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    • 3. 发明授权
    • Semiconductor device having MISFET SRAM cells in which active regions
and gate electrodes are dimensioned for increasing storage node
capacitances without increasing memory cell size
    • 具有MISFET SRAM单元的半导体器件,其中有源区和栅电极的尺寸用于增加存储节点电容而不增加存储单元尺寸
    • US5903036A
    • 1999-05-11
    • US820247
    • 1997-03-18
    • Kazunori Onozawa
    • Kazunori Onozawa
    • H01L27/11H01L21/8244H01L27/112
    • H01L27/11H01L27/1112Y10S257/903
    • A semiconductor device is constituted by an arrangement of MISFET type SRAM cells structured such that near the edge of active regions of the driver MISFETs in each memory cell, at least one of the source and drain regions of each driver MISFET is offset against the gate electrode of that MISFET. This offset structure is formed by implantation of impurities using a mask covering the edge proximity of the active regions. Moreover, near one edge of the gate electrode of each driver MISFET in an SRAM memory cell, the gate length of that driver MISFET is at least twice the gate length of the MISFET which has the shortest gate length and which constitutes part of a memory cell or a peripheral circuit. Also, at one edge of the gate electrode of each driver MISFET in an SRAM memory cell, the spacing distance between the gate electrode of that driver MISFET and the gate electrode (word line) of a transfer MISFET is made substantially the same in at least two directions. Also, the spacing distance between the gate electrode of each driver MISFET and the gate electrode of a corresponding driver MISFET in an adjacent memory cell is made substantially the same as the spacing distance between the gate electrode of each driver MISFET and the gate electrode (word line) of the transfer MISFET connected thereto.
    • 半导体器件由MISFET型SRAM单元的结构构成,其结构使得在每个存储单元中的驱动器MISFET的有源区的边缘附近,每个驱动器MISFET的源极和漏极区中的至少一个偏置于栅电极 的MISFET。 该偏移结构通过使用覆盖有源区域的边缘附近的掩模注入杂质来形成。 而且,在SRAM存储单元中的每个驱动器MISFET的栅电极的一个边缘附近,该驱动器MISFET的栅极长度至少是具有最短栅极长度并且构成存储单元的一部分的MISFET的栅极长度的两倍 或外围电路。 此外,在SRAM存储单元中的每个驱动器MISFET的栅电极的一个边缘处,该驱动器MISFET的栅电极与转移MISFET的栅电极(字线)之间的间隔距离至少基本上相同 两个方向 此外,每个驱动器MISFET的栅电极与相邻存储单元中相应的驱动器MISFET的栅电极之间的间隔距离与每个驱动器MISFET的栅电极和栅电极(字)之间的间隔距离基本相同 线)连接到其上的传输MISFET。
    • 7. 发明授权
    • Semiconductor integrated circuit device and process for manufacturing
the same
    • 半导体集成电路器件及其制造方法
    • US5847434A
    • 1998-12-08
    • US642699
    • 1996-05-03
    • Kazunori Onozawa
    • Kazunori Onozawa
    • H01L27/10H01L21/8249H01L27/06H01L27/105H01L21/225
    • H01L21/8249H01L27/0635H01L27/105Y10S257/903
    • A semiconductor integrated circuit device is provided which includes a memory cell M, in which a capacitance element C is added to the storage node portion of an inverter circuit composed of a drive MOSFET and a load TFT Qf. The device also includes and a bipolar transistor Tr provided as a peripheral element. A reference power supply line to be connected with the source region of the drive MOSFET Qd and an emitter electrode to be connected with the emitter region of the bipolar transistor Tr are formed of an uppermost thick polycrystal silicon film. Moreover, an intermediate thin polycrystal silicon film between the uppermost polycrystal silicon film and a first polycrystal silicon film (or polycide film) is covered in a memory cell forming region with the uppermost polycrystal silicon film. Still moreover, the uppermost polycrystal silicon film is partially silicified.
    • 提供了一种半导体集成电路器件,其包括存储单元M,其中将电容元件C添加到由驱动MOSFET和负载TFT Qf组成的反相器电路的存储节点部分。 该器件还包括作为外围元件提供的双极晶体管Tr。 与驱动MOSFET Qd的源极区域连接的基准电源线和与双极晶体管Tr的发射极区域连接的发射极电极由最上层的多晶硅膜形成。 此外,在最上面的多晶硅膜和第一多晶硅膜(或多晶硅膜)之间的中间薄多晶硅膜被覆盖在具有最上面的多晶硅膜的存储单元形成区域中。 此外,最上面的多晶硅膜被部分硅化。
    • 8. 发明授权
    • Caliper sensor
    • 卡尺传感器
    • US5722285A
    • 1998-03-03
    • US688434
    • 1996-07-30
    • Akihiko TsuchiyaYutaka SaitoKazunori Onozawa
    • Akihiko TsuchiyaYutaka SaitoKazunori Onozawa
    • G01B7/06G01B7/00
    • G01B7/107
    • A caliper sensor of the opposing contact type, wherein are provided target supporting spherical surfaces comprising at least three spherical surfaces disposed on a periphery of a target facing plane of a sliding surface and a plane determined by the tops of each spherical surface and in contact in parallel with a measurement reference plane above the target; and contact spherical surfaces for the reference plane outside the target facting plane of the sliding surface, whose number is equal to or greater than that of the relevant target supporting spherical surfaces and the tops of each spherical surface having a height about equal to the relevant target supporting spherical surfaces, so that contaminants are steered away from the tops of the spherical surfaces and the measurement process is thereby unaffected by the contaminants for a long period of time.
    • 相对接触型的卡尺传感器,其中设置有目标支撑球面,其包括设置在滑动表面的目标面对平面的周边上的至少三个球形表面和由每个球形表面的顶部确定并且接触的平面 与目标上方的测量参考平面平行; 并且将滑动表面的目标实际平面外的参考平面的球面接触,其数量等于或大于相关的目标支撑球形表面的顶点,并且每个球形表面的顶部具有大约等于相关目标的高度 支撑球形表面,使得污染物从球形表面的顶部转向远离,并且测量过程由此不被污染物长时间影响。