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1. 发明授权

US6105781A Thin-plate supporting container with unitary porous gasket 失效
标题翻译：带单孔多孔垫片的薄板支撑容器
公开(公告)号：US6105781A
公开(公告)日：2000-08-22
申请号：US107829
申请日：1998-06-30
申请人： Kazutoshi Ejima , Yukihiro Hyobu
发明人： Kazutoshi Ejima , Yukihiro Hyobu
IPC分类号： H01L21/673 , B65D85/30 , B65D43/06 , B65D53/00
CPC分类号： H01L21/67393 , H01L21/67376
摘要： A carrier box serving as a thin-plate supporting container includes a container body for defining therein a chamber for supporting and housing therein a plurality of semiconductor wafers and a lid for covering the container body. In one embodiment, the carrier box includes an internal-pressure adjusting mechanism for maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber. The internal-pressure adjusting mechanism is composed of an opening formed in a wall of the container body and a filter detachably mounted in the opening for removing foreign matters while allowing gas to easily enter and exit the chamber so as to maintain the chamber in a clean state. In another embodiment, the carrier box includes a gasket made of a porous material. The gasket is provided between the container body and the lid for removing foreign matters while allowing gas to easily enter and exit the chamber so as to maintain the chamber in a clean state while maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber.
摘要翻译：用作薄板支撑容器的载体盒包括用于在其中限定用于支撑和容纳多个半导体晶片的腔室的容器主体和用于覆盖容器主体的盖。在一个实施例中，载体箱包括用于将室内的内部压力保持在与室的外部压力相同水平的内压调节机构。内压调节机构由形成在容器主体的壁上的开口和可拆卸地安装在开口中的用于除去异物的过滤器，同时允许气体容易地进出室，从而将室保持在清洁状态州。在另一个实施例中，载体盒包括由多孔材料制成的垫圈。垫圈设置在容器主体和盖之间，用于除去异物，同时允许气体容易地进出室，以便将室保持在清洁状态，同时将室中的内部压力保持在与室内相同的水平对室的外部压力。

2. 发明授权

US6032802A Thin-plate supporting container with filter means 有权
标题翻译：带过滤装置的薄板支撑容器
公开(公告)号：US6032802A
公开(公告)日：2000-03-07
申请号：US189975
申请日：1998-11-12
申请人： Kazutoshi Ejima , Yukihiro Hyobu
发明人： Kazutoshi Ejima , Yukihiro Hyobu
IPC分类号： H01L21/673 , B65D85/42 , B01D46/00
CPC分类号： H01L21/67393 , H01L21/67376
摘要： A carrier box serving as a thin-plate supporting container includes a container body for defining therein a chamber for supporting and housing therein a plurality of semiconductor wafers and a lid for covering the container body. In one embodiment, the carrier box includes an internal-pressure adjusting mechanism for maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber. The internal-pressure adjusting mechanism is composed of an opening formed in a wall of the container body or the like, and a filter detachably mounted in the opening for removing foreign matters while allowing gas to easily enter and exit said chamber so as to maintain the chamber in a clean state. In another embodiment, the carrier box includes a gasket made of a porous material or the like. The gasket is provided between the container body and the lid for removing foreign matters while allowing gas to easily enter and exit the chamber so as to maintain the chamber in a clean state while maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber.
摘要翻译：用作薄板支撑容器的载体盒包括用于在其中限定用于支撑和容纳多个半导体晶片的腔室的容器主体和用于覆盖容器主体的盖。在一个实施例中，载体箱包括用于将室内的内部压力保持在与室的外部压力相同水平的内压调节机构。内压调节机构由形成在容器主体等的壁上的开口部以及可拆卸地安装在开口中的用于除去异物的过滤器，同时允许气体容易地进出所述室，从而保持房间处于干净状态。在另一个实施例中，载体盒包括由多孔材料等制成的垫圈。垫圈设置在容器主体和盖之间，用于除去异物，同时允许气体容易地进出室，以便将室保持在清洁状态，同时将室中的内部压力保持在与室内相同的水平对室的外部压力。

