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1. 发明授权

US09104121B2 Exposure apparatus having a vibration suppressing feature and method of manufacturing device using the exposure apparatus 有权
标题翻译：具有振动抑制特征的曝光装置和使用该曝光装置的装置的制造方法
公开(公告)号：US09104121B2
公开(公告)日：2015-08-11
申请号：US13546131
申请日：2012-07-11
申请人： Keiji Emoto , Tosiya Asano
发明人： Keiji Emoto , Tosiya Asano
IPC分类号： G03F7/20 , H01L21/67 , H01L21/687
CPC分类号： G03F7/70725 , G03F7/70766 , H01L21/6719 , H01L21/67288 , H01L21/68785
摘要： An exposure apparatus includes: a substrate stage configured to move upon holding the substrate; a structural member configured to support a substrate stage; a first counter mass stage configured to cancel a driving reaction force that is generated due to driving of the substrate stage and acts on the structural member; a substrate stage driver configured to generate a force between the substrate stage and the first counter mass stage; a first counter mass driver configured to generate a force between the structural member and the first counter mass stage; a controller configured to control the first counter mass driver so as to cancel the force that acts on the structural member by generating a force between the structural member and the first counter mass stage using the first counter mass driver.
摘要翻译：曝光装置包括：衬底台，被配置为在保持衬底时移动; 构造成支撑衬底台的结构构件; 构造成抵消由于基板台的驱动而产生的驱动反作用力并作用在所述结构构件上的第一反质量台; 衬底台驱动器，其被配置为在所述衬底台和所述第一对质量台之间产生力; 配置为在所述结构构件和所述第一反质量段之间产生力的第一反质量驱动器; 控制器，其被配置为控制所述第一反质量驱动器，以便通过使用所述第一计数器质量驱动器在所述结构构件和所述第一计数器质量级之间产生力来抵消作用在所述结构构件上的力。

2. 发明授权

US08915479B2 Anti-vibration apparatus 有权
标题翻译：防振装置
公开(公告)号：US08915479B2
公开(公告)日：2014-12-23
申请号：US13569220
申请日：2012-08-08
申请人： Mitsuhiro Furumoto , Tosiya Asano , Keiji Emoto
发明人： Mitsuhiro Furumoto , Tosiya Asano , Keiji Emoto
IPC分类号： F16M13/00 , F16F15/00
CPC分类号： F16F15/002 , G03F7/709 , G06F3/0488 , H01J2237/0216
摘要： The present invention provides an anti-vibration apparatus including an anti-vibration base, a plurality of supporting mechanisms configured to support the anti-vibration base, a plurality of actuators configured to apply a force to the anti-vibration base, an obtaining unit configured to obtain vibration data which represents vibrations on the anti-vibration base, a first calculation unit configured to calculate, based on the vibration data obtained by the obtaining unit, a force to be applied to the anti-vibration base so as to reduce the vibrations on the anti-vibration base, and a distribution unit configured to distribute the force calculated by the first calculation unit to forces to be applied by the plurality of actuators to the anti-vibration base.
摘要翻译：本发明提供一种抗振装置，包括防振基座，多个支撑机构，其构造成支撑防振基座;多个致动器，构造成向抗震基座施加力;获得单元构造以获得表示抗振基座上的振动的振动数据，第一计算单元，被配置为基于获得单元获得的振动数据计算施加到防振基座的力，以减少振动以及分配单元，其被配置为将由第一计算单元计算出的力分配给由多个致动器施加到防振基座的力。

3. 发明申请

US20110248578A1 POSITIONING APPARATUS 有权
标题翻译：定位装置
公开(公告)号：US20110248578A1
公开(公告)日：2011-10-13
申请号：US13166573
申请日：2011-06-22
申请人： Tosiya Asano , Yugo Shibata , Atsushi Kimura
发明人： Tosiya Asano , Yugo Shibata , Atsushi Kimura
IPC分类号： H02K41/02
CPC分类号： G03F7/70783 , G03F7/70758 , G03F7/70775 , H02K41/03 , H02K2201/18
摘要： A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The controller controls a current applied to the actuator in order to support the weight of the moving member. The bending rigidity of the moving member in the first direction is greater than the bending rigidity of the moving member in a second direction perpendicular to the first direction.
摘要翻译：定位装置包括移动构件，致动器和控制器。移动构件可以在至少第一方向上移动。致动器沿第一方向设置。控制器控制施加到致动器的电流，以便支撑移动构件的重量。移动构件在第一方向上的弯曲刚度大于垂直于第一方向的第二方向上的移动构件的弯曲刚度。

