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1. 发明申请

US20110205529A1 Cell For Light Source 有权
标题翻译：光源单元
公开(公告)号：US20110205529A1
公开(公告)日：2011-08-25
申请号：US13119571
申请日：2011-02-17
申请人： Kenneth P. Gross , Yung-Ho Chuang , John Fielden
发明人： Kenneth P. Gross , Yung-Ho Chuang , John Fielden
IPC分类号： G01J3/447 , H01J17/18 , H05B41/02 , H01J61/30
CPC分类号： H01J17/16 , G01J3/10 , G01N21/211 , G01N2021/213 , H01J61/302 , H01J65/04 , H01J65/042 , H01J65/06
摘要： A cell for a vacuum ultraviolet plasma light source, the cell having a closed sapphire tube containing at least one noble gas. Such a cell does not have a metal housing, metal-to-metal seals, or any other metal flanges or components, except for the electrodes (in some embodiments). In this manner, the cell is kept to a relatively small size, and exhibits a more uniform heating of the gas and cell than can be readily achieved with a hybridized metal/window cell design. These designs generally result in higher plasma temperatures (a brighter light source), shorter wavelength output, and lower optical noise due to fewer gas convection currents created between the hotter plasma regions and surrounding colder gases. These cells provide a greater amount of output with wavelengths in the vacuum ultraviolet range than do quartz or fused silica cells. These cells also produce continuous spectral emission well into the infrared range, making them a broadband light source.
摘要翻译：一种用于真空紫外线等离子体光源的电池，该电池具有包含至少一种惰性气体的封闭蓝宝石管。除了电极（在一些实施例中），这种电池不具有金属外壳，金属对金属密封件或任何其它金属法兰或部件。以这种方式，电池被保持为相对小的尺寸，并且表现出比使用杂化金属/窗口电池设计容易实现的气体和电池的更均匀的加热。这些设计通常导致更高的等离子体温度（较亮的光源），更短的波长输出和更低的光学噪声，这是由于较热的等离子体区域和周围较冷的气体之间产生的较小的气体对流电流。这些电池在真空紫外线范围内提供比石英或熔融石英电池更大的输出量。这些细胞还能够在红外范围内产生连续的光谱发射，使其成为宽带光源。

2. 发明授权

US08643840B2 Cell for light source 有权
标题翻译：光源单元
公开(公告)号：US08643840B2
公开(公告)日：2014-02-04
申请号：US13119571
申请日：2011-02-17
申请人： Kenneth P. Gross , Yung-Ho Chuang , John Fielden
发明人： Kenneth P. Gross , Yung-Ho Chuang , John Fielden
IPC分类号： G01N21/73 , H01S3/225
CPC分类号： H01J17/16 , G01J3/10 , G01N21/211 , G01N2021/213 , H01J61/302 , H01J65/04 , H01J65/042 , H01J65/06
摘要： A cell for a vacuum ultraviolet plasma light source, the cell having a closed sapphire tube containing at least one noble gas. Such a cell does not have a metal housing, metal-to-metal seals, or any other metal flanges or components, except for the electrodes (in some embodiments). In this manner, the cell is kept to a relatively small size, and exhibits a more uniform heating of the gas and cell than can be readily achieved with a hybridized metal/window cell design. These designs generally result in higher plasma temperatures (a brighter light source), shorter wavelength output, and lower optical noise due to fewer gas convection currents created between the hotter plasma regions and surrounding colder gases. These cells provide a greater amount of output with wavelengths in the vacuum ultraviolet range than do quartz or fused silica cells. These cells also produce continuous spectral emission well into the infrared range, making them a broadband light source.
摘要翻译：一种用于真空紫外线等离子体光源的电池，该电池具有包含至少一种惰性气体的封闭蓝宝石管。除了电极（在一些实施例中），这种电池不具有金属外壳，金属对金属密封件或任何其它金属法兰或部件。以这种方式，电池被保持为相对小的尺寸，并且表现出比使用杂化金属/窗口电池设计容易实现的气体和电池的更均匀的加热。这些设计通常导致更高的等离子体温度（较亮的光源），更短的波长输出和更低的光学噪声，这是由于较热的等离子体区域和周围较冷的气体之间产生的较小的气体对流电流。这些电池在真空紫外线范围内提供比石英或熔融石英电池更大的输出量。这些细胞还能够在红外范围内产生连续的光谱发射，使其成为宽带光源。