3. 发明授权

US5873468A Thin-plate supporting container with filter means 失效
标题翻译：带过滤装置的薄板支撑容器
公开(公告)号：US5873468A
公开(公告)日：1999-02-23
申请号：US745837
申请日：1996-11-08
申请人： Kazutoshi Ejima , Yukihiro Hyobu
发明人： Kazutoshi Ejima , Yukihiro Hyobu
IPC分类号： H01L21/673 , B65D85/42 , B01D46/00
CPC分类号： H01L21/67393 , H01L21/67376
摘要： A carrier box serving as a thin-plate supporting container includes a container body for defining therein a chamber for supporting and housing therein a plurality of semiconductor wafers and a lid for covering the container body. In one embodiment, the carrier box includes an internal-pressure adjusting mechanism for maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber. The internal-pressure adjusting mechanism is composed of an opening formed in a wall of the container body or the like, and a filter detachably mounted in the opening for removing foreign matters while allowing gas to easily enter and exit the chamber so as to maintain the chamber in a clean state. In another embodiment, the carrier box includes a gasket made of a porous material or the like. The gasket is provided between the container body and the lid for removing foreign matters while allowing gas to easily enter and exit the chamber so as to maintain the chamber in a clean state while maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber.
摘要翻译：用作薄板支撑容器的载体盒包括用于在其中限定用于支撑和容纳多个半导体晶片的腔室的容器主体和用于覆盖容器主体的盖。在一个实施例中，载体箱包括用于将室内的内部压力保持在与室的外部压力相同水平的内压调节机构。内压调节机构由形成在容器主体等的壁上的开口部和可拆卸地安装在开口中的用于除去异物的过滤器，同时允许气体容易地进出室，从而保持房间处于干净状态。在另一个实施例中，载体盒包括由多孔材料等制成的垫圈。垫圈设置在容器主体和盖之间，用于除去异物，同时允许气体容易地进出室，以便将室保持在清洁状态，同时将室中的内部压力保持在与室内相同的水平对室的外部压力。

4. 发明授权

US6032817A Easily attachable/detachable lid mounted container 失效
标题翻译：易于安装/拆卸的盖子安装的容器
公开(公告)号：US6032817A
公开(公告)日：2000-03-07
申请号：US094565
申请日：1998-06-15
申请人： Kazutoshi Ejima , Yukihiro Hyobu
发明人： Kazutoshi Ejima , Yukihiro Hyobu
IPC分类号： B65D85/86 , A45C13/00 , B65D43/02 , E05B17/00 , E05C19/06 , H01L21/673 , B65D45/16
CPC分类号： H01L21/67373 , A45C13/005 , E05B17/0033 , E05C19/06 , Y10T24/45529 , Y10T292/0898
摘要： An easily attachable/detachable lid mounted container includes a container body, a lid for covering the container body, and an easy attach/detach mechanism for reliably securing the lid to the container body and for easily detaching the lid from the container body. The easy attach/detach mechanism includes: an engagement plate provided on the lid and extending toward the container body, the engagement plate being resilient and bendable; an object engagement portion, provided on the container body, for engaging, when the lid is pressed toward the container body, with the engagement plate so as to secure the lid to the container body; and separation means, provided between the engagement plate and the object engagement portion, for separating the engagement plate from the object engagement portion when the separation means is pressed toward the container body. When the lid is removed from the container body, the separation means is pressed downward to thereby separate the engagement plate from the object engagement portion so as to release the lid, having been secured, from the container body.
摘要翻译：容易安装/拆卸的盖子安装的容器包括容器主体，用于覆盖容器主体的盖子，以及用于将盖子可靠地固定到容器主体上并且容易地将盖子从容器主体分离的容易的附接/拆卸机构。容易的安装/拆卸机构包括：设置在盖上并朝向容器主体延伸的接合板，接合板是弹性和可弯曲的; 设置在所述容器主体上的物体接合部，用于当所述盖朝向所述容器主体被挤压时与所述接合板接合以将所述盖固定到所述容器主体; 以及设置在接合板和物体接合部之间的分离装置，用于当分离装置被朝向容器主体按压时将接合板与物体接合部分离。当从容器主体移除盖子时，分离装置被向下压，从而将接合板与物体接合部分隔开，从而将已被固定的盖从容器本体上释放出来。

