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    • 1. 发明申请
    • Heat processing apparatus
    • 热处理设备
    • US20090136888A1
    • 2009-05-28
    • US11922010
    • 2006-06-12
    • Ken NakaoKazuhiko Kato
    • Ken NakaoKazuhiko Kato
    • F27B9/04B21D53/02F27B14/14
    • C23C16/46C23C16/4411C23C16/54H01L21/324H01L21/67098H01L21/67103H01L21/67109Y10T29/4935
    • The present invention is a heat processing apparatus comprising: a processing vessel that receives a plurality of objects to be processed in a tier-like manner to subject the objects to be processed to a predetermined heating process; a tubular heater disposed to surround the processing vessel, the tubular heater being capable of heating the objects to be processed; an exhaust heat system for discharging an atmosphere in a space between the heater and the processing vessel; and a cooling unit that blows-out a cooling fluid into the space to cool the processing vessel. The heater has a tubular heat insulating member, and a heating resistor arranged on an inner circumference of the heat insulating member. The cooling unit has a plurality of blowing nozzles embedded in the heat insulating member. Each of the blowing nozzles is formed in such a manner that an inlet orifice of the blowing nozzle and an outlet orifice thereof are not linearly aligned to each other.
    • 本发明是一种热处理装置,包括:处理容器,其以层状方式接收待处理的多个物体,以对被处理物进行预定的加热处理; 管状加热器,其设置成围绕处理容器,所述管状加热器能够加热被处理物体; 用于排出加热器和处理容器之间的空间中的气氛的排气系统; 以及将冷却流体吹入空间以冷却处理容器的冷却单元。 加热器具有管状绝热构件和布置在绝热构件的内周上的加热电阻器。 冷却单元具有嵌入绝热构件中的多个吹出喷嘴。 每个喷吹嘴都以这样的方式形成,使得喷嘴的入口孔和出口孔彼此不直线对准。
    • 2. 发明授权
    • Heat processing apparatus
    • 热处理设备
    • US08033823B2
    • 2011-10-11
    • US11922010
    • 2006-06-12
    • Ken NakaoKazuhiko Kato
    • Ken NakaoKazuhiko Kato
    • F27D3/12
    • C23C16/46C23C16/4411C23C16/54H01L21/324H01L21/67098H01L21/67103H01L21/67109Y10T29/4935
    • The present invention is a heat processing apparatus comprising: a processing vessel that receives a plurality of objects to be processed in a tier-like manner to subject the objects to be processed to a predetermined heating process; a tubular heater disposed to surround the processing vessel, the tubular heater being capable of heating the objects to be processed; an exhaust heat system for discharging an atmosphere in a space between the heater and the processing vessel; and a cooling unit that blows out a cooling fluid into the space to cool the processing vessel. The heater has a tubular heat insulating member, and a heating resistor arranged on an inner circumference of the heat insulating member. The cooling unit has a plurality of blowing nozzles embedded in the heat insulating member. Each of the blowing nozzles is formed in such a manner that an inlet orifice of the blowing nozzle and an outlet orifice thereof are not linearly aligned to each other.
    • 本发明是一种热处理装置,包括:处理容器,其以层状方式接收待处理的多个物体,以对被处理物进行预定的加热处理; 管状加热器,其设置成围绕处理容器,所述管状加热器能够加热被处理物体; 用于排出加热器和处理容器之间的空间中的气氛的排气系统; 以及将冷却流体吹入空间以冷却处理容器的冷却单元。 加热器具有管状绝热构件和布置在绝热构件的内周上的加热电阻器。 冷却单元具有嵌入绝热构件中的多个吹出喷嘴。 每个喷吹嘴都以这样的方式形成,使得喷嘴的入口孔和出口孔彼此不直线对准。
    • 4. 发明授权
    • Electromagnetic pump
    • 电磁泵
    • US09140245B2
    • 2015-09-22
    • US13413204
    • 2012-03-06
    • Masaya NakaiKazuhiko Kato
    • Masaya NakaiKazuhiko Kato
    • F04B17/04
    • F04B17/042F04B17/04F04B17/044F04B17/048
    • An electromagnetic pump includes a cylinder with a stepped inner diameter with first and second inner diameters. A piston inside the cylinder, with a stepped outer diameter including first and second outer diameters slidable on the respective inner diameters, defines first and second fluid chambers. Reciprocal movement of the piston produces a greater change in volume in the first chamber than the second chamber. An electromagnetic portion moves the piston to decrease the volume of the first chamber and increase the volume of the second chamber. A biasing member moves the piston to increase the volume of the first chamber and decrease the volume of the second chamber. A first valve allows fluid to flow to the first chamber and prohibits reverse flow. A second valve embedded in the piston allows fluid to flow from the first chamber to the second chamber and prohibits reverse flow.
    • 电磁泵包括具有第一和第二内径的阶梯形内径的气缸。 气缸内的活塞具有包括可在相应内径上滑动的第一和第二外径的阶梯形外径,限定第一和第二流体室。 活塞的往复运动在第一室中产生比第二室更大的体积变化。 电磁部分移动活塞以减小第一室的体积并增加第二室的体积。 偏置构件移动活塞以增加第一室的体积并减小第二室的体积。 第一阀允许流体流到第一室并且禁止反向流动。 嵌入在活塞中的第二阀允许流体从第一室流到第二室,并且禁止反向流动。