B1
    • 2012-09-11
    • US13191913
    • 2011-07-27
    • Tsutomu ChouEiji KomuraShinji HaraDaisuke MiyauchiKosuke Tanaka
    • Tsutomu ChouEiji KomuraShinji HaraDaisuke MiyauchiKosuke Tanaka
    • G11B11/00G11B7/135
    • G11B5/314B82Y20/00G02B6/1226G11B5/3116G11B5/6088G11B2005/0021
    • A near-field light generator includes a waveguide, a plasmon generator, and a metal layer. The waveguide includes a core having an evanescent light generating surface. The plasmon generator includes a base part, and a protruding part that protrudes from the base part toward the evanescent light generating surface. The protruding part has: a front end face located at an end in a direction parallel to the evanescent light generating surface; a band-shaped flat surface facing toward the evanescent light generating surface; and two side surfaces connected to the flat surface. In at least a portion of the protruding part, the distance between the two side surfaces increases with increasing distance from the evanescent light generating surface. The flat surface includes a first portion contiguous with the front end face, and a second portion that is located farther from the front end face than is the first portion. The metal layer has an end face facing the first portion. The evanescent light generating surface faces the second portion.
    • 近场光发生器包括波导管,等离子体激元发生器和金属层。 波导包括具有ev逝光产生表面的芯。 等离子体发生器包括基部和从基部朝向渐逝光产生表面突出的突出部分。 所述突出部具有:前端面,其位于与所述ev逝光生成面平行的方向的端部; 面向渐逝光产生表面的带状平坦表面; 以及连接到平坦表面的两个侧表面。 在突出部分的至少一部分中,两个侧表面之间的距离随着与渐消光产生表面的距离的增加而增加。 平坦表面包括与前端面相邻的第一部分,以及比第一部分更远离前端面的第二部分。 金属层具有面向第一部分的端面。 渐逝光产生表面面向第二部分。
    • 7. 发明授权
    • Thermally assisted magnetic recording head having V-shaped plasmon generator
    • 具有V形等离子体发生器的热辅助磁记录头
    • US08351308B2
    • 2013-01-08
    • US12892540
    • 2010-09-28
    • Tsutomu ChouEiji KomuraShinji HaraKosuke TanakaDaisuke Miyauchi
    • Tsutomu ChouEiji KomuraShinji HaraKosuke TanakaDaisuke Miyauchi
    • G11B11/00
    • G11B5/3116G02B5/008G11B5/314G11B5/3163G11B2005/0021
    • A thermally assisted magnetic head includes a magnetic pole that generates a writing magnetic field from an air bearing surface (ABS); a waveguide through which light propagates; and a plasmon generator generating near-field light from a near-field light generating end surface by coupling the light thereto in a surface plasmon mode. The magnetic pole includes a convex part protruding in a substantially V-shape along a light propagation direction of the waveguide. The plasmon generator includes a substantially V-shaped part contacting the convex part, and as seen from a side of the ABS, a thickness of the plasmon generator in a direction perpendicular to convex part contacting sides gradually increases from an end in a direction away from the waveguide, the convex part contacting sides being linear sides that form the substantially V-shaped part of the plasmon generator and contacting the convex part.
    • 热辅助磁头包括从空气轴承表面(ABS)产生书写磁场的磁极; 光传播的波导; 以及等离子体发生器,其通过以表面等离子体激发模式将光耦合到其上,从近场光产生端面产生近场光。 磁极包括沿波导的光传播方向大致V形突出的凸部。 等离子体发生器包括接触凸部的大致V形部分,并且从ABS的侧面看,等离子体发生器在与凸部接触的方向垂直的方向上的厚度从远离方向的端部逐渐增加 所述波导,所述凸部接触侧为直线侧,其形成所述等离子体发生器的大致V形部分并接触所述凸部。
    • 8. 发明申请
    • THERMALLY ASSISTED MAGNETIC RECORDING HEAD
    • 热辅助磁记录头
    • US20120075967A1
    • 2012-03-29
    • US12892540
    • 2010-09-28
    • Tsutomu ChouEiji KomuraShinji HaraKosuke TanakaDaisuke Miyauchi
    • Tsutomu ChouEiji KomuraShinji HaraKosuke TanakaDaisuke Miyauchi
    • G11B11/24
    • G11B5/3116G02B5/008G11B5/314G11B5/3163G11B2005/0021
    • A thermally assisted magnetic head includes a magnetic pole that generates a writing magnetic field from an air bearing surface (ABS); a waveguide through which light propagates; and a plasmon generator generating near-field light from a near-field light generating end surface by coupling the light thereto in a surface plasmon mode. The magnetic pole includes a convex part protruding in a substantially V-shape along a light propagation direction of the waveguide. The plasmon generator includes a substantially V-shaped part contacting the convex part, and as seen from a side of the ABS, a thickness of the plasmon generator in a direction perpendicular to convex part contacting sides gradually increases from an end in a direction away from the waveguide, the convex part contacting sides being linear sides that form the substantially V-shaped part of the plasmon generator and contacting the convex part.
    • 热辅助磁头包括从空气轴承表面(ABS)产生书写磁场的磁极; 光传播的波导; 以及等离子体发生器,其通过以表面等离子体激发模式将光耦合到其上,从近场光产生端面产生近场光。 磁极包括沿波导的光传播方向大致V形突出的凸部。 等离子体发生器包括接触凸部的大致V形部分,并且从ABS的侧面看,等离子体发生器在与凸部接触的方向垂直的方向上的厚度从远离方向的端部逐渐增加 所述波导,所述凸部接触侧为直线侧,其形成所述等离子体发生器的大致V形部分并接触所述凸部。
    • 10. 发明授权
    • Thermally-assisted magnetic head
    • 热辅助磁头
    • US08305849B2
    • 2012-11-06
    • US13013025
    • 2011-01-25
    • Shinji HaraTsutomu ChouKoji ShimazawaDaisuke MiyauchiKosuke Tanaka
    • Shinji HaraTsutomu ChouKoji ShimazawaDaisuke MiyauchiKosuke Tanaka
    • G11B11/00
    • G11B5/314G11B5/6088G11B2005/0021
    • A thermally-assisted magnetic head that includes an air bearing surface facing a recording medium and that performs magnetic recording while heating the recording medium includes: a magnetic recording element including a pole of which one edge part is positioned on the air bearing surface and that generates magnetic flux traveling toward the magnetic recording medium; a waveguide configured with a core through which light propagates and a cladding, at least one part of which extends to the air bearing surface, surrounding the periphery of the core; a plasmon generator that faces a part of the core and that extends to the air bearing surface. The plasmon generator is configured with a first part and a second part that are joined; the first part that is positioned on the air bearing surface side and that is made of a high melting point material, and the second part that is positioned away from the air bearing surface and that is made of a material with a small value ∈″, which is an imaginary component of permittivity.
    • 一种热辅助磁头,其包括面向记录介质的空气轴承表面并且在加热记录介质的同时进行磁记录的磁辅助磁头包括:磁记录元件,其包括:一个边缘部分位于空气轴承表面上并产生 向磁记录介质传播的磁通量; 配置有光传播的芯的波导和包围,其至少一部分延伸到空气支承表面,围绕芯的周边; 等离子体发生器,其面向芯部的一部分并且延伸到空气轴承表面。 等离子体发生器配置有连接的第一部分和第二部分; 位于空气轴承面侧并由高熔点材料制成的第一部分和远离空气轴承表面并由具有小值∈“的材料制成的第二部分, 这是介电常数的虚部。