3. 发明申请

US20120323356A1 METHOD OF OPTIMIZING AN OPTICAL PARAMETRIC MODEL FOR STRUCTURAL ANALYSIS USING OPTICAL CRITICAL DIMENSION (OCD) METROLOGY 有权
标题翻译：使用光学关键尺寸（OCD）方法优化结构分析的光学参数模型的方法
公开(公告)号：US20120323356A1
公开(公告)日：2012-12-20
申请号：US13164398
申请日：2011-06-20
申请人： Thaddeus G. Dziura , Yung-Ho Chuang , Bin-Ming Benjamin Tsai , Xuefeng Liu , John J. Hench
发明人： Thaddeus G. Dziura , Yung-Ho Chuang , Bin-Ming Benjamin Tsai , Xuefeng Liu , John J. Hench
IPC分类号： G06F19/00 , G06F17/50
CPC分类号： G01B11/24 , G01B2210/56 , G01N21/47 , G01N21/956 , G01N2021/95615 , G03F7/70625 , G06F17/5009
摘要： Optimization of optical parametric models for structural analysis using optical critical dimension metrology is described. A method includes determining a first optical model fit for a parameter of a structure. The first optical model fit is based on a domain of quantities for a first model of the structure. A first near optical field response is determined for a first quantity of the domain of quantities and a second near optical field response is determined for a second, different quantity of the domain of quantities. The first and second near optical field responses are compared to locate a common region of high optical field intensity for the parameter of the structure. The first model of the structure is modified to provide a second, different model of the structure. A second, different optical model fit is determined for the parameter of the structure based on the second model of the structure.
摘要翻译：描述了使用光学关键尺寸度量结构分析的光学参数模型的优化。一种方法包括确定适合结构参数的第一光学模型。第一个光学模型拟合是基于结构的第一个模型的数量域。对于第一量的量域确定第一近场光响应，并且针对量的第二个不同数量的量确定第二近场光响应。比较第一和第二近场光响应，以定位用于结构参数的高光场强度的公共区域。该结构的第一个模型被修改以提供第二个不同的结构模型。基于结构的第二个模型，确定结构参数的第二个不同的光学模型拟合。

4. 发明授权

US07957066B2 Split field inspection system using small catadioptric objectives 有权
标题翻译：使用小反射折射目标的分体现场检查系统
公开(公告)号：US07957066B2
公开(公告)日：2011-06-07
申请号：US12220983
申请日：2008-07-29
申请人： J. Joseph Armstrong , Yung-Ho Chuang
发明人： J. Joseph Armstrong , Yung-Ho Chuang
IPC分类号： G02B27/10 , G01B11/30 , G01N21/00
CPC分类号： G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G03F7/70225 , G03F7/70341
摘要： A system for inspecting a specimen is provided. The system includes an illumination subsystem configured to produce a plurality of channels of light energy, each channel of light energy produced having differing characteristics (type, wavelength, etc.) from at least one other channel of light energy. Optics are configured to receive the plurality of channels of light energy and combine them into a spatially separated combined light energy beam and direct it toward the specimen. A data acquisition subsystem comprising at least one detector is provided, configured to separate reflected light energy into a plurality of received channels corresponding to the plurality of channels of light energy and detect the received channels.
摘要翻译：提供了一种用于检查样本的系统。该系统包括被配置为产生多个光能通道的照明子系统，每个产生的光能通道具有与至少一个其它光能通道不同的特性（类型，波长等）。光学器件被配置为接收多个光能通道并将它们组合成空间分离的组合光能束并将其引导到样本。提供了包括至少一个检测器的数据采集子系统，其被配置为将反射的光能分离成对应于多个光能通道的多个接收信道，并检测所接收的信道。

