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    • 4. 发明授权
    • Copolymer and composition for semiconductor lithography and process for producing the copolymer
    • 用于半导体光刻的共聚物和组合物以及用于制备共聚物的方法
    • US08859180B2
    • 2014-10-14
    • US12311993
    • 2007-10-19
    • Tomo OikawaTakayoshi OkadaMasaaki KudoTakanori Yamagishi
    • Tomo OikawaTakayoshi OkadaMasaaki KudoTakanori Yamagishi
    • G03F7/039C08F2/06C08F224/00C08F220/18C08F216/38
    • G03F7/0397C08F220/18C08F220/28C08F2220/283G03F7/2041
    • [Task to Be Achieved]To provide a chemically amplified type positive copolymer for semiconductor lithography, which has eliminated the problems of prior art, has a high development contrast, and has excellent resolution in fine-pattern formation; a composition for semiconductor lithography which contains the copolymer; and a process for producing the copolymer.[Means for Achievement]The copolymer for semiconductor lithography according to the present invention is a copolymer which has at least (A) a repeating unit having a structure which has an alkali-soluble group protected by an acid-labile, dissolution-suppressing group, (B) a repeating group having a lactone structure and (C) a repeating group having an alcoholic hydroxyl group and which is characterized by having an acid value of 0.01 mmol/g or less as determined by dissolving the copolymer in a solvent and subjecting the solution to neutralization titration with a solution of an alkali metal hydroxide using Bromothymol Blue as an indicator.
    • [要实现的任务]为了提供半导体光刻的化学放大型正共聚物,其消除了现有技术的问题,具有高显影对比度,并且在精细图案形成中具有优异的分辨率; 含有共聚物的半导体光刻用组合物; 和共聚物的制造方法。 [实现方法]本发明的半导体光刻用共聚物是至少具有(A)具有由酸不稳定,溶解抑制基团保护的碱溶性基团的结构的重复单元的共聚物, (B)具有内酯结构的重复基团和(C)具有醇羟基的重复基团,其特征在于通过将共聚物溶解在溶剂中而使酸值为0.01mmol / g以下, 使用溴百里酚蓝作为指示剂的碱金属氢氧化物溶液中和滴定溶液。
    • 5. 发明授权
    • Method of forming cam lobe
    • 形成凸轮叶的方法
    • US08201434B2
    • 2012-06-19
    • US12260463
    • 2008-10-29
    • Masaaki Kudo
    • Masaaki Kudo
    • B21D22/00
    • B21J5/02B21K1/00
    • A primary intermediate formed article is formed into a substantially columnar shape. A secondary intermediate formed article is obtained by piercing a preliminary hole in the primary intermediate formed article such that a radial thickness of a prospective cam top part is larger than a radial thickness of a prospective cam base part, and by forming a positioning part. The positioning part is brought into contact with a tertiary intermediate forged article forging die so as to be positioned, and the secondary intermediate formed article is pressed and forged to form a tertiary intermediate forged article including a cam top, a cam base, and a deformed hole formed by deforming the preliminary hole. A finished cam lobe is obtained by piercing, in an area including the deformed hole.
    • 初级中间成型体形成为大致圆柱状。 通过在初级中间成型制品中刺穿预备孔使得预期凸轮顶部的径向厚度大于预期凸轮基部的径向厚度,并且通过形成定位部而获得第二中间成形制品。 使定位部与第三中间锻造制品模具接触以定位,并且将第二中间成型制品压制锻造以形成包括凸轮顶部,凸轮基座和变形的第三中间锻造制品 通过使预备孔变形而形成的孔。 通过在包括变形孔的区域中穿孔来获得成品凸轮凸角。
    • 6. 发明申请
    • Copolymer and composition for semiconductor lithography and process for producing the copolymer
    • 用于半导体光刻的共聚物和组合物以及用于制备共聚物的方法
    • US20100062371A1
    • 2010-03-11
    • US12311993
    • 2007-10-19
    • Tomo OikawaTakayoshi OkadaMasaaki KudoTakanori Yamagishi
    • Tomo OikawaTakayoshi OkadaMasaaki KudoTakanori Yamagishi
    • G03F7/004C08G63/08
    • G03F7/0397C08F220/18C08F220/28C08F2220/283G03F7/2041
    • [Task to be Achieved] To provide a chemically amplified type positive copolymer for semiconductor lithography, which has eliminated the problems of prior art, has a high development contrast, and has excellent resolution in fine-pattern formation; a composition for semiconductor lithography which contains the copolymer; and a process for producing the copolymer.[Means for Achievement] The copolymer for semiconductor lithography according to the present invention is a copolymer which has at least (A) a repeating unit having a structure which has an alkali-soluble group protected by an acid-labile, dissolution-suppressing group, (B) a repeating group having a lactone structure and (C) a repeating group having an alcoholic hydroxyl group and which is characterized by having an acid value of 0.01 mmol/g or less as determined by dissolving the copolymer in a solvent and subjecting the solution to neutralization titration with a solution of an alkali metal hydroxide using Bromothymol Blue as an indicator.