4. 发明授权

US08970821B2 Positioning apparatus, exposure apparatus and device manufacturing method 有权
标题翻译：定位装置，曝光装置及装置的制造方法
公开(公告)号：US08970821B2
公开(公告)日：2015-03-03
申请号：US13478916
申请日：2012-05-23
申请人： Tosiya Asano
发明人： Tosiya Asano
IPC分类号： G03B27/58 , G03F7/20 , G05D3/12
CPC分类号： G03F7/70725 , G05D3/12
摘要： A positioning apparatus includes a stage, a base, a supporting mechanism which is arranged between the stage and the base and supports the stage with a supporting portion having a spring characteristic, an actuator which is arranged between the stage and the base so as to drive the stage, and a controller which controls the actuator so as to reduce a position error of the stage relative to a target position and cancel at least part of a force acting on the stage due to the spring characteristic of the supporting portion, based on the position error of the stage and a variation of a relative position between the stage and the base.
摘要翻译：一种定位装置，包括台架，基座，支撑机构，其布置在台架和基座之间，并支撑具有弹簧特性的支撑部分的台架;致动器，布置在台架与基座之间以驱动并且控制器，其控制致动器，以便相对于目标位置减小平台的位置误差，并基于支撑部分的弹簧特性来抵消作用在台架上的力的至少一部分，基于舞台的位置误差和舞台与底座之间的相对位置的变化。

5. 发明申请

US20120281194A1 POSITIONING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE 审中-公开
标题翻译：定位装置，曝光装置和制造装置的方法
公开(公告)号：US20120281194A1
公开(公告)日：2012-11-08
申请号：US13461997
申请日：2012-05-02
申请人： Tosiya Asano
发明人： Tosiya Asano
IPC分类号： G03B27/54 , B23Q3/15
CPC分类号： G03F7/70758 , G03F7/7085
摘要： A positioning apparatus controls a relative position between a first member and a second member. The apparatus includes an electromagnet fixed to the first member, an attraction target fixed to the second member so as to be attracted by the electromagnet, a magnetic flux sensor which detects a magnetic flux value generated by the electromagnet, and a driving unit which drives the electromagnet in accordance with an error between the magnetic flux value detected by the magnetic flux sensor and a corrected magnetic flux command value obtained by correcting a magnetic flux command value in accordance with a size of a gap between the electromagnet and the attraction target.
摘要翻译：定位装置控制第一构件和第二构件之间的相对位置。该装置包括固定到第一构件的电磁体，固定到第二构件以被电磁体吸引的吸引目标，检测由电磁体产生的磁通值的磁通量传感器，以及驱动单元，电磁体根据由磁通量传感器检测的磁通值之间的误差和通过根据电磁体和吸引目标之间的间隙的大小校正磁通量指令值而获得的校正磁通指令值。

6. 发明授权

US07737419B2 Alignment apparatus, exposure apparatus, and device manufacturing method 失效
标题翻译：对准装置，曝光装置和装置的制造方法
公开(公告)号：US07737419B2
公开(公告)日：2010-06-15
申请号：US11761951
申请日：2007-06-12
申请人： Tosiya Asano
发明人： Tosiya Asano
IPC分类号： H01L21/027 , G03F7/20
CPC分类号： G03F7/70758
摘要： At least one exemplary embodiment is directed to an alignment apparatus which includes a moving member, a structural object arranged on the moving member, and an electromagnetic actuator which moves the structural object relative to the moving member. The electromagnetic actuator includes a plurality of linear motor units, which apply forces in the horizontal direction and the vertical direction to the structural object. The plurality of linear motor units apply, to the structural object, forces in the rotation direction about each of two axes orthogonal to each other in the horizontal plane and the rotation direction about the axis in the vertical direction.
摘要翻译：至少一个示例性实施例涉及一种对准装置，其包括移动构件，布置在移动构件上的结构物体以及使结构物体相对于移动构件移动的电磁致动器。电磁致动器包括多个线性电动机单元，其在与结构物体的水平方向和垂直方向上施加力。多个线性电动机单元在水平面中相对于彼此垂直的两个轴线和围绕轴线的垂直方向的旋转方向围绕旋转方向施加力。

