专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US4672012A Process for modifying structural profiles in resist layers 失效
标题翻译：改进抗蚀剂层结构轮廓的方法
公开(公告)号：US4672012A
公开(公告)日：1987-06-09
申请号：US733306
申请日：1985-05-13
申请人： Knut Heitmann , Martin Hoppe , Eckhard Schneider , Andreas Thaer
发明人： Knut Heitmann , Martin Hoppe , Eckhard Schneider , Andreas Thaer
IPC分类号： G03C7/00 , G02B5/18 , G03C5/00 , G03C5/08 , G03F7/11 , G03F7/20 , G03F7/26 , G03F7/30 , G03F7/36 , G03F7/38 , G03F7/00 , G03F7/02
CPC分类号： G03F7/36 , G03F7/11 , G03F7/20 , G03F7/38
摘要： A process for modifying structural profiles produced by polymerization or depolymerization in resist layers. As a function of the acoustic impedance of the substrate carrying the resist layer, the structures are irradiated with an ultrasonic beam. An ultrasonic beam for which the substrate represents a high impedance is used in order to enhance the contrast of the structures. An ultrasonic beam for which the substrate represents a low impedance is used to weaken the contrast. An acoustic microscope is especially suitable for carrying out the process.
摘要翻译：用于改变抗蚀剂层中聚合或解聚产生的结构分布的方法。作为承载抗蚀剂层的基板的声阻抗的函数，用超声波束照射结构。使用基板表示高阻抗的超声波束，以增强结构的对比度。使用基板代表低阻抗的超声波束来削弱对比度。声学显微镜特别适用于进行该过程。

2. 发明授权

US4612267A Process for producing structures in resist layers using ultrasonic irradiation 失效
标题翻译：使用超声波照射在抗蚀层中制造结构的方法
公开(公告)号：US4612267A
公开(公告)日：1986-09-16
申请号：US733188
申请日：1985-05-13
申请人： Knut Heitmann , Martin Hoppe , Eckhard Schneider , Andreas Thaer
发明人： Knut Heitmann , Martin Hoppe , Eckhard Schneider , Andreas Thaer
IPC分类号： G03C5/00 , G03C5/08 , G03F7/039 , G03F7/20 , G03F7/26 , G03F7/36 , G03F7/38 , G03F7/00 , G03F7/02
CPC分类号： G03F7/039 , G03F7/20 , G03F7/36 , G03F7/38
摘要： A process for the production of structures by the polymerization, or fragmentation of resist layers comprising the steps of effecting an incomplete exposure of the resist layer corresponding to the pattern of the structures, and of fully developing the structure in the resist layer by ultrasonic irradiation.An acoustic microscope is preferably used for the ultrasonic irradiation, whereby the formation of the structure in the resist layer may also be observed.
摘要翻译：通过抗蚀层的聚合或分裂生成结构的方法，包括以下步骤：对抗结构图案进行不完全曝光，并通过超声波照射完全显影抗蚀剂层中的结构。优选使用声学显微镜进行超声波照射，从而也可以观察抗蚀剂层中的结构的形成。

3. 发明授权

US4669313A Method and apparatus for local selective detection and generation of polar structure alignments in microscopic object areas 失效
标题翻译：用于局部选择性检测和在微观对象区域中产生极性结构对准的方法和装置
公开(公告)号：US4669313A
公开(公告)日：1987-06-02
申请号：US733189
申请日：1985-05-13
申请人： Klaus Dransfeld , Knut Heitmann
发明人： Klaus Dransfeld , Knut Heitmann
IPC分类号： G01N29/24 , G01N29/06 , G01N29/00
CPC分类号： G01N29/06
摘要： Polar structures in microscopic object areas, such as, for example, electric or magnetic dipoles, can be locally selectively detected with high resolution if either resonant ultrasonic waves are induced in the object area by a locally effective high-frequency field and are detected by means of a focused acoustic lens arrangement, or electric or magnetic high-frequency oscillations are induced in the object area by focused ultrasonic waves and are detected by an appropriate receiver. By comparing the phases and/or amplitudes of the induced and of the detected waves, these provide information on the existence and the direction of the dipoles. Existing dipole alignments can be made energetically unstable by a critical direct-current electric or magnetic field and locally selectively reversed by the focused ultrasonic beam.
摘要翻译：如果通过局部有效的高频场在对象区域中感应到共振超声波，并且通过装置检测到，在微观物体区域中的极地结构，例如电或磁偶极子可以以高分辨率被局部选择性地检测聚焦的声透镜布置，或者通过聚焦的超声波在对象区域中引起电或磁高频振荡，并由适当的接收器检测。通过比较感应波和检测波的相位和/或振幅，这些提供关于偶极子的存在和方向的信息。现有的偶极对准可以由临界直流电场或磁场在能量上不稳定，并且被聚焦的超声波束局部选择性反转。

