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1. 发明授权

US07485485B2 Method and apparatus for making a MEMS scanner 有权
标题翻译：制造MEMS扫描仪的方法和装置
公开(公告)号：US07485485B2
公开(公告)日：2009-02-03
申请号：US10986635
申请日：2004-11-12
申请人： Kelly D. Linden , Mark P. Helsel , Dean R. Brown , Randall B. Sprague , Wyatt O. Davis
发明人： Kelly D. Linden , Mark P. Helsel , Dean R. Brown , Randall B. Sprague , Wyatt O. Davis
IPC分类号： H01L21/00
CPC分类号： G02B26/0858 , G02B26/0833 , G02B26/0841 , G02B26/0866 , G02B26/105
摘要： Devices are formed on a semiconductor wafer in an interdigitated relationship and are released by deep reactive ion etching. MEMS scanners are formed without a surrounding frame. Mounting pads extend outward from torsion arms. Neighboring MEMS scanners are formed with their mounting pads interdigitated such that a regular polygon cannot be formed around a device without also intersecting a portion of one or more neighboring devices. MEMS scanners may be held in their outlines by a metal layer, by small semiconductor bridges, or a combination.
摘要翻译：器件以交叉关系形成在半导体晶片上，并通过深反应离子蚀刻而释放。 MEMS扫描仪在没有周边框架的情况下形成。安装垫从扭臂向外延伸。相邻的MEMS扫描仪形成，其安装垫相互交错，使得不会在设备周围形成正多边形，而不会与一个或多个相邻设备的一部分相交。 MEMS扫描仪可以通过金属层，小型半导体桥或其组合保持在其轮廓中。

2. 发明授权

US08579443B2 Scanned beam display having a redirected exit cone using a diffraction grating 有权
$Scanned beam display having a redirected exit cone using a diffraction grating$
标题翻译：扫描光束显示器具有使用衍射光栅的重定向出射锥
公开(公告)号：US08579443B2
公开(公告)日：2013-11-12
申请号：US12827182
申请日：2010-06-30
申请人： Joshua M. Hudman , Wyatt O. Davis , Mark O. Freeman , Mark P. Helsel , David Roy Bowman , Kelly D. Linden
发明人： Joshua M. Hudman , Wyatt O. Davis , Mark O. Freeman , Mark P. Helsel , David Roy Bowman , Kelly D. Linden
IPC分类号： G03B21/28
CPC分类号： G02B26/101 , G02B26/085
摘要： Briefly, in accordance with one or more embodiments, a scanned beam display, comprises a light source to generate a beam to be scanned and a scanning platform to scan the beam into an exit cone. The scanning platform receives the beam at a selected feed angle, and the scanning platform has a surface structure to redirect the exit cone at an exit angle that is less than the feed angle.
摘要翻译：简而言之，根据一个或多个实施例，扫描光束显示器包括产生要扫描的光束的光源和用于将光束扫描到出射锥体的扫描平台。扫描平台以选定的进给角度接收光束，并且扫描平台具有表面结构，以使出口锥体以小于进给角度的出射角度重定向。

3. 发明申请

US20120001834A1 Scanned Beam Display Having a Redirected Exit Cone 有权
标题翻译：具有重定向出口锥的扫描光束显示
公开(公告)号：US20120001834A1
公开(公告)日：2012-01-05
申请号：US12827182
申请日：2010-06-30
申请人： Joshua M. Hudman , Wyatt O. Davis , Mark O. Freeman , Mark P. Helsel , David Roy Bowman , Kelly D. Linden
发明人： Joshua M. Hudman , Wyatt O. Davis , Mark O. Freeman , Mark P. Helsel , David Roy Bowman , Kelly D. Linden
IPC分类号： G09G1/08 , G02B26/10
CPC分类号： G02B26/101 , G02B26/085
摘要： Briefly, in accordance with one or more embodiments, a scanned beam display, comprises a light source to generate a beam to be scanned and a scanning platform to scan the beam into an exit cone. The scanning platform receives the beam at a selected feed angle, and the scanning platform has a surface structure to redirect the exit cone at an exit angle that is less than the feed angle.
摘要翻译：简而言之，根据一个或多个实施例，扫描光束显示器包括产生要扫描的光束的光源和用于将光束扫描到出射锥体的扫描平台。扫描平台以选定的进给角度接收光束，扫描平台具有表面结构，以使出口锥体以小于进给角度的出射角重定向。

