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1. 发明授权

US08195336B2 Pressure regulator 有权
标题翻译：压力调节器
公开(公告)号：US08195336B2
公开(公告)日：2012-06-05
申请号：US12445196
申请日：2007-10-10
申请人： Kenji Kawashima , Toshiharu Kagawa , Tomonori Kato
发明人： Kenji Kawashima , Toshiharu Kagawa , Tomonori Kato
IPC分类号： G05D7/00 , G05D11/00 , G06F17/00 , G05B21/00
CPC分类号： F16F15/027 , G05D16/2013
摘要： A pressure regulator for controlling pressure with high response and high accuracy even a flow change occurs on the downstream side. The pressure regulator (1) regulates the rate of inflow into an isothermal pressure vessel (13) for the gas supplied from a gas supply source (10) by means of a servo valve (11) to maintain the constant pressure in the isothermal pressure vessel (13). Pressure control means (a computer (16)) operating the servo valve (11) has as a main loop a pressure control system for feedback-controlling the pressure in the isothermal pressure vessel (13) measured by a pressure gauge (14) and has therein a rate-of-inflow-control system for feedback-controlling the rate of flow measured by a flow meter (12), an observer for estimating the rate of outflow from the isothermal pressure vessel (13) according to the rate of inflow and the derivative of the pressure in the isothermal pressure vessel (13) measured by a pressure differentiator (15), and a model follow-up control system for feed-backing the estimated rate of outflow to the rate-of-inflow control system.
摘要翻译：在下游侧发生用于控制压力高的压力调节器，甚至具有高精度，甚至流量变化。压力调节器（1）调节通过伺服阀（11）从气体供应源（10）供应的气体流入等温压力容器（13）的速率，以保持恒温压力容器（13）。操作伺服阀（11）的压力控制装置（计算机（16））具有作为主回路的压力控制系统，用于反馈控制由压力表（14）测量的等温压力容器（13）中的压力，并具有其中具有用于反馈控制由流量计（12）测量的流量的流入速率控制系统，用于根据流入速率估计来自等温压力容器（13）的流出速率的观测器，以及通过压力微分器（15）测量的等温压力容器（13）中的压力的导数，以及用于将流出量的估计流量提供给流入速率控制系统的模型跟踪控制系统。

2. 发明申请

US20100030386A1 Pressure Regulator and Vibration Isolator 有权
标题翻译：压力调节器和隔振器
公开(公告)号：US20100030386A1
公开(公告)日：2010-02-04
申请号：US12445196
申请日：2007-10-10
申请人： Kenji Kawashima , Toshiharu Kagawa , Tomonori Kato
发明人： Kenji Kawashima , Toshiharu Kagawa , Tomonori Kato
IPC分类号： G05D16/02 , G05D7/06 , G06F17/10 , G06G7/57
CPC分类号： F16F15/027 , G05D16/2013
摘要： A pressure regulator for controlling pressure with high response and high accuracy even a flow change occurs on the downstream side. The pressure regulator (1) regulates the rate of inflow into an isothermal pressure vessel (13) for the gas supplied from a gas supply source (10) by means of a servo valve (11) to maintain the constant pressure in the isothermal pressure vessel (13). Pressure control means (a computer (16)) operating the servo valve (11) has as a main loop a pressure control system for feedback-controlling the pressure in the isothermal pressure vessel (13) measured by a pressure gauge (14) and has therein a rate-of-inflow-control system for feedback-controlling the rate of flow measured by a flow meter (12), an observer for estimating the rate of outflow from the isothermal pressure vessel (13) according to the rate of inflow and the derivative of the pressure in the isothermal pressure vessel (13) measured by a pressure differentiator (15), and a model follow-up control system for feed-backing the estimated rate of outflow to the rate-of-inflow control system.
摘要翻译：在下游侧发生用于控制压力高的压力调节器，甚至具有高精度，甚至流量变化。压力调节器（1）调节通过伺服阀（11）从气体供应源（10）供应的气体流入等温压力容器（13）的速率，以保持恒温压力容器（13）。操作伺服阀（11）的压力控制装置（计算机（16））具有作为主回路的压力控制系统，用于反馈控制由压力表（14）测量的等温压力容器（13）中的压力，并具有其中具有用于反馈控制由流量计（12）测量的流量的流入速率控制系统，用于根据流入速率估计来自等温压力容器（13）的流出速率的观测器，以及通过压力微分器（15）测量的等温压力容器（13）中的压力的导数，以及用于将流出量的估计流量提供给流入速率控制系统的模型跟踪控制系统。

3. 发明申请

US20060288790A1 Pressure differentiator 失效
标题翻译：压力微分器
公开(公告)号：US20060288790A1
公开(公告)日：2006-12-28
申请号：US10569197
申请日：2004-03-29
申请人： Kenji Kawashima , Toshiharu Kagawa
发明人： Kenji Kawashima , Toshiharu Kagawa
IPC分类号： G01L7/08
CPC分类号： G01L13/00 , G01L11/00
摘要： An object of the invention is to provide a pressure differentiator capable of improving measurement accuracy. The pressure differentiator of the invention includes an isothermal pressure vessel 1, a narrow tube 3 for connecting an object to be measured to the inside of the vessel 1, and a differential manometer 2 for calculating a differential pressure between the object and the inside of the vessel 1. It is preferable that a flow through the narrow tube 3 during measurement is a laminar flow. The isothermal pressure vessel 1 is fitted with a temperature equalizing material. As the temperature equalizing material, thin metal wires may be used. When the pressure Ps to be measured within a vessel positioned below is changed, the pressure Pc within the isothermal pressure vessel 1 is changed, with a slight lag, through the narrow tube 3. By measuring the differential pressure Pj (=Ps−Pc) at that time, using a diaphragm-type pressure differentiator, the derivative value of the pressure Ps may be calculated.
摘要翻译：本发明的目的是提供一种能够提高测量精度的压力微分器。本发明的压力微分器包括等温压力容器1，用于将待测物体连接到容器1的内部的窄管3和用于计算物体与内部之间的压差的差压计2 优选的是，在测量期间通过窄管3的流动是层流。等温压力容器1配有温度均衡材料。作为温度均衡材料，可以使用细金属丝。当在位于下方的容器内要测量的压力P ~~改变时，等温压力容器1内的压力P 稍微滞后，通过通过使用隔膜式压力测量此时的压差P N S（= P P S S P S C C C）可以计算压力P _{的导数值。}~~

