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    • 9. 发明授权
    • Evaporation cooling module for semiconductor devices
    • 用于半导体器件的蒸发冷却模块
    • US4704658A
    • 1987-11-03
    • US857303
    • 1986-04-30
    • Kishio YokouchiYuichi SuzukiKoichi Niwa
    • Kishio YokouchiYuichi SuzukiKoichi Niwa
    • H01L23/34H05K7/20H02B1/00
    • H05K7/203H01L2924/0002
    • An evaporation cooling module for cooling plural semiconductor chips bonded on circuit boards immersed in a coolant within the module employs immersed heat exchangers associated with bubble traps which trap gaseous bubbles of evaporated coolant and maintain same in contact with the heat exchanger for improved reliquification efficiency. Bubble guides, which may be mounted to the circuit boards intermediate vertically spaced rows of semiconductor chips, guide gaseous bubbles of the evaporated coolant to the bubble trap, producing local convection coolant currents affording increased reliquification efficiency by released gases and improved temperature uniformity of the plural semiconductor chips. Use of immersed heat exchangers avoids decrease in reliquification efficiency since isolated therefrom. Bubble traps of predetermined porosity permit preferential separation of gaseous bubbles of the evaporated coolant and the undesired released gases.
    • 用于冷却多个半导体芯片的蒸发冷却模块,该半导体芯片与浸在模块内的冷却剂中的电路板上相连,采用与气泡捕集器相关联的浸入式热交换器,该热交换器捕获蒸发冷却剂的气泡,并保持与热交换器接触的气泡,从而提高了再次化效率。 气泡引导件可以垂直间隔排列的半导体芯片安装到电路板上,将蒸发的冷却剂的气泡引导到气泡阱,产生局部对流冷却剂流,从而提供释放气体提高的再次化效率,并提高复数的温度均匀性 半导体芯片。 浸入式热交换器的使用避免了从其中分离出来的降低再结合效率。 具有预定孔隙率的气泡捕集器可优先分离蒸发的冷却剂和不需要的释放气体的气泡。