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1. 发明授权

US07502127B2 Sensor device and stage device 有权
标题翻译：传感器装置和舞台装置
公开(公告)号：US07502127B2
公开(公告)日：2009-03-10
申请号：US11588271
申请日：2006-10-27
申请人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Toru Hirata , Yoji Watanabe , Kennichi Makino
发明人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Toru Hirata , Yoji Watanabe , Kennichi Makino
IPC分类号： G01B11/14 , G01B11/02 , G01B11/26 , G01C1/00 , G01D5/36 , G01N21/86 , G01V8/00
CPC分类号： G03F7/70758 , G01D5/28 , G01D5/38 , G03F7/70775
摘要： According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of improving the accuracy of detection. The sensor device comprises a reference grating which has a configuration that is varied periodically in a two-dimensional direction. A light source emits light to the reference grating. A spectral unit has a plurality of openings to convert the light emitted by the light source into a plurality of light beams through the plurality of openings. A detector unit has a photodetector to receive collectively reflected light beams reflected by the reference grating. The detector unit is provided to detect a state of a movable body relative to the reference grating based on a change of the reflected light beams received by the photodetector.
摘要翻译：根据本发明的一个方面，提供了一种传感器装置，其能够使用易于制造的参考光栅来检测可移动台的状态，并且能够提高检测精度。传感器装置包括具有沿二维方向周期性变化的构造的参考光栅。光源向参考光栅发射光。光谱单元具有多个开口，用于将由光源发射的光转换成通过多个开口的多个光束。检测器单元具有用于接收由参考光栅反射的共同反射的光束的光电检测器。检测器单元被设置为基于由光电检测器接收的反射光束的变化来检测可移动体相对于参考光栅的状态。

2. 发明申请

US20070068231A1 Position control device of moving body, stage device using the position control device, and position control method of moving body 有权
标题翻译：移动体的位置控制装置，使用位置控制装置的平台装置，以及移动体的位置控制方法
公开(公告)号：US20070068231A1
公开(公告)日：2007-03-29
申请号：US11599512
申请日：2006-11-15
申请人： Kennichi Makino
发明人： Kennichi Makino
IPC分类号： G01M1/00
CPC分类号： G03F7/70725
摘要： A position control device of a moving body, by which position control device a moving body can be driven in a translational manner with high precision where the moving body is not rotated in a yawing direction even if disturbance is input, a stage device using the position control device, and a position control method of a moving body, is provided.
摘要翻译：移动体的位置控制装置，通过该位置控制装置，移动体能够以高精度以平移方式被驱动，即使在运动体不输入干扰的情况下运动体也不偏转方向旋转，则使用位置控制装置和移动体的位置控制方法。

3. 发明申请

US20070041024A1 Sensor device and stage device 有权
标题翻译：传感器装置和舞台装置
公开(公告)号：US20070041024A1
公开(公告)日：2007-02-22
申请号：US11588271
申请日：2006-10-27
申请人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Toru Hirata , Yoji Watanabe , Kennichi Makino
发明人： Wei Gao , Satoshi Kiyono , Yoshiyuki Tomita , Toru Hirata , Yoji Watanabe , Kennichi Makino
IPC分类号： G01B11/14
CPC分类号： G03F7/70758 , G01D5/28 , G01D5/38 , G03F7/70775
摘要： According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of improving the accuracy of detection. The sensor device comprises a reference grating which has a configuration that is varied periodically in a two-dimensional direction. A light source emits light to the reference grating. A spectral unit has a plurality of openings to convert the light emitted by the light source into a plurality of light beams through the plurality of openings. A detector unit has a photodetector to receive collectively reflected light beams reflected by the reference grating. The detector unit is provided to detect a state of a movable body relative to the reference grating based on a change of the reflected light beams received by the photodetector.
摘要翻译：根据本发明的一个方面，提供了一种传感器装置，其能够使用易于制造的参考光栅来检测可移动台的状态，并且能够提高检测精度。传感器装置包括具有沿二维方向周期性变化的构造的参考光栅。光源向参考光栅发射光。光谱单元具有多个开口，用于将由光源发射的光转换成通过多个开口的多个光束。检测器单元具有用于接收由参考光栅反射的共同反射的光束的光电检测器。检测器单元被设置为基于由光电检测器接收的反射光束的变化来检测可移动体相对于参考光栅的状态。

4. 发明授权

US07333862B2 Position control device of moving body, stage device using the position control device, and position control method of moving body 有权
标题翻译：移动体的位置控制装置，使用位置控制装置的平台装置，以及移动体的位置控制方法
公开(公告)号：US07333862B2
公开(公告)日：2008-02-19
申请号：US11599512
申请日：2006-11-15
申请人： Kennichi Makino
发明人： Kennichi Makino
IPC分类号： G05B19/18 , G06F7/00 , G06F17/00 , G06F19/00 , B60G23/00 , B62C3/00 , B62K25/00
CPC分类号： G03F7/70725
摘要： A position control device of a moving body, by which position control device a moving body can be driven in a translational manner with high precision where the moving body is not rotated in a yawing direction even if disturbance is input, a stage device using the position control device, and a position control method of a moving body, is provided.
摘要翻译：移动体的位置控制装置，通过该位置控制装置，移动体能够以高精度以平移方式被驱动，即使在运动体不输入干扰的情况下运动体也不偏转方向旋转，则使用位置控制装置和移动体的位置控制方法。

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