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    • 9. 发明授权
    • Electron beam or X-ray negative-working resist composition
    • 电子束或X射线负极抗蚀剂组合物
    • US06824948B1
    • 2004-11-30
    • US09759362
    • 2001-01-16
    • Toshiaki AoaiYutaka AdegawaMorio Yagihara
    • Toshiaki AoaiYutaka AdegawaMorio Yagihara
    • G03F7004
    • G03F7/0045G03F7/038
    • A negative-working resist composition for electron beams or X-rays comprising (A) a compound generating an acid and/or radical species by the irradiation of electron beams or X-rays, (B) a resin which is insoluble in water and soluble in an alkali aqueous solution, (C) a crosslinking agent causing crosslinking with the resin of component (B) by the action of an acid, and (D) a compound having at least one unsaturated bond capable of being polymerized by an acid and/or a radical, and a negative-working resist composition for electron beams or X-rays comprising (A) a compound generating an acid and/or radical species by the irradiation of electron beams or X-rays, (B′) a resin having at least one unsaturated bond polymerizable by an acid and/or an alkali, which is insoluble in water but soluble in an alkali aqueous solution, and (C) a crosslinking agent causing crosslinking with the resin (B′) by the action of an acid are disclosed.
    • 一种用于电子束或X射线的负性抗蚀剂组合物,包括(A)通过电子束或X射线的照射产生酸和/或自由基的化合物,(B)不溶于水和可溶的树脂 在碱性水溶液中,(C)通过酸的作用与成分(B)的树脂交联的交联剂,(D)具有至少一个能够被酸和/ 或用于电子束或X射线的负性抗蚀剂组合物,其包含(A)通过照射电子束或X射线产生酸和/或自由基的化合物,(B')具有 至少一个不溶于水但可溶于碱性水溶液的酸和/或碱可聚合的不饱和键,和(C)通过酸的作用与树脂(B')交联的交联剂 被披露。