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    • 8. 发明申请
    • MONITORING A PROCESS SECTOR IN A PRODUCTION FACILITY
    • 监测生产设施中的过程部门
    • US20100017010A1
    • 2010-01-21
    • US12175018
    • 2008-07-17
    • William CoteMichael GuseMark E. LagusJames RiceYunsheng Song
    • William CoteMichael GuseMark E. LagusJames RiceYunsheng Song
    • G06F19/00
    • G05B19/4184Y02P90/14
    • Monitoring a process sector in a production facility includes establishing a tool defect index associated with a process sector in the production facility. The tool defect index includes a signal representing a defect factor associated with a tool in the process sector. Monitoring the process also requires determining whether the defect factor is a known defect factor or an unknown defect factor, and analyzing a unit from the tool if the defect factor is an unknown defect factor. Monitoring the process further requires identifying at least one defect on the unit from the tool, establishing that the at least one defect is a significant defect, determining cause of the significant defect, and creating an alert indicating that the tool associated with the process sector is producing units having significant defects.
    • 监控生产设备中的过程部门包括建立与生产设备中的过程部门相关联的工具缺陷指数。 工具缺陷指数包括表示与处理扇区中的工具相关联的缺陷因子的信号。 监测过程还需要确定缺陷因子是否是已知缺陷因子或未知缺陷因子,以及如果缺陷因子是未知缺陷因子,则从工具分析单位。 监视过程还需要从工具识别单元上的至少一个缺陷,确定至少一个缺陷是重大缺陷,确定重大缺陷的原因,以及创建指示与处理扇区相关联的工具的警报 生产单位有重大缺陷。
    • 10. 发明申请
    • TOOL COMMONALITY AND STRATIFICATION ANALYSIS TO ENHANCE A PRODUCTION PROCESS
    • 工具共同和分析分析,以提高生产过程
    • US20110077765A1
    • 2011-03-31
    • US12568083
    • 2009-09-28
    • James RiceDustin K. SlisherYunsheng Song
    • James RiceDustin K. SlisherYunsheng Song
    • G06F19/00
    • G05B23/0294
    • A method of analyzing production steps includes inputting application data associated with a production process having a plurality of process steps into a memory with each of the plurality of process steps including a plurality of tools. The method also includes loading process data associated with one of the plurality of process steps into the memory, performing a tool commonality analysis on each of the tools associated with the at least one of the plurality of process steps, identifying all tool-to-tool differences for the at least one of the plurality of process steps, performing a tool stratification analysis to identify one of the plurality of tools that provides the largest variance contribution to the at least one of the plurality of process steps, and stopping the one of the plurality of tools that provides the largest variance contribution to the at least one of the plurality of process steps.
    • 分析生产步骤的方法包括将与具有多个处理步骤的生产过程相关联的应用数据输入存储器,其中多个处理步骤中的每一个包括多个工具。 该方法还包括将与多个处理步骤之一相关联的过程数据加载到存储器中,对与多个处理步骤中的至少一个相关联的每个工具执行工具共性分析,识别所有工具对工具 对于所述多个处理步骤中的至少一个处理步骤的差异,执行工具分层分析以识别为所述多个处理步骤中的至少一个处理步骤提供最大变化贡献的所述多个工具之一,并且停止 多个工具,其对多个处理步骤中的至少一个提供最大的方差贡献。