4. 发明申请

US20100259806A1 Fatigue Resistant MEMS Apparatus and System 有权
标题翻译：耐疲劳MEMS器件和系统
公开(公告)号：US20100259806A1
公开(公告)日：2010-10-14
申请号：US12420426
申请日：2009-04-08
申请人： Jason B. Tauscher , Matthew Ellis , Dean R. Brown , Mark P. Helsel , Wyatt O. Davis , Yunfei Ma , Michael E. Sherwood , John Wyatt Coy , David Malametz
发明人： Jason B. Tauscher , Matthew Ellis , Dean R. Brown , Mark P. Helsel , Wyatt O. Davis , Yunfei Ma , Michael E. Sherwood , John Wyatt Coy , David Malametz
IPC分类号： G02B26/10
CPC分类号： G02B26/101 , G02B26/085 , H04M1/0272 , H04M1/7253
摘要： A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.
摘要翻译：微机电系统（MEMS）包括具有改进的可靠性的导体。导体在MEMS装置中与移动构件弯曲，并且通过提供增加的抗疲劳性，减小的裂纹扩展的材料选择和/或在给定应变水平下改善活体的机制来实现改进的可靠性。导体可以包括单一材料，或者可以包括不同材料的层。

5. 发明授权

US08218014B2 Electromagnetic scanner having variable coil width 有权
标题翻译：具有可变线圈宽度的电磁扫描器
公开(公告)号：US08218014B2
公开(公告)日：2012-07-10
申请号：US12512261
申请日：2009-07-30
申请人： Jason B. Tauscher , Dean R. Brown , Matthew Ellis , Wyatt O. Davis , Mark P. Helsel
发明人： Jason B. Tauscher , Dean R. Brown , Matthew Ellis , Wyatt O. Davis , Mark P. Helsel
IPC分类号： H04N3/08
CPC分类号： G06K7/10633 , G06K7/10653
摘要： Briefly, in accordance with one or more embodiments, a scanner for a scanned beam display may comprise a scanning platform having a mirror disposed thereon to reflect a beam of light impinging on the mirror, a drive coil disposed on the scanning platform to scan the reflected beam of light in response to a drive current applied to the drive coil. The drive coil has coil winding segments having a narrower width in one or more regions of the drive coil, and has coil winding segments having a greater width in one or more other regions of the drive coil to provide a the drive coil with a reduced electrical resistance.
摘要翻译：简而言之，根据一个或多个实施例，用于扫描光束显示器的扫描器可以包括扫描平台，其具有设置在其上的反射镜以反射入射在反射镜上的光束，设置在扫描平台上的驱动线圈以扫描反射的光束响应于施加到驱动线圈的驱动电流。驱动线圈具有在驱动线圈的一个或多个区域中具有较窄宽度的线圈绕组段，并且具有在驱动线圈的一个或多个其它区域中具有较大宽度的线圈绕组段，从而为驱动线圈提供减小的电抵抗性。

6. 发明授权

US08218218B2 Fatigue resistant MEMS apparatus and system 有权
标题翻译：耐疲劳MEMS仪器和系统
公开(公告)号：US08218218B2
公开(公告)日：2012-07-10
申请号：US12420426
申请日：2009-04-08
申请人： Jason B. Tauscher , Matthew Ellis , Dean R. Brown , Mark P. Helsel , Wyatt O. Davis , Yunfei Ma , Michael E. Sherwood , John Wyatt Coy , David Malametz
发明人： Jason B. Tauscher , Matthew Ellis , Dean R. Brown , Mark P. Helsel , Wyatt O. Davis , Yunfei Ma , Michael E. Sherwood , John Wyatt Coy , David Malametz
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , G02B26/085 , H04M1/0272 , H04M1/7253
摘要： A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.
摘要翻译：微机电系统（MEMS）包括具有改进的可靠性的导体。导体在MEMS装置中与移动构件弯曲，并且通过提供增加的抗疲劳性，减小的裂纹扩展的材料选择和/或在给定应变水平下改善活体的机制来实现改进的可靠性。导体可以包括单一材料，或者可以包括不同材料的层。

