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    • 2. 发明授权
    • Process for fabricating a semiconductor device
    • 制造半导体器件的工艺
    • US06383907B1
    • 2002-05-07
    • US09655832
    • 2000-09-06
    • Toshiaki HasegawaKoichi IkedaHideyuki Kito
    • Toshiaki HasegawaKoichi IkedaHideyuki Kito
    • H01L2144
    • H01L21/76835H01L21/31144H01L21/76811H01L21/76813H01L21/76825H01L21/76826H01L21/76829
    • A process for producing a semiconductor device comprising an interlayer dielectric containing an organic film, which process comprises the step of forming on the interlayer dielectric a three-layer mask comprising a first mask, a second mask and a third mask in this order from the bottom, in which the first mask, the second mask and the third mask are made of materials different from one another, and the second mask is formed from a film made of a material which protects a film for forming the first mask during formation of the third mask. The process of the present invention is advantageous not only in that the second mask serves as a protecting film for the layers under the first mask during formation of the third mask, so that etching using a resist mask can be conducted during formation of the third mask, and further it becomes possible to perform a regeneration treatment for the resist mask while preventing the layers under the first mask from suffering a damage, but also in that, as a material for the first mask, the same material as that for the resist mask, for example, a carbon-containing material having a low dielectric constant can be used.
    • 一种制造包含含有有机膜的层间电介质的半导体器件的方法,该方法包括在层间电介质上形成从底部开始依次形成第一掩模,第二掩模和第三掩模的三层掩模的步骤 其中第一掩模,第二掩模和第三掩模由彼此不同的材料制成,并且第二掩模由在由形成第三掩模的第三掩模形成期间保护用于形成第一掩模的膜的材料制成的膜形成 面具。 本发明的方法不仅有利于第二掩模在形成第三掩模期间用作第一掩模下的层的保护膜,使得可以在形成第三掩模期间进行使用抗蚀剂掩模的蚀刻 并且进一步地,可以在防止第一掩模下的层遭受损伤的同时进行抗蚀剂掩模的再生处理,而且作为用于第一掩模的材料与用于抗蚀剂掩模的材料相同 例如,可以使用具有低介电常数的含碳材料。
    • 5. 发明授权
    • Scheduling apparatus and method
    • 调度装置和方法
    • US08452892B2
    • 2013-05-28
    • US12923207
    • 2010-09-09
    • Tomonori MaegawaKeisuke MeraShigeo MatsuzawaKoichi IkedaNobutaka Nishimura
    • Tomonori MaegawaKeisuke MeraShigeo MatsuzawaKoichi IkedaNobutaka Nishimura
    • G06F12/173H04L12/00
    • H04L12/6418H04L67/12
    • According to one embodiment, a scheduling apparatus sends queries to communication modules in buildings and receives facility information measured at monitor-control points from the communication modules. As for each communication module, a network address, a waiting time to receive the facility information after sending a query, and a connection with the monitor-control points, are stored. When a service request indicating at least one monitor-control point is received, queries each including the network address of a communication module connected with a monitor-control point indicated by the service request, are generated. A priority of each query is decided based on the waiting time corresponding to the communication module. Each query is added to a first send queue or a second send queue based on the priority. When queries are sent, a timing to send from the first send queue is same as or earlier than a timing to send from the second send queue.
