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    • 7. 发明授权
    • Process for growing multielement compound single crystal
    • 生产多元素复合单晶的方法
    • US5454346A
    • 1995-10-03
    • US194507
    • 1994-02-10
    • Masayuki UchidaKenji KohiroOsamu Oda
    • Masayuki UchidaKenji KohiroOsamu Oda
    • C30B11/06C30B11/00C30B27/00H01L21/208C30B11/08
    • C30B29/40C30B11/00Y10T117/1092
    • A process for growing a multielement compound single crystal, includes the steps of placing a crucible holding a raw multielement compound of a predetermined set of composition ratios Y in a vertical crystal growing furnace having a heater, melting the raw multielement compound held in the crucible with the heater to produce a melt of the raw multielement compound in the crucible, controlling the output of the heater to grow a multielement compound single crystal of a predetermined set of composition ratios X from the melt so that the melt is solidified successively upwards from part of the melt in contact with the bottom of the crucible, and feeding to the melt as a solute at least one element of the raw multielement compound from above the level of the melt in the crucible so as to maintain the predetermined set of composition ratios X of the solute during growth of the multielement compound single crystal. The process can keep constant the composition of the grown multielement compound single crystal. The process is applicable to the growth of multielement compound semiconductor single crystals and multielement compound oxide single crystals.
    • 用于生长多元素化合物单晶的方法包括以下步骤:将具有预定组成比Y的原料多元素化合物的坩埚放置在具有加热器的垂直晶体生长炉中,将保持在坩埚中的原料多元素化合物熔化, 加热器,以在坩埚中产生原料多元素化合物的熔体,控制加热器的输出以从熔体中生长具有预定组成比X的组合的多元素化合物单晶,使得熔体从部分 所述熔体与所述坩埚的底部接触,并且从所述坩埚中的所述熔体的高度上方以至少一种元素的原料多元素化合物作为溶质供给到所述熔体中,以保持所述熔融物的组成比X的预定组合 多元素化合物单晶生长过程中的溶质。 该方法可以使生长的多元素化合物单晶的组成保持恒定。 该方法适用于多元素化合物半导体单晶和多元素复合氧化物单晶的生长。