7. 发明申请

US20110026549A1 Electromagnetic Scanner Having Variable Coil Width 有权
标题翻译：具有可变线圈宽度的电磁扫描仪
公开(公告)号：US20110026549A1
公开(公告)日：2011-02-03
申请号：US12512261
申请日：2009-07-30
申请人： Jason B. Tauscher , Dean R. Brown , Matthew Ellis , Wyatt O. Davis , Mark P. Helsel
发明人： Jason B. Tauscher , Dean R. Brown , Matthew Ellis , Wyatt O. Davis , Mark P. Helsel
IPC分类号： H01S3/10
CPC分类号： G06K7/10633 , G06K7/10653
摘要： Briefly, in accordance with one or more embodiments, a scanner for a scanned beam display may comprise a scanning platform having a mirror disposed thereon to reflect a beam of light impinging on the mirror, a drive coil disposed on the scanning platform to scan the reflected beam of light in response to a drive current applied to the drive coil. The drive coil has coil winding segments having a narrower width in one or more regions of the drive coil, and has coil winding segments having a greater width in one or more other regions of the drive coil to provide a the drive coil with a reduced electrical resistance.
摘要翻译：简而言之，根据一个或多个实施例，用于扫描光束显示器的扫描器可以包括扫描平台，其具有设置在其上的反射镜以反射入射在反射镜上的光束，设置在扫描平台上的驱动线圈以扫描反射的光束响应于施加到驱动线圈的驱动电流。驱动线圈具有在驱动线圈的一个或多个区域中具有较窄宽度的线圈绕组段，并且具有在驱动线圈的一个或多个其它区域中具有较大宽度的线圈绕组段，从而为驱动线圈提供减小的电抵抗性。

8. 发明授权

US07473888B2 Display with compensated light source drive 有权
标题翻译：显示补偿光源驱动
公开(公告)号：US07473888B2
公开(公告)日：2009-01-06
申请号：US11600999
申请日：2006-11-17
申请人： David W. Wine , Mark P. Helsel , Jon D. Barger , Clarence T. Tegreene
发明人： David W. Wine , Mark P. Helsel , Jon D. Barger , Clarence T. Tegreene
IPC分类号： H01J3/14
CPC分类号： G06K7/10633 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/101 , G02B27/0149 , G02B27/017 , G02B27/0172 , G02B2027/011 , G09G3/02 , G09G2320/0285 , G09G2320/041 , H04N5/74 , H04N9/3129
摘要： A MEM s scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a torsion arm that supports an oscillatory body. In one embodiment, an array of removable masses are placed on an exposed portion of the oscillatory body and selectively removed to establish the resonant frequency. The material can be removed by laser ablation, etching, or other processing approaches. In another approach, a migratory material is placed on the torsion arm and selectively stimulated to migrate into the torsion arm, thereby changing the mechanical properties of the torsion arm. The changed mechanical properties in turn changes the resonant frequency of the torsion arm. In another approach, symmetrically distributed masses are removed or added in response to a measured resonant frequency to tune the resonant frequency to a desired resonant frequency. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.
摘要翻译： MEM扫描装置具有可变谐振频率。在一个实施例中，MEM装置包括支撑摆动体的扭转臂。在一个实施例中，将可移除质量的阵列放置在振荡体的暴露部分上并选择性地去除以建立谐振频率。材料可以通过激光烧蚀，蚀刻或其他处理方法去除。在另一种方法中，将迁移材料放置在扭转臂上并选择性地被刺激以迁移到扭转臂中，从而改变扭转臂的机械特性。改变的机械性能又改变了扭转臂的共振频率。在另一种方法中，响应于测量的谐振频率去除或添加对称分布的质量，以将谐振频率调谐到期望的谐振频率。显示装置包括扫描装置和扫描装置扫描关于两个或多个轴，通常以光栅图案扫描。描述了控制扫描装置的频率响应的各种方法，包括MEMs扫描器的主动控制和无源频率调谐。

