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    • 1. 发明授权
    • Method for manufacturing a blazed grating, such a blazed grating and a spectrometer having such a blazed grating
    • 用于制造闪耀光栅的方法,这种闪耀光栅和具有这种闪耀光栅的光谱仪
    • US07175773B1
    • 2007-02-13
    • US10866957
    • 2004-06-14
    • Klaus HeidemannHolger KiereyBruno Nelles
    • Klaus HeidemannHolger KiereyBruno Nelles
    • B29D11/00
    • B29D11/00278G02B5/1838G02B5/1852G02B5/1861
    • In a method for manufacturing a blazed grating from a prefabricated initial blazed grating, a blazed grating the substrate of a first material of which has a surface, which has an initial surface profile having an initial blaze angle, is provided. An auxiliary layer of a second material is applied onto the surface of the substrate, wherein the second material is different from the first material. The auxiliary layer is removed at least partially by means of etching, wherein the etching is carried out at least until the etching simultaneously acts on the auxiliary layer and on the initial surface profile of the substrate. A ratio between an etching rate for the auxiliary layer and an etching rate for the substrate is adjusted such that the initial blaze angle is reduced to a final blaze angle. Further, a blazed grating manufactured in that way and an optical device having such a blazed grating, are described.
    • 在从预制的初始闪耀光栅制造闪耀光栅的方法中,提供了一种闪耀光栅,其第一材料的基板具有具有初始表面轮廓的表面,该初始表面轮廓具有初始辉光角。 第二材料的辅助层被施加到基底的表面上,其中第二材料不同于第一材料。 至少部分通过蚀刻去除辅助层,其中蚀刻至少直到蚀刻同时作用于辅助层和基板的初始表面轮廓上。 调整辅助层的蚀刻速率与基板的蚀刻速率之间的比率,使得初始闪耀角降低到最终的火焰角。 此外,描述了以这种方式制造的闪耀光栅和具有这种闪耀光栅的光学装置。
    • 2. 发明授权
    • Littrow grating and use of a littrow grating
    • Littrow光栅和使用littrow光栅
    • US06788465B2
    • 2004-09-07
    • US09863002
    • 2001-05-22
    • Bernd KleemannKlaus Heidemann
    • Bernd KleemannKlaus Heidemann
    • G02B518
    • G02B5/1833G02B5/1838G02B5/1861
    • A Littrow grating (1) comprises a multiplicity of parallel diffraction structures (3) succeeding one another periodically. The latter are arranged on a support (2) defining a base area (4). A diffraction structure (3) comprises a blaze flank (5) inclined towards the base area (4) substantially at the Littrow angle (&dgr;). In addition the diffraction structure (3) comprises a counter-flank (6) which forms with the blaze flank (5) at the apex of a diffraction structure (3) an apex angle (&agr;) which is less than 90°. The counter-flank (6) comprises at least two substantially plane area sections (7, 8). The latter extend, bordering one another and inclined relative to one another through an angle of inclination (&bgr;), parallel with the extension direction of the diffraction structure (3). Due to the inclination of the at least two area sections (7, 8) relative to one another, the counter-flank (6) exhibits all in all a concave surface viewed from the light incidence side. A Littrow grating (1) of high reflectivity is obtained, which may be achieved with the removal of only a small amount of material at the manufacturing stage.
    • Ligrow光栅(1)包括周期性地彼此相继的多个平行衍射结构(3)。 后者布置在限定基部区域(4)的支撑件(2)上。 衍射结构(3)包括基本上以Littrow角(delta)朝向基部区域(4)倾斜的火焰侧面(5)。 此外,衍射结构(3)包括在衍射结构(3)的顶点处形成具有小于90°的顶角(α)的火焰侧面(5)的相对侧面(6)。 对面(6)包括至少两个基本上平面的区域部分(7,8)。 后者彼此相邻并且通过与衍射结构(3)的延伸方向平行的倾斜角(β)相对于彼此倾斜。 由于至少两个区域部分(7,8)相对于彼此的倾斜,所以相对侧面(6)在从光入射侧观察的全部凹凸表面中全部展现出来。 获得高反射率的Ligrow光栅(1),这可以通过在制造阶段仅去除少量材料来实现。