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    • 1. 发明申请
    • Exposure method, exposure tool and method of manufacturing a semiconductor device
    • 曝光方法,曝光工具及制造半导体器件的方法
    • US20060082747A1
    • 2006-04-20
    • US11249712
    • 2005-10-14
    • Kazuya FukuharaShinichi Ito
    • Kazuya FukuharaShinichi Ito
    • G03B27/42
    • G03F7/70341G03B27/42G03F7/70358
    • An exposure method is disclosed, which includes forming on a substrate a resist film having first and second exposure fields arranged in a column direction, mounting the substrate on a scanning exposure tool in order to project a design pattern on the first and second exposure fields, forming a liquid immersion medium fluid film by using a liquid immersion medium fluid film forming unit, and projecting the design pattern onto the first or second exposure fields by varying an optical pattern image generated at the optical pattern image generating unit while moving the substrate in a direction in parallel with the column direction, wherein the projection of the design pattern onto the first and second exposure fields is continuously carried out without a change in a moving direction of the substrate and a direction of the flow of the liquid immersion medium fluid film.
    • 公开了一种曝光方法,其包括在基板上形成具有沿列方向布置的第一和第二曝光场的抗蚀剂膜,将基板安装在扫描曝光工具上,以便将设计图案投影在第一和第二曝光场上, 通过使用液浸介质流体膜形成单元形成液浸介质流体膜,并且通过改变在所述光学图案图像生成单元处生成的光学图案图像将所述设计图案投影到所述第一或第二曝光区域,同时将所述基板移动到 方向与列方向平行,其中连续执行设计图案在第一和第二曝光场上的投影,而不改变基板的移动方向和液浸介质流体膜的流动方向。
    • 2. 发明授权
    • Exposure method, exposure tool and method of manufacturing a semiconductor device
    • 曝光方法,曝光工具及制造半导体器件的方法
    • US07446853B2
    • 2008-11-04
    • US11249712
    • 2005-10-14
    • Kazuya FukuharaShinichi Ito
    • Kazuya FukuharaShinichi Ito
    • G03B27/42G03B27/52
    • G03F7/70341G03B27/42G03F7/70358
    • An exposure method is disclosed, which includes forming on a substrate a resist film having first and second exposure fields arranged in a column direction, mounting the substrate on a scanning exposure tool in order to project a design pattern on the first and second exposure fields, forming a liquid immersion medium fluid film by using a liquid immersion medium fluid film forming unit, and projecting the design pattern onto the first or second exposure fields by varying an optical pattern image generated at the optical pattern image generating unit while moving the substrate in a direction in parallel with the column direction, wherein the projection of the design pattern onto the first and second exposure fields is continuously carried out without a change in a moving direction of the substrate and a direction of the flow of the liquid immersion medium fluid film.
    • 公开了一种曝光方法,其包括在基板上形成具有沿列方向布置的第一和第二曝光场的抗蚀剂膜,将基板安装在扫描曝光工具上,以便将设计图案投影在第一和第二曝光场上, 通过使用液浸介质流体膜形成单元形成液浸介质流体膜,并且通过改变在所述光学图案图像生成单元处生成的光学图案图像将所述设计图案投影到所述第一或第二曝光区域,同时将所述基板移动到 方向与列方向平行,其中连续执行设计图案在第一和第二曝光场上的投影,而不改变基板的移动方向和液浸介质流体膜的流动方向。
    • 7. 发明授权
    • Drive system for vehicle
    • 车辆驱动系统
    • US08672112B2
    • 2014-03-18
    • US13240329
    • 2011-09-22
    • Minoru IkedaShinichi Ito
    • Minoru IkedaShinichi Ito
    • F16D25/0638F16D48/02
    • F16D48/02F16D25/0638F16D2048/0233F16D2048/0269F16D2048/0272
    • A drive system for a vehicle includes an engine, a transmission, a clutch mechanism including first and second clutch portions, the clutch mechanism being switchable between connected and disconnected states, and a clutch operation mechanism switching the clutch mechanism between the connected and disconnected states, the clutch operation mechanism including a clutch drum forming a drum chamber, a piston dividing the drum chamber into a spring chamber and a pressurizing chamber, a control valve, a biasing member arranged in the spring chamber and exerting a biasing force in a direction in which the first and second clutch portions are engaged with each other, and a bore formed in the clutch drum, the bore discharging oil of the spring chamber to an outer side of the spring chamber in a state where a counteracting force against a centrifugal force acting in the pressurizing chamber is generated in the spring chamber.
    • 一种用于车辆的驱动系统包括发动机,变速器,包括第一和第二离合器部分的离合器机构,离合器机构可在连接状态和断开状态之间切换,以及离合器操作机构,在离合器机构在连接状态和断开状态之间切换, 所述离合器操作机构包括形成鼓室的离合器鼓,将所述鼓室分隔成弹簧室的活塞和加压室,控制阀,设置在所述弹簧室中的施力构件,并施加沿其中 第一离合器部分和第二离合器部分彼此接合,并且形成在离合器鼓中的孔,孔将弹簧室的油排出到弹簧室的外侧,该反作用力抵抗作用在 在弹簧室中产生加压室。
    • 9. 发明申请
    • SIGNAL GENERATING DEVICE AND SIGNAL GENERATING METHOD
    • 信号发生装置和信号发生方法
    • US20130012139A1
    • 2013-01-10
    • US13535429
    • 2012-06-28
    • Toru OtaniShinichi Ito
    • Toru OtaniShinichi Ito
    • H04W24/00
    • H04B17/14H04B17/11
    • To provide a signal generating device and a signal generating method capable of correcting the frequency characteristics of the level of a broadband radio-frequency signal. A signal generating device 10 includes a waveform data storage unit 11 that stores waveform data of a baseband signal, a quadrature modulator 20 that generates a modulation signal from the baseband signal, a local oscillator 31 that generates a local oscillation signal, a multiplier 32 that multiplies the modulation signal and the local oscillation signal to generate a radio-frequency signal in a predetermined frequency band, a frequency characteristic correction value determining unit 50 that acquires the frequency characteristics of the signal level of the frequency band on the basis of the center frequency of the radio-frequency signal, and a DF 12 that corrects the frequency characteristics of the level of the baseband signal.
    • 提供能够校正宽带射频信号的电平的频率特性的信号发生装置和信号产生方法。 信号发生装置10包括存储基带信号的波形数据的波形数据存储单元11,从基带信号产生调制信号的正交调制器20,产生本地振荡信号的本地振荡器31,乘法器32, 将调制信号和本地振荡信号相乘以产生预定频带中的射频信号;频率特性校正值确定单元50,基于中心频率获取频带的信号电平的频率特性 和用于校正基带信号电平的频率特性的DF12。