4. 发明授权

US07437910B2 Pressure differentiator fitted with a temperature equalizing material 失效
标题翻译：压力微分器配有温度均衡材料
公开(公告)号：US07437910B2
公开(公告)日：2008-10-21
申请号：US10569197
申请日：2004-03-29
申请人： Kenji Kawashima , Toshiharu Kagawa
发明人： Kenji Kawashima , Toshiharu Kagawa
IPC分类号： G01M3/20 , G01M3/02 , G01L15/00
CPC分类号： G01L13/00 , G01L11/00
摘要： An object of the invention is to provide a pressure differentiator capable of improving measurement accuracy.The pressure differentiator of the invention includes an isothermal pressure vessel 1, a narrow tube 3 for connecting an object to be measured to the inside of the vessel 1, and a differential manometer 2 for calculating a differential pressure between the object and the inside of the vessel 1. It is preferable that a flow through the narrow tube 3 during measurement is a laminar flow. The isothermal pressure vessel 1 is fitted with a temperature equalizing material. As the temperature equalizing material, thin metal wires may be used. When the pressure Ps to be measured within a vessel positioned below is changed, the pressure Pc within the isothermal pressure vessel 1 is changed, with a slight lag, through the narrow tube 3. By measuring the differential pressure Pj (=Ps−Pc) at that time, using a diaphragm-type pressure differentiator, the derivative value of the pressure Ps may be calculated.
摘要翻译：本发明的目的是提供一种能够提高测量精度的压力微分器。本发明的压力微分器包括等温压力容器1，用于将待测物体连接到容器1的内部的窄管3和用于计算物体与内部之间的压差的差压计2 优选的是，在测量期间通过窄管3的流动是层流。等温压力容器1配有温度均衡材料。作为温度均衡材料，可以使用细金属丝。当在位于下方的容器内要测量的压力P ~~改变时，等温压力容器1内的压力P 稍微滞后，通过通过使用隔膜式压力测量此时的压差P N S（= P P S S P S C C C）可以计算压力P _{的导数值。}~~

5. 发明申请

US20130272803A1 NON-CONTACT CONVEYANCE EQUIPMENT 审中-公开
标题翻译：非接触式输送设备
公开(公告)号：US20130272803A1
公开(公告)日：2013-10-17
申请号：US13996753
申请日：2011-12-27
申请人： Xin Li , Toshiharu Kagawa
发明人： Xin Li , Toshiharu Kagawa
IPC分类号： B65G51/02
CPC分类号： B65G51/02 , B65G51/03 , H01L21/6838
摘要： [Problem] To control a lift force acting on an object being conveyed by non-contact conveyance equipment in a non-contact manner.[Solution] A non-contact conveyance equipment that conveys an object in a non-contact manner, comprises a cup-shaped member including a concave portion, an air inlet, and an opening rim that faces the object, a fan provided inside the concave portion of the cup-shaped member, that rotates to suck air into the concave portion through the air inlet, the air forming a swirl flow in the concave portion, and an adjusting member provided at the cup-shaped member, that adjusts an amount of air sucked through the air inlet.
摘要翻译： [问题]控制以非接触方式作用在被非接触输送设备输送的物体上的提升力。 [解决方案]以非接触方式输送物体的非接触输送设备包括：杯形部件，其包括凹部，进气口和面向物体的开口边缘，设置在凹部内的风扇所述杯状构件的旋转部分通过所述空气入口吸入空气，所述空气在所述凹部中形成涡旋流，以及调节构件，其设置在所述杯状构件上，所述调节构件调节所述杯状构件的量空气通过进气口吸入。

6. 发明申请

US20050140961A1 Anti-vibration system, method of controlling the same, exposure apparatus, and device manufacturing method 审中-公开
标题翻译：防振系统，控制方法，曝光装置和装置的制造方法
公开(公告)号：US20050140961A1
公开(公告)日：2005-06-30
申请号：US11006778
申请日：2004-12-08
申请人： Michio Yanagisawa , Toshiharu Kagawa
发明人： Michio Yanagisawa , Toshiharu Kagawa
IPC分类号： F16F15/02 , F16F9/04 , F16F15/027 , G03B27/58
CPC分类号： G03F7/709 , F16F15/0275
摘要： Disclosed is an anti-vibration system, a method of controlling the same, and an exposure apparatus having the same. The anti-vibration system includes a gas spring, a valve provided in relation to at least one of gas supply and gas exhaust of the gas spring, a flow rate sensor disposed in a portion of a flowpassage between the gas spring and the valve, and a control system for controlling the valve on the basis of an output of the flow rate sensor
摘要翻译：公开了一种防振系统，其控制方法以及具有该防振系统的曝光装置。防振系统包括气弹簧，相对于气弹簧的气体供给和气体排气中的至少一种而设置的阀，设置在气弹簧与阀之间的流通部分中的流量传感器，以及用于根据流量传感器的输出来控制阀的控制系统

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