5. 发明申请

US20110073982A1 Inspection system using back side illuminated linear sensor 审中-公开
标题翻译：使用背面照明线性传感器的检查系统
公开(公告)号：US20110073982A1
公开(公告)日：2011-03-31
申请号：US11805907
申请日：2007-05-25
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David L. Brown
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David L. Brown
IPC分类号： H01L31/00 , G01N21/00
CPC分类号： G01N21/9501 , G01N21/95623 , G01N2021/8822 , G01N2021/95676
摘要： An improved inspection system using back-side illuminated linear sensing for propagating charge through a sensor is provided. Focusing optics may be used with a back side illuminated linear sensor to inspect specimens, the back side illuminated linear sensor operating to advance an accumulated charge from one side of each pixel to the other side. The design comprises controlling voltage profiles across pixel gates from one side to the other side in order to advance charge between to a charge accumulation region. Controlling voltage profiles comprises attaching a continuous polysilicon gate across each pixel within a back side illuminated linear sensor array. Polysilicon gates and voltages applied thereto enable efficient electron advancement using a controlled voltage profile.
摘要翻译：提供了一种使用背面照明线性检测的改进的检测系统，用于通过传感器传播电荷。聚焦光学元件可以与背面照明的线性传感器一起使用以检查样品，背面照射的线性传感器操作以将累积的电荷从每个像素的一侧推进到另一侧。该设计包括控制从一侧到另一侧的像素栅极之间的电压分布，以便在电荷累积区域之间推进电荷。控制电压分布包括在背侧照明线性传感器阵列内的每个像素上连接连续的多晶硅栅极。多晶硅栅极和施加于其上的电压使得能够使用受控电压分布进行有效的电子前进。

6. 发明授权

US07518789B2 Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system 有权
标题翻译：宽带深紫外/真空紫外线反射折射成像系统
公开(公告)号：US07518789B2
公开(公告)日：2009-04-14
申请号：US10959022
申请日：2004-10-04
申请人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
发明人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B13/14 , G03B27/54
CPC分类号： G03F7/70225 , G02B17/08 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B17/0896 , G02B21/04 , G02B21/16 , G03F1/84 , G03F7/70275 , G03F7/70483 , G03F7/70616 , G03F7/7065
摘要： A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.
摘要翻译：提供了用于检查样品的设计，例如光掩模，用于不想要的颗粒和诸如图案缺陷的特征。该系统不提供中心遮蔽，用于打开和傅立叶滤波的外部光瞳，以及相对放松的制造公差，并且适用于波长低于365nm的宽带亮场和激光暗场成像和检查。在许多情况下，所使用的透镜可以使用单一材料来制造或制造。公开了物镜设计的多个实施例，全部包括至少一个小折叠镜和Mangin镜。系统离轴实现，使得返回的第二图像从第一图像横向移位，使得横向分离允许分别对每个图像进行光学接收和操纵。所提出的目标设计具有与由聚焦透镜限定的光轴90度的Mangin镜像继电器的光轴，或具有一个九十度光线弯曲的直列或直线物镜。

7. 发明申请

US20080225282A1 Beam delivery system for laser dark-field illumination in a catadioptric optical system 有权
标题翻译：反射折射光学系统激光暗场照明光束传输系统
公开(公告)号：US20080225282A1
公开(公告)日：2008-09-18
申请号：US12074405
申请日：2008-03-03
申请人： Yung-Ho Chuang , J. Joseph Armstrong
发明人： Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G01N21/88
CPC分类号： G02B21/10 , G02B17/0856
摘要： A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.
摘要翻译：提供了一种用于检查样本的方法和装置。该装置包括初级照明源，显示中心遮蔽的反折射物镜，其将从主照明源接收的光能以基本上垂直的角度朝向样本引导，以及位于中心内的光学装置，例如棱镜或反射表面由反射折射物镜产生的遮挡，用于接收来自次级照明源的进一步照明并将另外的照明转移到样本。该方法包括使用主照明源以各种角度照射样本的表面，使用次级照明源照亮表面，由次级照明源以基本上正常的入射角发射; 并将从表面接收的所有反射，散射和衍射的光能成像到检测器上。

