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1. 发明申请

US20050161615A1 Position detecting method, surface shape estimating method, and exposure apparatus and device manufacturing method using the same 审中-公开
标题翻译：位置检测方法，表面形状估计方法以及使用该方法的曝光装置和装置制造方法
公开(公告)号：US20050161615A1
公开(公告)日：2005-07-28
申请号：US10505997
申请日：2003-03-07
申请人： Kohei Maeda , Seiya Miura
发明人： Kohei Maeda , Seiya Miura
IPC分类号： G01B11/00 , G01B11/24 , G03F7/20 , G03F9/00 , H01L21/027 , G01N21/00
CPC分类号： G03F1/64 , G03F9/7023 , G03F9/7026 , G03F9/7088
摘要： A position detecting system including a detecting system for detecting positions, at different points on a surface of a reticle having a predetermined pattern formed thereon, with respect to a direction substantially perpendicular to the reticle surface, wherein the detecting system includes a light projecting portion for directing light from a light source to the reticle surface and a light receiving portion for receiving reflection light from the reticle surface, and wherein the angle of incidence of light from the light projecting portion, being incident on the reticle surface, is not less than 45 degrees.
摘要翻译：一种位置检测系统，包括：检测系统，用于在相对于基本上垂直于所述标线片表面的方向上检测在其上形成有预定图案的标线片的表面上的不同点处的位置，其中所述检测系统包括：用于将光从光源引导到光罩表面，以及光接收部分，用于接收来自光罩表面的反射光，并且其中入射在光罩表面上的来自光投射部分的光的入射角不小于45° 度。

2. 发明申请

US20090263750A1 FOREIGN PARTICLE INSPECTION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE 有权
标题翻译：外来粒子检查装置，曝光装置和制造装置的方法
公开(公告)号：US20090263750A1
公开(公告)日：2009-10-22
申请号：US12424468
申请日：2009-04-15
申请人： Kohei Maeda
发明人： Kohei Maeda
IPC分类号： G03F7/22 , G01N21/88 , G03B27/42
CPC分类号： G03F1/84 , G01N21/94 , G01N21/956 , G01N2021/95676 , G03B27/42 , G03F7/7085 , G03F7/70908
摘要： A foreign particle inspection apparatus includes a light projecting unit, a photo-receiving unit which receives the scattered light, and a. The photo-receiving unit is arranged such that its optical axis is tilted by a first angle with respect to a plane including the optical axis and the normal axis to the surface. When the angle of the polarization axis of the projected light with respect to the plane is defined as a second angle, the controller controls at least one of the polarization axis and the arrangement of the photo-receiving unit so that the differences between the first angle and the second angle become a first state and a second state, thereby determining a foreign particle based on the outputs from the photo-receiving unit in the first state and the second state.
摘要翻译：外来粒子检查装置包括光投射单元，接收散射光的光接收单元，a。光接收单元被布置成使得其光轴相对于包括光轴和与表面的法线轴线的平面倾斜第一角度。当投影光相对于平面的偏振轴的角度被定义为第二角度时，控制器控制偏振轴和光接收单元的布置中的至少一个，使得第一角度并且第二角度成为第一状态和第二状态，从而基于来自第一状态和第二状态的光接收单元的输出来确定异物。

3. 发明申请

US20090225327A1 POSITION MEASUREMENT APPARATUS, POSITION MEASUREMENT METHOD, AND EXPOSURE APPARATUS 审中-公开
标题翻译：位置测量装置，位置测量方法和曝光装置
公开(公告)号：US20090225327A1
公开(公告)日：2009-09-10
申请号：US12398797
申请日：2009-03-05
申请人： Kohei Maeda
发明人： Kohei Maeda
IPC分类号： G01B11/00 , G01B9/02
CPC分类号： G03F9/7049 , G03F9/7026
摘要： A position measurement apparatus includes a first beam splitter configured to split light from a light source into reference light and measurement light, a reference mirror configured to receive the reference light and a second beam splitter configured to synthesize the reference light reflected on the reference mirror with the measurement light that enters and is reflected on an object to be measured. The position measurement apparatus drives an object to be measured through a driving mechanism, detects the interference pattern through a photoelectric conversion element, and calculates a surface position of the object to be measured based on a change of a detection signal obtained from the interference pattern. The position measurement apparatus further includes a selector configured to select a signal from an interference area between reflected measurement light and reflected reference light.
摘要翻译：位置测量装置包括：第一分束器，被配置为将来自光源的光分成参考光和测量光;配置为接收参考光的参考反射镜;以及配置成将参考反射镜上参考光合成的第二分束器，测量光进入并被反射在待测物体上。位置测量装置通过驱动机构驱动要测量的物体，通过光电转换元件检测干涉图案，并且基于从干涉图案获得的检测信号的变化来计算待测物体的表面位置。位置测量装置还包括选择器，其被配置为从反射测量光和反射参考光之间的干涉区域中选择信号。