9. 发明授权

US06687034B2 Active tuning of a torsional resonant structure 有权
标题翻译：扭转谐振结构的主动调谐
公开(公告)号：US06687034B2
公开(公告)日：2004-02-03
申请号：US10339953
申请日：2003-01-10
申请人： David W. Wine , Mark P. Helsel , Clarence T. Tegreene
发明人： David W. Wine , Mark P. Helsel , Clarence T. Tegreene
IPC分类号： G02B2608
CPC分类号： G02B26/0833 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/10 , G02B26/101 , G02B27/017 , G09G3/025 , G09G3/346 , G09G5/005 , G09G2300/0469 , Y10S359/904
摘要： A MEM s scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from a oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to shift the moment of inertia of the oscillatory body and a secondary mass carried by the flexible arm. The shifted moment of inertia changes the resonant frequency of the MEMs device. In another embodiment, an absorptive material forms a portion of a torsional arm that supports the oscillatory body. The mechanical properties of the absorptive material can be varied by varying the concentration of a gas surrounding the absorptive material. The varied mechanical properties change the resonant frequency of the scanning device. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.
摘要翻译： MEM扫描装置具有可变谐振频率。在一个实施例中，MEM装置包括从振荡体延伸的柔性臂。电场向柔性臂施加力，由此弯曲柔性臂以使振动体的惯性矩和由柔性臂承载的次级质量移动。移动的惯性矩改变了MEMs器件的谐振频率。在另一个实施例中，吸收材料形成支撑振荡体的扭转臂的一部分。可以通过改变吸收材料周围的气体的浓度来改变吸收材料的机械性能。不同的机械特性改变了扫描装置的谐振频率。显示装置包括扫描装置和扫描装置扫描关于两个或多个轴，通常以光栅图案扫描。描述了控制扫描装置的频率响应的各种方法，包括MEMs扫描器的主动控制和无源频率调谐。

10. 发明授权

US06245590B1 Frequency tunable resonant scanner and method of making 有权
标题翻译：频率可调共振扫描仪及其制作方法
公开(公告)号：US06245590B1
公开(公告)日：2001-06-12
申请号：US09369674
申请日：1999-08-05
申请人： David W. Wine , Mark P. Helsel , Jon D. Barger , Clarence T. Tegreene
发明人： David W. Wine , Mark P. Helsel , Jon D. Barger , Clarence T. Tegreene
IPC分类号： H01L2100
CPC分类号： G09G3/025 , G02B26/0833 , G02B26/0841 , G02B26/101 , G02B27/017 , G06K7/10633 , G09G3/001
摘要： A MEM s scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a torsion arm that supports an oscillatory body. In one embodiment, an array of removable masses are placed on an exposed portion of the oscillatory body and selectively removed to establish the resonant frequency. The material can be removed by laser ablation, etching, or other processing approaches. In another approach, a migratory material is placed on the torsion arm and selectively stimulated to migrate into the torsion arm, thereby changing the mechanical properties of the torsion arm. The changed mechanical properties in turn changes the resonant frequency of the torsion arm. In another approach, symmetricaly distributed masses are removed or added in response to a measured resonant frequency to tune the resonant frequency to a desired resonant frequency. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMs scanners and passive frequency tuning.
摘要翻译： MEM扫描装置具有可变谐振频率。在一个实施例中，MEM装置包括支撑摆动体的扭转臂。在一个实施例中，将可移除质量的阵列放置在振荡体的暴露部分上并选择性地去除以建立谐振频率。材料可以通过激光烧蚀，蚀刻或其他处理方法去除。在另一种方法中，将迁移材料放置在扭转臂上并选择性地被刺激以迁移到扭转臂中，从而改变扭转臂的机械特性。改变的机械性能又改变了扭转臂的共振频率。在另一种方法中，响应于测量的谐振频率去除或添加对称分布质量，以将谐振频率调谐到期望的谐振频率。显示装置包括扫描装置和扫描装置扫描关于两个或多个轴，通常以光栅图案扫描。描述了控制扫描装置的频率响应的各种方法，包括MEMs扫描器的主动控制和无源频率调谐。

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