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    • 4. 发明授权
    • Confocal 3D inspection system and process
    • 共聚焦3D检测系统及工艺
    • US06970287B1
    • 2005-11-29
    • US10196735
    • 2002-07-16
    • Cory WatkinsDavid Vaughn
    • Cory WatkinsDavid Vaughn
    • G01N21/00G01N21/956G02B21/00
    • G01N21/956G02B21/0024
    • An inspection device comprises a light source, a pellicle beamsplitter for receiving light from the light source and for redirecting the light, and an aperture array for receiving light from the pellicle beamsplitter. The aperture array is a two dimensional array of pinholes having an x axis and a y axis ninety degrees apart, wherein the distance between pinholes in the x direction is greater than the distance between pinholes in the y direction. The inspection device further comprises an imaging system comprising an object imager including a plurality of lenses, a camera reimager including a plurality of lenses, and a camera for acquiring an image.
    • 检查装置包括光源,用于接收来自光源的光并用于重定向光的防护薄片组分束器和用于接收来自防护薄膜分束器的光的孔径阵列。 孔径阵列是具有x轴和y轴相隔九十度的针孔的二维阵列,其中x方向上的针孔之间的距离大于在y方向上的针孔之间的距离。 检查装置还包括成像系统,其包括包括多个透镜的物体成像器,包括多个透镜的照相机再定位器和用于获取图像的照相机。
    • 7. 发明申请
    • Method and apparatus for direction finding
    • 测向方法和装置
    • US20060227050A1
    • 2006-10-12
    • US11120940
    • 2005-05-03
    • David Vaughn
    • David Vaughn
    • G01S5/04
    • G01S3/74
    • A direction finding system is used in which a number of adjacent bands are sequentially measured in fast rotation, with the results from each of the bands being FFT processed to provide amplitude and phase information on all of the signals existing within the band. Upon ascertaining that one wishes to do a direction finding process, one merely accesses the information in the delay memory so that direction finding resources are only allocated to signals of interest and such that one does not have to re-do an FFT upon finding a signal of interest.
    • 使用方向发现系统,其中以快速旋转顺序地测量多个相邻频带,其中来自每个频带的结果被FFT处理以提供在频带内存在的所有信号的幅度和相位信息。 一旦确定希望进行方向发现处理,则仅访问延迟存储器中的信息,使得方向发现资源仅被分配给感兴趣的信号,并且使得在找到信号后不需要重新进行FFT 出于兴趣。