7. 发明申请

US20080067415A1 ALIGNMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 失效
标题翻译：对准装置，曝光装置和装置制造方法
公开(公告)号：US20080067415A1
公开(公告)日：2008-03-20
申请号：US11761951
申请日：2007-06-12
申请人： Tosiya Asano
发明人： Tosiya Asano
IPC分类号： G21K5/10
CPC分类号： G03F7/70758
摘要： At least one exemplary embodiment is directed to an alignment apparatus which includes a moving member, a structural object arranged on the moving member, and an electromagnetic actuator which moves the structural object relative to the moving member. The electromagnetic actuator includes a plurality of linear motor units, which apply forces in the horizontal direction and the vertical direction to the structural object. The plurality of linear motor units apply, to the structural object, forces in the rotation direction about each of two axes orthogonal to each other in the horizontal plane and the rotation direction about the axis in the vertical direction.
摘要翻译：至少一个示例性实施例涉及一种对准装置，其包括移动构件，布置在移动构件上的结构物体以及使结构物体相对于移动构件移动的电磁致动器。电磁致动器包括多个线性电动机单元，其在与结构物体的水平方向和垂直方向上施加力。多个线性电动机单元在水平面中相对于彼此垂直的两个轴线和围绕轴线的垂直方向的旋转方向围绕旋转方向施加力。

8. 发明申请

US20060097585A1 Positioning apparatus, exposure apparatus using thereof and device manufacturing method 失效
标题翻译：定位装置，使用其的曝光装置和装置制造方法
公开(公告)号：US20060097585A1
公开(公告)日：2006-05-11
申请号：US11264881
申请日：2005-11-01
申请人： Tosiya Asano
发明人： Tosiya Asano
IPC分类号： H02K41/00
CPC分类号： G03F7/70758 , H02K41/03 , H02K2201/18
摘要： A positioning apparatus including a movable member having a plurality of magnets, and a plurality of coils arranged in X- and Y-axial directions, for displacing the movable member in the X- and Y-axial directions, and in a rotational direction around the Z-axis.
摘要翻译：一种定位装置，包括具有多个磁体的可动构件和沿X轴方向和Y轴方向排列的多个线圈，用于使所述可动构件在X轴方向和Y轴方向上移动，并且围绕所述旋转方向 Z轴。

9. 发明授权

US08031328B2 Positioning apparatus 有权
标题翻译：定位装置
公开(公告)号：US08031328B2
公开(公告)日：2011-10-04
申请号：US11339896
申请日：2006-01-26
申请人： Tosiya Asano , Yugo Shibata , Atsushi Kimura
发明人： Tosiya Asano , Yugo Shibata , Atsushi Kimura
IPC分类号： G03B27/58 , H02K41/02
CPC分类号： G03F7/70783 , G03F7/70758 , G03F7/70775 , H02K41/03 , H02K2201/18
摘要： A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The controller controls a current applied to the actuator in order to support the weight of the moving member. The bending rigidity of the moving member in the first direction is greater than the bending rigidity of the moving member in a second direction perpendicular to the first direction.
摘要翻译：定位装置包括移动构件，致动器和控制器。移动构件可以在至少第一方向上移动。致动器沿第一方向设置。控制器控制施加到致动器的电流，以便支撑移动构件的重量。移动构件在第一方向上的弯曲刚度大于垂直于第一方向的第二方向上的移动构件的弯曲刚度。

10. 发明授权

US07276866B2 Moving control apparatus and moving control method 有权
标题翻译：移动控制装置和移动控制方法
公开(公告)号：US07276866B2
公开(公告)日：2007-10-02
申请号：US11275763
申请日：2006-01-27
申请人： Tosiya Asano
发明人： Tosiya Asano
IPC分类号： H02K41/00
CPC分类号： G03F7/70725 , G03F7/70758 , H02P6/182 , H02P23/04 , H02P25/06
摘要： A moving control apparatus comprising: a moving member provided movably at least in one direction; a driver having a movable element connected to the moving member and a stator to displace the movable element; a controller which energizes the driver to cause the movable element to generate a thrust; a position detector which detects a relative position between the movable element and the stator in the driver; a measurement unit which drives the movable element of the driver and measures an induced voltage generated in the driver; and a correction calculator which calculates a thrust ripple correction value to correct a thrust ripple as a variation of a thrust generated in the driver from the measured induced voltage and the relative position in the driver, and multiplies a command to the driver by the correction value.
摘要翻译：一种移动控制装置，包括：至少在一个方向上可移动地设置的移动构件; 具有连接到所述移动构件的可动元件的驱动器和使所述可移动元件移位的定子; 使驱动器通电以使可动元件产生推力的控制器; 位置检测器，其检测所述驾驶员中的所述可动元件与所述定子之间的相对位置; 测量单元，其驱动驾驶员的可移动元件并测量在驾驶员中产生的感应电压; 以及校正计算器，其计算推力纹波校正值，以将驱动器中产生的推力的变化与驱动器中的感测电压和相对位置的推力波动相比较，并将命令乘以驾驶员的校正值。

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