8. 发明授权

US07345825B2 Beam delivery system for laser dark-field illumination in a catadioptric optical system 有权
公开(公告)号：US07345825B2
公开(公告)日：2008-03-18
申请号：US11171079
申请日：2005-06-30
申请人： Yung-Ho Chuang , J. Joseph Armstrong
发明人： Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B17/00
CPC分类号： G02B21/10 , G02B17/0856
摘要： A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.

9. 发明授权

US07245438B2 Broad band objective having improved lateral color performance 有权
公开(公告)号：US07245438B2
公开(公告)日：2007-07-17
申请号：US11245591
申请日：2005-10-05
申请人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
发明人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
IPC分类号： G02B3/00
CPC分类号： G02B27/0025 , G01N21/8806 , G02B21/02
摘要： A system and method for inspection is disclosed. The design generally employs as many as four design principles, including employing at least one lens from a relatively low dispersion glass, at least one additional lens from an additional material different from the relatively low dispersion glass, generally matching the relatively low dispersion properties of the relatively low dispersion glass. The design also may include at least one further lens from a further material different from and exhibiting a significantly different dispersion power from the relatively low dispersion glass and the additional material. Finally, the design may include lenses positioned to insert a significant amount of color within the objective, a gap, and additional lenses, the gap and additional lenses serving to cancel the color inserted.

10. 发明申请

US20070153393A1 Peak power and speckle contrast reduction for a single layer pulse 有权
标题翻译：单层脉冲的峰值功率和斑点对比度降低
公开(公告)号：US20070153393A1
公开(公告)日：2007-07-05
申请号：US11712182
申请日：2007-02-27
申请人： Yung-Ho Chuang , J. Armstrong
发明人： Yung-Ho Chuang , J. Armstrong
IPC分类号： G02B27/10
CPC分类号： G03F7/70583 , G02B27/106 , G02B27/144 , G02B27/145 , G02B27/48 , H01S3/005 , H01S3/225 , Y10S372/70
摘要： A system and method for reducing peak power of a laser pulse and reducing speckle contrast of a single pulse comprises a plurality of beamsplitters, mirrors and delay elements oriented to split and delay a pulse or pulses transmitted from a light emitting device. The design provides the ability to readily divide the pulse into multiple pulses by delaying the components relative to one another. Reduction of speckle contrast entails using the same or similar components to the power reduction design, reoriented to orient received energy such that the angles between the optical paths are altered such that the split or divided light energy components strike the target at different angles or different positions. An alternate embodiment for reducing speckle contrast is disclosed wherein a single pulse is passed in an angular orientation through a grating to create a delayed portion of the pulse relative to the leading edge of the pulse.
摘要翻译：用于减少激光脉冲的峰值功率并降低单个脉冲的斑点对比度的系统和方法包括多个分束器，反射镜和定向成分离和延迟从发光器件传输的脉冲或脉冲的延迟元件。该设计提供了通过相对于彼此延迟部件来容易地将脉冲分割成多个脉冲的能力。斑点对比度的减少需要使用与功率降低设计相同或相似的组件，重新定向以定向接收的能量，使得光路之间的角度被改变，使得分裂或分开的光能分量以不同的角度或不同的位置撞击目标。公开了一种用于减少散斑对比度的替代实施例，其中单个脉冲以角度方向通过光栅以产生相对于脉冲的前沿的脉冲的延迟部分。

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