4. 发明授权

US09341196B2 Hydraulic oil tank attachment structure of construction machine 有权
标题翻译：施工机械液压油箱附件结构
公开(公告)号：US09341196B2
公开(公告)日：2016-05-17
申请号：US14002475
申请日：2012-03-12
申请人： Junya Kawamoto , Kohei Maeda
发明人： Junya Kawamoto , Kohei Maeda
IPC分类号： F15B1/26 , E02F9/08
CPC分类号： F15B1/26 , E02F9/0883 , Y10T137/6881
摘要： A hydraulic oil tank attachment structure arranged in a construction machine secures the strength of a hydraulic oil tank as well as secures a large capacity thereof. The attachment structure is arranged in a compact excavator provided with a revolving superstructure, a working device attached to the revolving superstructure, a hydraulic actuator including a revolving motor that drives the revolving superstructure and an actuator that drives the working device. A hydraulic oil tank made of synthetic resin, which stores hydraulic oil to be supplied to the hydraulic actuator, is attached on a revolving frame of the revolving superstructure. The hydraulic oil tank attachment structure has a holding member provided with a projecting part formed on a side surface of the tank, which is fixed on the revolving frame of the revolving superstructure so as to surround side surfaces thereof to hold the hydraulic oil tank via the projecting part.
摘要翻译：设置在施工机械中的液压油箱安装结构确保了液压油箱的强度并确保其大容量。该安装结构设置在具有旋转超结构的紧凑型挖掘机中，安装在旋转上部结构上的作业装置，包括驱动旋转上部结构的旋转马达和驱动该加工装置的致动器的液压致动器。将由供给液压致动器的液压油储存在合成树脂中的液压油箱安装在旋转上部结构的旋转框架上。液压油箱安装结构具有保持构件，该保持构件设置有形成在罐的侧表面上的突出部分，该突出部分固定在旋转上部结构的旋转框架上以围绕其侧表面，以通过该侧面保持液压油箱突出部分。

5. 发明授权

US07498596B2 Exposure method that obtains, prior to exposure, reticle surface form data and measurement position error, for scanning control 失效
标题翻译：在曝光前获得掩模版表面形状数据和测量位置误差的曝光方法，用于扫描控制
公开(公告)号：US07498596B2
公开(公告)日：2009-03-03
申请号：US11438459
申请日：2006-05-23
申请人： Kohei Maeda
发明人： Kohei Maeda
IPC分类号： H01L21/027 , G03B27/42 , G01N21/00
CPC分类号： G03F7/70725 , G03F7/70783 , G03F9/7026 , G03F9/7034
摘要： An exposure method for exposing a pattern of a reticle onto a plate, via a projection optical system, while synchronously scanning the reticle and the plate. The exposure method includes the steps of (a) measuring before exposing, the measuring step including (i) a first substep of obtaining surface form data that shows a surface form of the reticle, and (ii) a second substep of detecting a measurement position having an abnormal measurement result as an error measurement position among measurement positions, to measure the surface form of the reticle based on a measurement result of the obtaining substep, and (b) controlling synchronous scanning of the reticle and the plate using the measurement result of the detecting substep, except for the detecting result of the error measurement position.
摘要翻译：一种曝光方法，用于通过投影光学系统将掩模版图案曝光在板上，同时扫描掩模版和板。曝光方法包括以下步骤：（a）在曝光之前进行测量，所述测量步骤包括（i）获得表面形式数据的第一子步骤，所述表面形式数据显示所述标线的表面形状;以及（ii）检测测量位置的第二子步骤在测量位置之间具有作为误差测量位置的异常测量结果，基于获得子步骤的测量结果来测量光罩的表面形状，以及（b）使用测量结果控制标线片和板的同步扫描检测子步骤，除了误差测量位置的检测结果。