4. 发明授权

US4496231A Mirror reflex camera with exposure meter 失效
标题翻译：镜面反光相机带曝光表
公开(公告)号：US4496231A
公开(公告)日：1985-01-29
申请号：US400253
申请日：1982-07-21
申请人： Knut Heitmann , Klaus-Dieter Schaefer
发明人： Knut Heitmann , Klaus-Dieter Schaefer
IPC分类号： G03B7/0997 , G03B7/099
CPC分类号： G03B7/09976
摘要： The exposure meter is used in mirror reflex cameras wherein an image of an object projected by a picture taking lens onto an image plane is observed by means of a pentaprism through an ocular. For the purpose of the selective integral or spot exposure metering, a pentaprism (6) is provided at the lower edge of its exit surface with a partly transmitting concave mirror (16). The angles of the pentaprism (6) are selected so that a portion of the light flux leaving the exit pupil (EP) of the picture-taking lens (2) is incident on this concave mirror (16). A first photoelectric detector system is associated with the concave mirror (16) and a second detector system is associated with the prism surface (6c) following the concave mirror in the direction of the beam path, and the output signals from these detectors control a display and/or an exposure control. An additional optical component (13,14a,15b,15) is provided to implement a desired beam path in the pentaprism (6).
摘要翻译：曝光表用于镜反射相机中，其中通过眼睛的五棱镜观察由图像拍摄镜头投射到图像平面上的物体的图像。为了选择性积分或点曝光测光的目的，五棱镜（6）设置在其出射表面的下边缘处，具有部分透射的凹面镜（16）。选择五棱镜（6）的角度使得离开摄像镜头（2）的出射光瞳（EP）的光束的一部分入射在该凹面镜（16）上。第一光电检测器系统与凹面镜（16）相关联，并且第二检测器系统与沿着光束路径的方向的凹面镜之后的棱镜表面（6c）相关联，并且来自这些检测器的输出信号控制显示器和/或曝光控制。提供附加的光学部件（13,14a，15b，15）以在五棱镜（6）中实现期望的光束路径。

5. 发明授权

US4195425A System for measuring position and/or velocity 失效
标题翻译：用于测量位置和/或速度的系统
公开(公告)号：US4195425A
公开(公告)日：1980-04-01
申请号：US866908
申请日：1978-01-04
申请人： Ludwig Leitz , Knut Heitmann
发明人： Ludwig Leitz , Knut Heitmann
IPC分类号： G01P3/36 , G01S11/12 , G01C3/00 , G01C3/08
CPC分类号： G01S11/12 , G01P3/36
摘要： System for measuring the relative position and/or velocity of two objects with respect to each other and/or with respect to a common reference system, such as the ground, according to the magnitude and direction thereof, using electro-optical measuring means, the improvement comprising:(1) producing images of the object to be measured in at least two different spatial positions;(2) producing A.C. electrical signals of different frequency proportional to the relative movements of these images to at least one optical correlation system; and(3) evaluating these signals, with the use of the trigonometrical relationships of the perspective imaging, in a computer to determine the measured values.
摘要翻译：用于使用电光测量装置根据其大小和方向测量两个物体相对于彼此和/或相对于公共基准系统（例如地面）的相对位置和/或速度的系统，改进包括：（1）在至少两个不同的空间位置产生要测量对象的图像; （2）产生与这些图像相对于至少一个光学相关系统的相对运动成比例的不同频率的交流电信号; 和（3）使用计算机中的透视成像的三角关系评估这些信号，以确定测量值。

