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    • 2. 发明授权
    • Ridge type semiconductor laser of laterally-coupled distributed feedback and method of manufacturing the same
    • 脊式半导体激光器的横向耦合分布式反馈及其制造方法
    • US06573116B2
    • 2003-06-03
    • US09908560
    • 2001-07-20
    • Yoshiaki WatanabeKiyoshi TakeiNong ChenKiyofumi Chikuma
    • Yoshiaki WatanabeKiyoshi TakeiNong ChenKiyofumi Chikuma
    • H01L2100
    • H01S5/22H01S5/12H01S5/1231H01S5/1237H01S5/209
    • There is provided a method of manufacturing a ridge type LC-DFB semiconductor laser in which a laser substrate having a cladding layer made of a material for a ridge stripe formed on an active layer made of semiconductor. A stripe mask is formed on the cladding layer to form two lateral flat portions from the cladding layer, by a selective wet etching, so as to form a ridge stripe protruding therefrom and having a flat top portion at which the stripe mask capped. A grating mask is formed on the two lateral flat portions, side walls of the ridge stripe and the stripe mask. The grating mask has a periodic structure in the direction in which the ridge stripe extends. The two lateral flat portions and the side walls of the ridge stripe are dry-etched through the grating mask and then the two lateral flat portions and the side walls of the ridge stripe are wet-etched to form a grating of the material for the ridge stripe on the two lateral flat portions, the side walls of the ridge stripe and the active layer, so as to define a bracket grating portion adjacent to the ridge stripe.
    • 提供了一种制造脊型LC-DFB半导体激光器的方法,其中具有由用于形成在由半导体制成的有源层上的用于脊条的材料制成的包层的激光基板。 在包覆层上形成条纹掩模,通过选择性湿蚀刻从包覆层形成两个横向平坦部分,从而形成从其突出的脊条,并且具有条形掩模封盖的平坦的顶部。 在两个侧面平坦部分,脊条和条纹掩模的侧壁上形成光栅掩模。 栅格掩模在脊条延伸的方向上具有周期性结构。 通过光栅掩模对棱条的两个横向平坦部分和侧壁进行干蚀刻,然后将脊条的两个侧向平坦部分和侧壁湿法蚀刻以形成用于脊的材料的光栅 在两个横向平坦部分上的条纹,脊状条的边壁和有源层,以便限定与脊条相邻的托架光栅部分。
    • 3. 发明授权
    • Optical transmitter/receiver module and method of manufacturing the same
    • 光发射机/接收机模块及其制造方法
    • US06535670B1
    • 2003-03-18
    • US09425939
    • 1999-10-25
    • Kiyoshi TakeiYoshiaki WatanabeNong ChenKiyofumi Chikuma
    • Kiyoshi TakeiYoshiaki WatanabeNong ChenKiyofumi Chikuma
    • G02B626
    • G02B6/125G02B6/12004G02B6/12007G02B6/29361
    • An optical transmitter and receiver module de-multiplexes a multi-wavelength optical signal into at least an optical signal of one wavelength band, and receives and transmits the signal. The module includes a first substrate, with a cleavage plane, for supporting input and output wave guides which intersect each other at a portion on the cleavage plane and extend from the portion of intersection at an equal angle with respect to normal at the portion on the cleavage plane. The module also includes an interference filter that is in contact with the cleavage plane on the portion of intersection of the input and output wave guides of the first substrate. Further, the module includes a second substrate, with a cleavage plane in contact with the interference filter, for supporting a transmit/receive wave guide having receiver and transmitter wave guides which extend from the vicinity of the portion of intersection and are separated from each other.
    • 光发射机和接收机模块将多波长光信号解复用为至少一个波长带的光信号,并接收和发送信号。 该模块包括具有解理平面的第一衬底,用于支撑在解理平面上的一部分处彼此相交的输入和输出波导,并且在第一衬底上的相对于法线的相交角度相对于法线相交 劈裂平面。 该模块还包括与第一基板的输入和输出波导的相交部分上的解理平面接触的干涉滤光器。 此外,模块包括具有与干涉滤波器接触的解理面的第二基板,用于支撑具有从交叉部分附近延伸并彼此分离的接收器和发射器波导的发射/接收波导 。