6. 发明申请

US20060273267A1 Exposure method and apparatus 失效
标题翻译：曝光方法和装置
公开(公告)号：US20060273267A1
公开(公告)日：2006-12-07
申请号：US11438459
申请日：2006-05-23
申请人： Kohei Maeda
发明人： Kohei Maeda
IPC分类号： G01N21/86
CPC分类号： G03F7/70725 , G03F7/70783 , G03F9/7026 , G03F9/7034
摘要： An exposure method for exposing a pattern of a reticle onto a plate, via a projection optical system, while synchronously scanning the reticle and the plate, said exposure method comprising the steps of obtaining surface form data that shows a surface form of the reticle, and controlling synchronous scanning of the reticle and the plate based on the surface form data, wherein said surface form obtaining step includes the steps of detecting a measurement position having an abnormal measurement result as an error measurement position among measurement positions to measure the surface form of the reticle, and measuring the surface form of the reticle at a scan speed used for exposure, and wherein said controlling step uses, as the surface form data, a measurement result of the measuring step that excludes a measurement result with the error measurement position.
摘要翻译：一种曝光方法，用于通过投影光学系统将掩模版图形曝光在同时扫描掩模版和板之间，所述曝光方法包括以下步骤：获得显示掩模版的表面形式的表面形状数据;以及基于表面形状数据控制标线板和板的同步扫描，其中所述表面形状获取步骤包括以下步骤：检测具有异常测量结果的测量位置作为测量位置之间的误差测量位置，以测量测量位置的表面形状并且以用于曝光的扫描速度测量掩模版的表面形状，并且其中所述控制步骤使用排除测量结果的测量步骤的测量结果作为表面形式数据。

7. 发明授权

US5902837A Photo-curing resin composition comprising a propenyl ether group-containing compound 失效
标题翻译：包含含丙烯基醚基的化合物的光固化树脂组合物
公开(公告)号：US5902837A
公开(公告)日：1999-05-11
申请号：US693638
申请日：1996-08-09
申请人： Takao Saito , Kohei Maeda , Naoshi Ozasa
发明人： Takao Saito , Kohei Maeda , Naoshi Ozasa
IPC分类号： C08F2/50 , C08F290/12 , C08F290/14 , C09D11/10 , G03F7/027 , G03F7/038 , C08L75/16
CPC分类号： C09D11/101 , C08F290/12 , C08F290/14 , G03F7/027 , G03F7/0388
摘要： A photocurable resin composition comprising a propenyl ether group-containing compound (A) having propenyl ether groups of the following formula (1) and having a number-average molecular weight of not less than 500, and a cationic photopolymerization initiator (B).CH.sub.3 --CH.dbd.CH--O-- (1)The object is to provide a photocurable resin composition which cures at a higher speed than a vinyl ether compound on exposure to light irradiation, and has improved flow characteristics, physical property of cured resin, and adhesion to metal.
摘要翻译：包含具有下式（1）的具有丙烯基醚基并且数均分子量不小于500的具有丙烯基醚基的化合物（A）和阳离子光聚合引发剂（B）的光固化性树脂组合物。 -CH = CH-O-（1）目的是提供一种光固化树脂组合物，其在暴露于光照射下以比乙烯基醚化合物更高的速度固化，并且具有改善的流动特性，固化树脂的物理性能和粘合力到金属。

8. 发明申请

US20140000726A1 Hydraulic Oil Tank Attachment Structure of Construction Machine 有权
标题翻译：施工机械液压油箱附件结构
公开(公告)号：US20140000726A1
公开(公告)日：2014-01-02
申请号：US14002475
申请日：2012-03-12
申请人： Junya Kawamoto , Kohei Maeda
发明人： Junya Kawamoto , Kohei Maeda
IPC分类号： F15B1/26
CPC分类号： F15B1/26 , E02F9/0883 , Y10T137/6881
摘要： A hydraulic oil tank attachment structure arranged in a construction machine secures the strength of a hydraulic oil tank as well as secures a large capacity thereof. The attachment structure is arranged in a compact excavator provided with a revolving superstructure, a working device attached to the revolving superstructure, a hydraulic actuator including a revolving motor that drives the revolving superstructure and an actuator that drives the working device. A hydraulic oil tank made of synthetic resin, which stores hydraulic oil to be supplied to the hydraulic actuator, is attached on a revolving frame of the revolving superstructure. The hydraulic oil tank attachment structure has a holding member provided with a projecting part formed on a side surface of the tank, which is fixed on the revolving frame of the revolving superstructure so as to surround side surfaces thereof to hold the hydraulic oil tank via the projecting part.
摘要翻译：设置在施工机械中的液压油箱安装结构确保了液压油箱的强度并确保其大容量。该安装结构设置在具有旋转超结构的紧凑型挖掘机中，安装在旋转上部结构上的作业装置，包括驱动旋转上部结构的旋转马达和驱动该加工装置的致动器的液压致动器。将由供给液压致动器的液压油储存在合成树脂中的液压油箱安装在旋转上部结构的旋转框架上。液压油箱安装结构具有保持构件，该保持构件设置有形成在罐的侧表面上的突出部分，该突出部分固定在旋转上部结构的旋转框架上以围绕其侧表面，以通过该侧面保持液压油箱突出部分。