    • [要实现的目的]为了提供消除现有技术问题的化学放大型半导体光刻用正共聚物,具有高显影对比度,并且在精细图案形成中具有优异的分辨率; 含有共聚物的半导体光刻用组合物; 和共聚物的制造方法。 [实现方法]本发明的半导体光刻用共聚物是至少具有(A)具有由酸不稳定,溶解抑制基团保护的碱溶性基团的结构的重复单元的共聚物, (B)具有内酯结构的重复基团和(C)具有醇羟基的重复基团,其特征在于通过将共聚物溶解在溶剂中而使酸值为0.01mmol / g以下, 使用溴百里酚蓝作为指示剂的碱金属氢氧化物溶液中和滴定溶液。
    • 8. 发明授权
    • Copolymer for semiconductor lithography and process for producing the same
    • 半导体光刻用共聚物及其制造方法
    • US07960494B2
    • 2011-06-14
    • US12516489
    • 2007-12-05
    • Takanori YamagishiMasaaki KudoSatoshi Yamaguchi
    • Takanori YamagishiMasaaki KudoSatoshi Yamaguchi
    • C08G63/02C08G63/00
    • C08F2/06C08F12/24C08F212/14C08F220/14C08F220/18C08F220/28C08F220/32G03F7/0397
    • To provide a copolymer for semiconductor lithography employed for forming a resist film as well as thin films such as an anti-reflection film, a gap-filling film, a top coating film, etc. which are formed on or under a resist film, these films being employed in semiconductor lithography, wherein the copolymer has excellent solubility in a solution of a thin film-forming composition and prevents generation of microparticles (e.g., microgel) and pattern defects, and to provide a method for producing the copolymer reliably on an industrial scale.The invention is directed to a copolymer for semiconductor lithography having at least one repeating unit selected from among (A) a repeating unit having a hydroxyl group; (B) a repeating unit having a structure in which a hydroxyl group is protected by a group which inhibits dissolution in an alkaline developer and which dissociates by the action of an acid; (C) a repeating unit having a lactone structure; and (D) a repeating unit having a cyclic ether structure, wherein, when a solution of the copolymer in propylene glycol monomethyl ether acetate having a viscosity of 15 mPa·sec is caused to pass through a filter having a pore size of 0.03 μm under a pressure difference of 0.1 MPa for 60 minutes, the solution exhibits an average flow rate per unit filter area of 200 g/min/m2 or more, and to a method for producing the copolymer.
    • 为了提供用于形成抗蚀剂膜的半导体光刻用共聚物以及形成在抗蚀剂膜上或下方的抗反射膜,间隙填充膜,顶涂层等薄膜,这些 在半导体光刻中使用的膜,其中共聚物在薄膜形成组合物的溶液中具有优异的溶解性,并且防止微粒(例如微凝胶)和图案缺陷的产生,并提供在工业上可靠地制备共聚物的方法 规模。 本发明涉及一种用于半导体光刻的共聚物,其具有至少一个选自(A)具有羟基的重复单元的重复单元; (B)具有羟基被抑制在碱性显影剂中溶解并通过酸作用而离解的基团保护的结构的重复单元; (C)具有内酯结构的重复单元; 和(D)具有环醚结构的重复单元,其中当使具有15mPa·sec的粘度的丙二醇单甲醚乙酸酯中的共聚物溶液通过孔径为0.03μm的过滤器时 压力差为0.1MPa,60分钟时,溶液的平均流速为200g / min / m 2以上,单位面积的平均流量以及共聚物的制造方法。
    • 9. 发明申请
    • COPOLYMER FOR SEMICONDUCTOR LITHOGRAPHY AND PROCESS FOR PRODUCING THE SAME
    • 用于SEMICONDUCTOR LITHOGRAPHY的共聚物及其生产方法
    • US20090306328A1
    • 2009-12-10
    • US12516489
    • 2007-12-05
    • Takanori YamagishiMasaaki KudoSatoshi Yamaguchi
    • Takanori YamagishiMasaaki KudoSatoshi Yamaguchi
    • C08G63/02C08G67/00C08G63/08C08G65/00C08G63/06
    • C08F2/06C08F12/24C08F212/14C08F220/14C08F220/18C08F220/28C08F220/32G03F7/0397
    • To provide a copolymer for semiconductor lithography employed for forming a resist film as well as thin films such as an anti-reflection film, a gap-filling film, a top coating film, etc. which are formed on or under a resist film, these films being employed in semiconductor lithography, wherein the copolymer has excellent solubility in a solution of a thin film-forming composition and prevents generation of microparticles (e.g., microgel) and pattern defects, and to provide a method for producing the copolymer reliably on an industrial scale.The invention is directed to a copolymer for semiconductor lithography having at least one repeating unit selected from among (A) a repeating unit having a hydroxyl group; (B) a repeating unit having a structure in which a hydroxyl group is protected by a group which inhibits dissolution in an alkaline developer and which dissociates by the action of an acid; (C) a repeating unit having a lactone structure; and (D) a repeating unit having a cyclic ether structure, wherein, when a solution of the copolymer in propylene glycol monomethyl ether acetate having a viscosity of 15 mPa·sec is caused to pass through a filter having a pore size of 0.03 μm under a pressure difference of 0.1 MPa for 60 minutes, the solution exhibits an average flow rate per unit filter area of 200 g/min/m2 or more, and to a method for producing the copolymer.
    • 为了提供用于形成抗蚀剂膜的半导体光刻用共聚物以及形成在抗蚀剂膜上或下方的抗反射膜,间隙填充膜,顶涂层等薄膜,这些 在半导体光刻中使用的膜,其中共聚物在薄膜形成组合物的溶液中具有优异的溶解性,并且防止微粒(例如微凝胶)和图案缺陷的产生,并提供在工业上可靠地制备共聚物的方法 规模。 本发明涉及一种用于半导体光刻的共聚物,其具有至少一个选自(A)具有羟基的重复单元的重复单元; (B)具有羟基被抑制在碱性显影剂中溶解并通过酸作用而离解的基团保护的结构的重复单元; (C)具有内酯结构的重复单元; 和(D)具有环醚结构的重复单元,其中当使具有15mPa.sec的粘度的丙二醇单甲醚乙酸酯中的共聚物溶液通过孔径为0.03μm的过滤器时 压力差为0.1MPa,60分钟时,溶液的平均流速为200g / min / m 2以上,单位面积的平均流量以及共聚物的制造方法。