5. 发明申请

US20090250374A1 SEMICONDUCTOR WAFER CONTAINER 失效
公开(公告)号：US20090250374A1
公开(公告)日：2009-10-08
申请号：US12442476
申请日：2008-02-19
申请人： Nobuyuki Kasama , Yukihiro Hyobu
发明人： Nobuyuki Kasama , Yukihiro Hyobu
IPC分类号： B65D85/86
CPC分类号： H01L21/67383 , H01L21/67309
摘要： A wafer-retaining unit (20) has a plurality of vertically superimposed single-wafer retaining sections (21 to 23), each having a wafer-retaining frame (21) abutting against only a lower end edge portion of the outer periphery of a semiconductor wafer (W), a wafer-securing frame (22) disposed vertically movably relative to the wafer-retaining frame (21) to abut against only an upper end edge portion of the outer periphery of the semiconductor wafer (W), and wafer lift members (23) that lift up the semiconductor wafer (W) to a position where it is upwardly separate from the wafer-retaining frame (21) and keep the semiconductor wafer (W) in this position. Consequently, a plurality of semiconductor wafers (W) can be accommodated efficiently and safely without increasing the space between each pair of mutually adjacent semiconductor wafers (W). At the same time, the semiconductor wafers (W) can be loaded and unloaded satisfactorily.
摘要翻译：晶片保持单元（20）具有多个垂直叠加的单晶片保持部分（21至23），每个单晶片保持部分（21至23）均具有仅与半导体外周缘的下端缘部分邻接的晶片保持框架晶片（W），相对于晶片保持框架（21）垂直可移动地设置以仅抵靠半导体晶片（W）的外周的上端边缘部分的晶片固定框架（22），以及晶片升降将半导体晶片（W）提升到与晶片保持框架（21）向上分离的位置并将半导体晶片（W）保持在该位置的构件（23）。因此，可以有效且安全地容纳多个半导体晶片（W），而不增加每对相互相邻的半导体晶片（W）之间的空间。同时，半导体晶片（W）可以令人满意地装载和卸载。

6. 发明申请

US20050252571A1 Apparatus for replacing gas in storage container and method for replacing gas therewith 失效
标题翻译：用于替换储存容器中的气体的装置和用于替换气体的方法
公开(公告)号：US20050252571A1
公开(公告)日：2005-11-17
申请号：US11109863
申请日：2005-04-20
申请人： Ryuichi Nakano , Yukihiro Hyobu , Yoshihisa Okamoto
发明人： Ryuichi Nakano , Yukihiro Hyobu , Yoshihisa Okamoto
IPC分类号： B65B31/04 , B65D81/20 , H01L21/00 , H01L21/673 , H01L21/677 , B65B1/04
CPC分类号： H01L21/67393 , H01L21/67017 , H01L21/67772 , Y10S414/139 , Y10S414/14
摘要： While gas in a general storage container with no gas inlet and in the storage container with the gas inlet is replaced in a short time, the semiconductor wafer surface is cleaned. In an apparatus for replacing gas in a semiconductor wafer storage container which includes a lid unit and a storage container main body with a gas inlet, the apparatus includes gas introducing means for introducing the gas into the storage container main body, gas evacuating means for evacuating the gas in the storage container main body, and gas circulating means for circulating the gas in the storage container main body through a chemical adsorption filter. Gas introducing means for introducing the gas from a gap between the storage container main body and the lid unit while the lid unit is opened in the storage container mounting means is provided in the storage container with no gas inlet.
摘要翻译：虽然在短时间内更换没有气体入口的一般存储容器和具有气体入口的存储容器中的气体，但是清洁半导体晶片表面。另外，在具有盖单元和具有气体入口的收纳容器主体的半导体晶片收容容器中更换气体的装置中，具备将气体导入储存容器主体的气体导入机构，用于排气的排气装置储存容器主体中的气体，以及通过化学吸附过滤器使气体在储存容器主体中循环的气体循环装置。在储存容器安装装置中打开盖单元时，从存储容器主体和盖单元之间的间隙引入气体的气体引入装置设置在没有进气口的存储容器中。

