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    • 10. 发明授权
    • Probe system
    • 探测系统
    • US06762616B2
    • 2004-07-13
    • US10317088
    • 2002-12-12
    • Koji KawaguchiHiroshi AmemiyaHiroshi KanekoTatsuo Kawashima
    • Koji KawaguchiHiroshi AmemiyaHiroshi KanekoTatsuo Kawashima
    • G01R3126
    • G01R31/2868G01R31/2831G01R31/2862G01R31/2887
    • A probe system according to the present invention includes a probe unit and a loader unit which are adjacent to each other. The probe unit has a case defining a prober chamber for receiving an object to be tested, and a contact probe for testing the object received into the prober chamber. The loader unit has a case defining a loader chamber partially communicated with the prober chamber, and a carrying mechanism for carrying the object between the prober chamber and the loader chamber. In the loader unit, a main shielding cover for covering the carrying mechanism in the loader chamber is provided. The probe system is provided with means for supplying dry air into the interior of the main shielding cover of the loader unit and the prober chamber.
    • 根据本发明的探针系统包括彼此相邻的探针单元和加载器单元。 探针单元具有限定用于接收待测试对象的探测室的壳体和用于测试接收到探测室中的物体的接触探针。 装载机单元具有限定与探测室部分连通的装载器室的壳体,以及用于在探测室和装载室之间承载物体的承载机构。 在装载单元中,设置有用于覆盖装载机室内的搬运机构的主屏蔽罩。 探针系统设置有用于将干燥空气供应到装载机单元和探测室的主屏蔽盖的内部的装置。