9. 发明授权

US06185381B2 Image forming apparatus 有权
标题翻译：图像形成装置
公开(公告)号：US06185381B2
公开(公告)日：2001-02-06
申请号：US09467176
申请日：1999-12-20
申请人： Takashi Nakahara , Hitoshi Ueki , Tomoko Tanaka , Kohei Maeda , Atsushi Wada , Hiroshi Fuse
发明人： Takashi Nakahara , Hitoshi Ueki , Tomoko Tanaka , Kohei Maeda , Atsushi Wada , Hiroshi Fuse
IPC分类号： G03G1500
CPC分类号： G03G15/231 , G03G2215/0054 , G03G2215/00544 , G03G2215/00548 , G03G2215/00721 , G03G2215/00725 , G03G2215/0078 , G03G2215/00784
摘要： A position detecting sensor for detecting that a sheet having come into an openable both-face conveying path for reversing the surfaces of the sheet having an image formed on one surface thereof and conveying the reversed sheet to an image forming portion has arrived at a predetermined re-feeding position, and the position detecting sensor is designed to be capable of detecting also the presence or absence of the occurrence of jam in the both-face conveying path, the mounting and dismounting of a both-face conveying portion and the opening and closing of the both-face conveying path.
摘要翻译：一种位置检测传感器，用于检测进入可打开的双面输送路径的纸张，以便使具有形成在其一个表面上的图像的纸张的表面反转并将反转的纸张传送到图像形成部分已经到达预定的重新进给位置，并且位置检测传感器被设计成能够还检测双面传送路径中是否存在卡纸的发生，两面传送部的安装和拆卸以及打开和关闭的两面输送路径。

10. 发明授权

US5994421A Water-absorbent resin dispersion and polyurethane composition 失效
标题翻译：吸水树脂分散体和聚氨酯组合物
公开(公告)号：US5994421A
公开(公告)日：1999-11-30
申请号：US817772
申请日：1997-06-04
申请人： Kazuya Otani , Masahiro Matsuoka , Kohei Maeda , Kozaburo Nagata , Takao Ando , Toru Nakanishi , Isao Ishikawa , Takayuki Tsuji
发明人： Kazuya Otani , Masahiro Matsuoka , Kohei Maeda , Kozaburo Nagata , Takao Ando , Toru Nakanishi , Isao Ishikawa , Takayuki Tsuji
IPC分类号： C08F2/22 , C08F2/44 , C08G18/08 , C08G18/63 , C08G18/64 , C08L75/00
CPC分类号： C08G18/638 , C08G18/0861 , C08G18/632 , C08G18/6484 , C08G2101/00 , C08G2101/005 , C08G2101/0083 , C08G2210/00
摘要： A water-absorbent resin dispersion comprising a water-absorbent resin (B) or a hydrous gel thereof dispersed in a liquid or heat-meltable organic active-hydrogen compound (A), wherein said resin (B) is formed by the polymerization of a water-soluble monomer or its precursor and a cross-linker and/or a polysaccharide in the compound (A); and a process for producing a polyurethane resin by the reaction of the dispersion with an organic polyisocyanate compound. As the polyurethane resin is excellent in the capacity and rate of absorption, it is useful as absorbent articles such as paper diaper and sanitary goods, humidity modifiers, cutoff material, and so forth.
摘要翻译： PCT No.PCT / JP95 / 02171 Sec。 371日期：1997年6月4日 102（e）日期1997年6月4日PCT提交1995年10月23日PCT公布。 WO96 / 12767 PCT出版物日期1996年5月2日一种吸水性树脂分散体，其分散在液体或热熔性有机活性氢化合物（A）中的吸水性树脂（B）或其含水凝胶，其中所述树脂（B）由在化合物（A）中水溶性单体或其前体和交联剂和/或多糖的聚合; 以及通过分散体与有机多异氰酸酯化合物的反应制备聚氨酯树脂的方法。由于聚氨酯树脂的吸收能力和吸收率优异，因此作为纸尿布，卫生用品等吸收性物品，湿度调节剂，切断材料等是有用的。

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