    • 根据一个实施例,调度装置向建筑物中的通信模块发送查询,并且从通信模块接收在监视控制点处测量的设施信息。 对于每个通信模块,存储网络地址,发送查询之后接收设施信息的等待时间以及与监视控制点的连接。 当接收到指示至少一个监视控制点的服务请求时,生成包括由服务请求指示的监视控制点连接的通信模块的网络地址的查询。 基于对应于通信模块的等待时间来确定每个查询的优先级。 基于优先级将每个查询添加到第一个发送队列或第二个发送队列。 当发送查询时,从第一发送队列发送的定时与从第二发送队列发送的定时相同或较早。
    • 7. 发明授权
    • Entry control system and entry control method
    • 进入控制系统和进入控制方法
    • US08093988B2
    • 2012-01-10
    • US11892678
    • 2007-08-27
    • Kouichi TakeneKimito IdemoriKoichi IkedaYoshiro SekiFuminori KishinoKeiji YamamotoAkira Sawada
    • Kouichi TakeneKimito IdemoriKoichi IkedaYoshiro SekiFuminori KishinoKeiji YamamotoAkira Sawada
    • B60R25/00
    • G07C9/00309G07C9/00111
    • To provide an entry control system as well as an entry control method allowing for an easy entry of user, permitting a restriction to persons who have a legitimate right to enter a facility, an illuminating device (1) emits a modulated visible light signal 13 modulated by use of a door ID code into a preset illumination range, the modulated visible light signal 13 from the illuminating device (1) is received by a mobile terminal (2) portable by the user, where it is demodulated for wireless signal transmission, and the door ID code transmitted from the mobile terminal (2) is received by an authentication device (3), which judges whether or not the door ID code is legitimate, and generates an unlock command when the door ID code is judged to be legitimate, and a door (4) for a facility controlled of entry receives the unlock command from the authentication device (3), whereby it is unlocked.
    • 为了提供入口控制系统以及允许用户容易进入的入口控制方法,允许对具有进入设施的合法权利的人员进行限制,照明设备(1)发射调制的可见光信号13调制 通过使用门ID码进入预设照明范围,来自照明装置(1)的调制可见光信号13由用户可携带的移动终端(2)接收,在那里被解调用于无线信号传输,以及 从移动终端(2)发送的门ID码由认证装置(3)接收,认证装置(3)判断门ID码是否合法,并且当门ID码被判断为合法时,产生解锁指令, 并且用于进入控制的设施的门(4)从认证装置(3)接收解锁命令,由此解锁。
    • 8. 发明申请
    • DEVICE AND METHOD FOR HUMIDITY ESTIMATION
    • 用于湿度估计的装置和方法
    • US20110088455A1
    • 2011-04-21
    • US12903640
    • 2010-10-13
    • Yasuo TAKAGIKoichi IkedaYukio HiraokaHisashi KobayashiAkihiro Fujii
    • Yasuo TAKAGIKoichi IkedaYukio HiraokaHisashi KobayashiAkihiro Fujii
    • G01N19/10
    • F24F11/30F24F2110/20
    • A humidity estimation device connected with an air-conditioner includes a charge airflow rate estimation (CARE) unit, a charge air absolute humidity estimation (CAAHE) unit, an indoor generated vapor amount estimation (IGVAE) unit, and an indoor absolute humidity estimation (IAHE) unit. The CARE unit calculates an estimated charge airflow rate (ECAR) of the air-conditioner based on operation control information of the charge fan and a preset fan differential pressure. The CAAHE unit calculates an estimated charge air absolute humidity (ECAAH) of the air-conditioner based on a charge air temperature and a preset charge air relative humidity. The IGVAE unit calculates an estimated indoor generated vapor amount (EIGVA) based on an indoor temperature, the number of persons in the room and activity index values of the persons. The IAHE unit calculates an estimated absolute humidity in the room based on the ECAR, the ECAAH and the EIGVA.
    • 与空调机连接的湿度估计装置包括充气流量估计(CARE)单元,增压空气绝对湿度估计(CAAHE)单元,室内产生蒸气量估计单元和室内绝对湿度估计( IAHE)单位。 CARE单元基于充电风扇的操作控制信息和预设的风扇差压来计算空调的估计的充气流量(ECAR)。 CAAHE单元基于增压空气温度和预设的充气空气相对湿度来计算空调器的估计的增压空气绝对湿度(ECAAH)。 IGVAE单元基于室内温度,房间中的人数和人的活动指标值来计算估计的室内产生蒸气量(EIGVA)。 IAHE单位根据ECAR,ECAAH和EIGVA计算房间的绝对湿度估计值。