6. 发明授权

US3989378A Method for no-contact measurement 失效
标题翻译：无接触式测量方法
公开(公告)号：US3989378A
公开(公告)日：1976-11-02
申请号：US480822
申请日：1974-06-19
申请人： Knut Heitmann , Eckart Schneider , Hermann Eisenkopf
发明人： Knut Heitmann , Eckart Schneider , Hermann Eisenkopf
IPC分类号： G01D5/36 , G01P3/36
CPC分类号： G01P3/36 , G01D5/36
摘要： Method for no-contact measurement of the relative velocity, position, or displacement path of objects without special optical markers with respect to a reference position in at least one coordinate direction, or of the degree of image quality of an image wherein the apparatus images the object on a grating and the light fluxes leaving this grating are measured by means of photoelectric elements. The output signals of the photoelectric elements exhibit a frequency component proportional to the velocity of travel. The present invention is distinguished from the prior art by having a physical beam splitter (6,13) inserted in the imaging beam path in front of the grating (5,14), and preferably several polarizing beam splitters (7,30-33) with at least respectively one associated photoelectric receiver pair (10,11,16-19 16'-19') are connected after the grating (5,14).
摘要翻译：相对于至少一个坐标方向上的参考位置的特殊光学标记的物体的相对速度，位置或位移路径或图像的图像质量的程度的非接触式测量的方法，其中，物体在光栅上，离开该光栅的光束通过光电元件测量。光电元件的输出信号表现出与行进速度成比例的频率分量。通过使物理分束器（6,13）插入到光栅（5,14）前方的成像光束路径中，并且优选地多个偏振分束器（7,30-33），本发明与现有技术不同，在光栅（5,14）之后至少分别具有一个相关联的光电接收器对（10,11,16-19 16'-19'）。

7. 发明授权

US5212987A Acoustic screen scan microscope for the examination of an object in the short-range field of a resonant acoustic oscillator 失效
标题翻译：声屏扫描显微镜，用于在谐振声振荡器的短距离场中检查物体
公开(公告)号：US5212987A
公开(公告)日：1993-05-25
申请号：US794610
申请日：1991-11-15
申请人： Klaus Dransfeld , Ulrich Fischer , Peter Guethner , Knut Heitmann
发明人： Klaus Dransfeld , Ulrich Fischer , Peter Guethner , Knut Heitmann
IPC分类号： G01H3/12 , G01H13/00 , G01N29/06
CPC分类号： G01Q60/22 , B82Y20/00 , B82Y35/00 , G01H13/00 , G01H3/125 , G01N29/06 , Y10S977/849 , Y10S977/86 , Y10S977/862 , Y10S977/869 , Y10S977/881
摘要： An acoustic scanning microscope uses damping of a resonant acoustic oscillator and an acoustic near-field effect. In a preferred embodiment, a 32 KHz tuning fork serving as an acoustic oscillator with a 50 nm point achieves a vertical resolution of 5 nm and a horizontal resolution of 50 nm in the case of a minimum distance of approximately 50 nm. Frequency or amplitude variation of the resonant acoustic oscillator can be used. The acoustic near-field effect is dependent on the coupling medium, e.g., air, and the pressure, e.g., normal pressure.
摘要翻译：声学扫描显微镜使用谐振声振荡器的阻尼和声学近场效应。在优选实施例中，作为具有50nm点的声振荡器的32KHz音叉在最小距离为大约50nm的情况下实现5nm的垂直分辨率和50nm的水平分辨率。可以使用谐振声振荡器的频率或振幅变化。声学近场效应取决于耦合介质，例如空气，以及压力，例如常压。

8. 发明授权

US4175365A Method and apparatus for measuring distances 失效
标题翻译：测量距离的方法和装置
公开(公告)号：US4175365A
公开(公告)日：1979-11-27
申请号：US661761
申请日：1976-02-26
申请人： Ludwig Leitz , Knut Heitmann , Eckart Schneider , Horst Schmidt
发明人： Ludwig Leitz , Knut Heitmann , Eckart Schneider , Horst Schmidt
IPC分类号： G01C3/08 , G01D5/38 , G02B27/46
CPC分类号： G01C3/085 , G01D5/38 , G02B27/46
摘要： A method and apparatus for the automatic evaluation of stereoscopic images by the determination of the maximum degree of correlation of identical images of an object reproduced by two objectives, for example for a range finder, wherein the two images are superimposed on one and/or two position frequency filters (82, 21, 31, 32) identical in their structures; the respective superimposed signal produced is fed respectively to one photoelectric receiver (13,14,43,44); and the output signals of the photoelectric receivers are used for indicating and/or control purposes. In one embodiment the position frequency filter (82) is moved and the output signals are correlated with each other. In another embodiment the output signals are subtracted from each other.
摘要翻译：用于通过确定由两个目标再现的对象的相同图像的最大相关度的自动评估的方法和装置，例如用于测距仪，其中两个图像叠加在一个和/或两个位置频率滤波器（82,21,31,32）的结构相同; 所产生的各个叠加信号分别馈送到一个光电接收器（13,14,44,44）; 并且光电接收器的输出信号用于指示和/或控制目的。在一个实施例中，位置频率滤波器（82）被移动并且输出信号彼此相关。在另一实施例中，输出信号彼此相减。

