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    • 7. 发明授权
    • Method of and apparatus for manufacturing ultrafine particle film
    • 超细颗粒膜的制造方法和设备
    • US4395440A
    • 1983-07-26
    • US309088
    • 1981-10-06
    • Atsushi AbeHisahito OgawaMasahiro Nishikawa
    • Atsushi AbeHisahito OgawaMasahiro Nishikawa
    • C23C14/24C23C14/32B05D1/12C23C11/00
    • C23C14/32C23C14/24
    • A method and apparatus for manufacturing an ultrafine particle film which has great practical utility when deposited on an appropriate substrate. The particle film is produced from various ultrafine particles of, for example, metals, oxides, nitrides and carbides, and is produced uniformly, effectively and efficiently with a high degree of reproducibility. According to a first method, an atmosphere at a gas of a reduced pressure is formed in a vessel, and a forced flow of the gas is formed unidirectionally from an evaporation source to the substrate, so that the evaporated matters from the evaporation source are forced to move together with the forced flow of the gas, so that ultrafine particles which are formed through interaction between the evaporated matters and the gas deposited on the substrate thereby forming the ultrafine particle film. According to a second method, the evaporation source is disposed within a vessel of having a reduced gas pressure as well as a cylinder surrounded by a high-frequency coil. As the coil is energized, the gas in the cylinder is excited. The evaporated matters are forced to flow through the excited gas atmosphere so that ultrafine particles formed by an interaction between the evaporated matters and the excited gas are deposited on the substrate thereby forming the ultrafine particle layer. A third method is a combination of the first and second methods.
    • 一种用于制造超细颗粒膜的方法和装置,其在沉积在合适的基底上时具有很大的实用性。 颗粒膜由各种例如金属,氧化物,氮化物和碳化物的超微粒子制成,以高再现性均匀,有效且高效地制造。 根据第一种方法,在容器中形成减压气体的气氛,从蒸发源向基板单向形成气体的强制流动,使来自蒸发源的蒸发物质被迫 与气体的强制流动一起移动,使得通过蒸发的物质和沉积在基底上的气体之间的相互作用而形成的超细颗粒,从而形成超微粒子膜。 根据第二种方法,蒸发源设置在具有降低的气体压力的容器中,以及由高频线圈包围的圆筒。 当线圈通电时,气缸中的气体被激发。 蒸发的物质被迫流过激发的气体气氛,使得通过蒸发物质和被激发气体之间的相互作用形成的超细颗粒沉积在基底上,从而形成超微粒子层。 第三种方法是第一种和第二种方法的组合。