会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • Methods of manufacturing a semiconductor structure
    • 制造半导体结构的方法
    • US08802454B1
    • 2014-08-12
    • US13331702
    • 2011-12-20
    • Arifur RahmanHenley LiuCheang-Whang ChangMyongseob KimDong W. Kim
    • Arifur RahmanHenley LiuCheang-Whang ChangMyongseob KimDong W. Kim
    • H01L21/66
    • H01L22/34H01L22/14
    • A method for testing TSVs is provided. A plurality of TSVs is formed in a semiconductor substrate. Wiring layers and a first contact array are formed on the front-side of the substrate. The wiring layers couple each of the TSVs to a respective contact of the first contact array. Conductive adhesive is deposited over the first contact array. The conductive adhesive electrically couples contacts of the first contact array. A carrier is bonded to the front-side of the substrate with the conductive adhesive. After bonding the carrier to the substrate, the back-side of the substrate is thinned to expose each of the TSVs on the back-side of the substrate. A second contact array is formed, having a contact coupled to each respective TSV. Conductivity and connections of the TSVs, wiring layers, and contacts are tested by testing for conductivity between contacts of the second contact array.
    • 提供了一种测试TSV的方法。 在半导体衬底中形成多个TSV。 布线层和第一接触阵列形成在基板的正面上。 布线层将每个TSV耦合到第一接触阵列的相应触头。 导电胶粘剂沉积在第一接触阵列上。 导电粘合剂电耦合第一接触阵列的触点。 载体用导电粘合剂粘合到基底的正面。 在将载体接合到基板之后,将基板的背面变薄以使基板的背面上的每个TSV露出。 形成第二接触阵列,其具有耦合到每个相应TSV的接触。 通过测试第二接触阵列的触头之间的电导率来测试TSV,布线层和触点的电导率和连接。