9. 发明授权

US4071772A Apparatus for measurement of mechanical aberrations affecting stereoscopic image analysis 失效
标题翻译：用于测量影响立体图像分析的机械像差的装置
公开(公告)号：US4071772A
公开(公告)日：1978-01-31
申请号：US625030
申请日：1975-10-23
申请人： Ludwig Leitz , Knut Heitmann , Horst Schmidt
发明人： Ludwig Leitz , Knut Heitmann , Horst Schmidt
IPC分类号： G01C3/06 , G01C3/00 , G01C3/02 , G01C11/06 , G02B7/32 , G02B7/34 , G02B27/38 , G01C11/12
CPC分类号： G01C3/02 , G01C11/06 , G02B7/32 , G02B7/34
摘要： Apparatus to automatically analyze stereoscopic images comprising the determination of the maximum degree of correlation between two similar images of the same object projected by two objectives, for instance in a rangefinder, wherein the two images are superimposed on one or two spatial frequency filters identical in their structures, and wherein the particular generated superimposition signal, is preferably applied to a particular photoelectric detector and wherein the output signals from the latter are used for display and/or control purposes. The apparatus is improved by a system (20,20',21,21',22-25; 30-34) for generating a reference beam indicating mechanical changes affecting the image position of at least one of the measuring beams, at least one photoelectric detector (28,29;40) being associated with the one reference beam, the output signals from the one detector corresponding to the mechanical changes being used to display and/or correct the changes or the effects of same.
摘要翻译：用于自动分析立体图像的装置，包括确定由两个目标投射的相同物体的两个相似图像之间的最大相关度，例如在测距仪中，其中两个图像叠加在一个或两个相同的空间频率滤波器上结构，并且其中特定生成的叠加信号优选地应用于特定光电检测器，并且其中来自后者的输出信号用于显示和/或控制目的。该装置由用于产生参考光束的系统（20,20'，21,21'，22-25; 30-34）改进，该参考光束指示影响至少一个测量光束的图像位置的机械变化，至少一个光电检测器（28,29; 40）与一个参考光束相关联，来自一个检测器的对应于机械变化的输出信号用于显示和/或校正其变化或其影响。

10. 发明授权

US4071297A Method and apparatus for photoelectrically determining the position of at least one image focus plane 失效
标题翻译：用于光电确定至少一个图像聚焦平面的位置的方法和装置
公开(公告)号：US4071297A
公开(公告)日：1978-01-31
申请号：US673726
申请日：1976-04-05
申请人： Ludwig Leitz , Knut Heitmann , Eckart Schneider , Klaus Dieter Schaefer
发明人： Ludwig Leitz , Knut Heitmann , Eckart Schneider , Klaus Dieter Schaefer
IPC分类号： A61F9/08 , G02B7/34 , G02B27/40 , G02B27/46 , G01C3/08
CPC分类号： A61F9/08 , G02B27/40 , G02B27/46 , G02B7/34
摘要： A system for determining photoelectrically the position of at least one focus plane of an image within an optical apparatus, wherein the object is reproduced at least at one spatial frequency filter of an optical image correlator and there is measurement and/or display of the light fluxes leaving the local frequency filter.In this system light fluxes traversing differing pupil sections of the reproducing optics are modulated in common by a spatial frequency filter and are split up geometrically or physically, or by means of additional modulation in correspondence with the pupil sections. They are consecutively or simultaneously projected on a common photoelectric receiver or on separate photoelectric receivers, the output signals of which are processed further for purposes of controlling display and/or follow-up devices.
摘要翻译：一种用于光学地确定光学设备内的图像的至少一个聚焦平面的位置的系统，其中所述对象至少在光学图像相关器的空间频率滤波器上再现，并且存在光束的测量和/或显示离开本地频率滤波器。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式