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    • 5. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08351254B2
    • 2013-01-08
    • US12818248
    • 2010-06-18
    • Yasuhiro Taniguchi
    • Yasuhiro Taniguchi
    • G11C11/34
    • H01L29/788G11C16/0433G11C2216/10H01L27/11521H01L27/11558
    • The performance of a semiconductor device including a nonvolatile memory is enhanced. Each of nonvolatile memory cells arranged over a silicon substrate includes: a first n-well; a second n-well formed in a place different from the place thereof; a selection transistor formed in the first n-well; and an electric charge storage portion having a floating gate electrode and a storage portion p-well. The floating gate electrode is so placed that it overlaps with part of the first n-well and the second n-well. The storage portion p-well is placed in the first n-well so that it partly overlaps with the floating gate electrode. In this nonvolatile memory cell, memory information is erased by applying positive voltage to the second n-well to discharge electrons in the floating gate electrode to the second n-well.
    • 提高了包括非易失性存储器的半导体器件的性能。 布置在硅衬底上的每个非易失性存储单元包括:第一n阱; 在不同于其位置的地方形成的第二个n阱; 形成在第一n阱中的选择晶体管; 以及具有浮置栅极电极和存储部分p阱的电荷存储部分。 浮栅电极被放置成使其与第一n阱和第二n阱的一部分重叠。 存储部p阱被放置在第一n阱中,使得其与浮栅电极部分重叠。 在该非易失性存储单元中,通过向第二n阱施加正电压来擦除存储器信息,以将浮栅中的电子放电到第二n阱。
    • 6. 发明授权
    • Method of manufacturing a semiconductor device
    • 制造半导体器件的方法
    • US08076192B2
    • 2011-12-13
    • US12563326
    • 2009-09-21
    • Yasuhiro TaniguchiKazuyoshi Shiba
    • Yasuhiro TaniguchiKazuyoshi Shiba
    • H01L21/8238
    • H01L21/823462H01L27/0629H01L27/105H01L27/1052H01L27/11568H01L27/11573
    • Provided is a manufacturing method of a semiconductor device, which comprises forming a film stack of a gate insulating film, a charge storage film, insulating film, polysilicon film, silicon oxide film, silicon nitride film and cap insulating film over a semiconductor substrate; removing the film stack by photolithography and etching from a low breakdown voltage MISFET formation region and a high breakdown voltage MISFET formation region; forming gate insulating films, polysilicon film and cap insulating film over the semiconductor substrate, forming a gate electrode in the low breakdown voltage MISFET formation region and high breakdown voltage MISFET formation region, and then forming a gate electrode in a memory cell formation region. By the manufacturing technology of a semiconductor device for forming the gate electrodes of a first MISFET and a second MISFET in different steps, the present invention makes it possible to provide the first MISFET and the second MISFET each having improved reliability.
    • 提供一种半导体器件的制造方法,其包括在半导体衬底上形成栅极绝缘膜,电荷存储膜,绝缘膜,多晶硅膜,氧化硅膜,氮化硅膜和帽绝缘膜的膜堆叠; 通过光刻和蚀刻从低击穿电压MISFET形成区域和高击穿电压MISFET形成区域去除膜堆叠; 在半导体衬底上形成栅极绝缘膜,多晶硅膜和帽绝缘膜,在低击穿电压MISFET形成区域和高击穿电压MISFET形成区域中形成栅电极,然后在存储器单元形成区域中形成栅电极。 通过以不同的步骤形成第一MISFET和第二MISFET的栅极的半导体器件的制造技术,本发明使得可以提供具有改善的可靠性的第一MISFET和第二MISFET。
    • 7. 发明申请
    • METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
    • 制造半导体器件的方法
    • US20100009529A1
    • 2010-01-14
    • US12563326
    • 2009-09-21
    • Yasuhiro TaniguchiKazuyoshi Shiba
    • Yasuhiro TaniguchiKazuyoshi Shiba
    • H01L21/28H01L21/8238
    • H01L21/823462H01L27/0629H01L27/105H01L27/1052H01L27/11568H01L27/11573
    • Provided is a manufacturing method of a semiconductor device, which comprises forming a film stack of a gate insulating film, a charge storage film, insulating film, polysilicon film, silicon oxide film, silicon nitride film and cap insulating film over a semiconductor substrate; removing the film stack by photolithography and etching from a low breakdown voltage MISFET formation region and a high breakdown voltage MISFET formation region; forming gate insulating films, polysilicon film and cap insulating film over the semiconductor substrate, forming a gate electrode in the low breakdown voltage MISFET formation region and high breakdown voltage MISFET formation region, and then forming a gate electrode in a memory cell formation region. By the manufacturing technology of a semiconductor device for forming the gate electrodes of a first MISFET and a second MISFET in different steps, the present invention makes it possible to provide the first MISFET and the second MISFET each having improved reliability.
    • 提供一种半导体器件的制造方法,其包括在半导体衬底上形成栅极绝缘膜,电荷存储膜,绝缘膜,多晶硅膜,氧化硅膜,氮化硅膜和帽绝缘膜的膜堆叠; 通过光刻和蚀刻从低击穿电压MISFET形成区域和高击穿电压MISFET形成区域去除膜堆叠; 在半导体衬底上形成栅极绝缘膜,多晶硅膜和帽绝缘膜,在低击穿电压MISFET形成区域和高击穿电压MISFET形成区域中形成栅电极,然后在存储器单元形成区域中形成栅电极。 通过以不同的步骤形成第一MISFET和第二MISFET的栅极的半导体器件的制造技术,本发明使得可以提供具有改善的可靠性的第一MISFET和第二MISFET。
    • 8. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07466599B2
    • 2008-12-16
    • US11925106
    • 2007-10-26
    • Kazuyoshi ShibaYasuhiro TaniguchiYasushi Oka
    • Kazuyoshi ShibaYasuhiro TaniguchiYasushi Oka
    • G11C16/04
    • G11C16/0408G11C2216/10H01L27/112
    • Provided is a nonvolatile memory with less element deterioration and good data retaining properties. In a nonvolatile memory formed by the manufacturing steps of a complementary type MISFET without adding thereto another additional step, erasing of data is carried out by applying 9V to an n type well, 9V to a p type semiconductor region, and −9V to another p type semiconductor region and setting the source and drain of data writing and erasing MISFETs and data reading MISFETs at open potential to emit electrons from a gate electrode to a p well by FN tunneling. At this time, by applying a negative voltage to the p well having a capacitive element formed thereover and applying a positive voltage to the p well having the MISFETs formed thereover, a potential difference necessary for data erasing operation can be secured at a voltage low enough not to cause gate breakage.
    • 提供了具有较少元件劣化和良好的数据保存性能的非易失性存储器。 在通过互补型MISFET的制造步骤形成的非易失性存储器中,而不添加另外的附加步骤,通过将9V施加到n型阱,9V到ap型半导体区域,并将-9V施加到另一个p型,进行数据擦除 半导体区域,并设置数据写入和擦除MISFET和数据读取MISFET的源极和漏极,其处于开放电位,以通过FN隧穿从栅电极发射电子。 此时,通过向其中形成有电容元件的p阱施加负电压并向其上形成有MISFET的p阱施加正电压,可以在足够低的电压下确保数据擦除操作所需的电位差 不会造成门破损。