7. 发明授权

US07722095B2 Lid unit for thin-plate holding container, thin-plate holding container, and simplified attaching/detaching mechanism 有权
标题翻译：薄板保持容器，薄板保持容器用盖单元，简化安装/拆卸机构
公开(公告)号：US07722095B2
公开(公告)日：2010-05-25
申请号：US11104620
申请日：2005-04-13
申请人： Yukihiro Hyobu , Chiaki Matsutori , Tadahiro Obayashi
发明人： Yukihiro Hyobu , Chiaki Matsutori , Tadahiro Obayashi
IPC分类号： E05C5/00
CPC分类号： H01L21/67373 , H01L21/67772 , Y10T292/089 , Y10T292/1014 , Y10T292/1022 , Y10T292/432
摘要： The present invention provides a lid unit for closing the container body 2 that is transported with thin-plates such as semiconductor wafers or the like accommodated therein. Simplified attaching/detaching mechanisms 32 for the production line are provided at the centers of the respective sides opposing with respect to each other. The simplified attaching/detaching mechanism 32 for the production line includes a locking plate 34 for locking the second fitted portion 21 and a drive-out member 35 for allowing the drive-out member 35 to rise and set by being engaged with the locking plate 34. A locking arm 57 for fixing the drive-out member 35 is provided on the drive-out member 35 at the end in the direction of rotation. A supporting rail 56 for controlling the rising and setting movement of the locking plate 34 is provided on the drive-out member 35. The locking plate 34 is supported pivotally and slidably, and is provided with a holding claw 51 for engaging the second fitted portion 21 at the distal end thereof. The thin-plate holding container 1 is used for transportation when the lid unit 4 for transportation is attached on the container body 2, and is used for the production line when the lid body 5 for the production line is attached thereon.
摘要翻译：本发明提供了一种用于关闭容纳体2的盖单元，该容器主体2被容纳在其中的诸如半导体晶片等的薄板传送。用于生产线的简化的附接/分离机构32设置在相对于彼此相对的相应侧的中心处。用于生产线的简化的安装/拆卸机构32包括用于锁定第二装配部分21的锁定板34和用于允许驱出部件35通过与锁定板34接合而升起和固定的驱出部件35 用于固定驱出部件35的锁定臂57在旋转方向的端部设置在驱出部件35上。用于控制锁定板34的上升和下降运动的支撑轨道56设置在驱出部件35上。锁定板34可枢转地和可滑动地支撑，并且设置有用于接合第二配合部分的保持爪51 21在其远端。当运输用盖单元4安装在容器主体2上时，薄板保持容器1用于运输，并且当用于生产线的盖体5被安装在生产线上时。

8. 发明申请

US20090297303A1 Thin Plate Container and Processing Apparatus for Thin Plate Container 失效
标题翻译：薄板容器和薄板容器加工装置
公开(公告)号：US20090297303A1
公开(公告)日：2009-12-03
申请号：US11992588
申请日：2006-09-20
申请人： Yukihiro Hyobu , Atsushi Osada
发明人： Yukihiro Hyobu , Atsushi Osada
IPC分类号： H01L21/67 , H01L21/673 , H01L23/02 , B65G1/04 , B65G65/00
CPC分类号： H01L21/67346 , H01L21/67778
摘要： Arbitrary pieces of semiconductor wafers are supported flexibly on either the upper side or the lower side. The present invention is a thin plate container for supporting plural semiconductor wafers for use in carriage, storage, processing, etc. It comprises processing trays plurally stacked in a state of each supporting at least one semiconductor wafer individually and a coupling mechanism for integrally coupling the processing trays in a state where the processing trays are plurally stacked and separating the processing trays at an arbitrary location. Each processing tray has a one-side support for supporting at least one semiconductor wafer on its one side and the other-side support mutually fitted to the one-side support of the other processing tray on the other side to form a housing space sealed off from the external environment for constraining and supporting the thin plate. Accordingly, as many processing trays as the number of the semiconductor wafers are stacked to constitute the thin plate container.
摘要翻译：半导体晶片的任意部分被柔性地支撑在上侧或下侧。本发明是用于支撑用于运输，储存，加工等的多个半导体晶片的薄板容器。它包括在每个支撑至少一个半导体晶片的状态下多个层叠的多个托盘的处理和用于将在处理托盘多层叠的状态下处理托盘，并在任意位置分离处理托盘。每个处理托盘具有一侧支撑件，用于在其一侧支撑至少一个半导体晶片，另一侧支撑件相互配合在另一侧的另一个处理托盘的一侧支撑件上以形成封闭的壳体空间从外部环境限制和支撑薄板。因此，与堆叠半导体晶片的数量一样多的处理托盘构成薄板容器。

9. 发明授权

US06491177B1 Thin-plate accommodating/transporting container 有权
标题翻译：薄板容纳/运输容器
公开(公告)号：US06491177B1
公开(公告)日：2002-12-10
申请号：US09536780
申请日：2000-03-28
申请人： Yukihiro Hyobu
发明人： Yukihiro Hyobu
IPC分类号： B65D5300
CPC分类号： H01L21/67373 , H01L21/67383 , H01L21/67386
摘要： Disclosed is a thin-plate accommodating/transporting container including a container body for accomodating and supporting a plurality of thin plates while keeping the interior of the container clean, comprising: positioning means, provided at the container body, for accurately adjusting a placement position of the container body; lid receiving portion which is provided in the container body and to which the lid is attached; and engagement means, provided at the lid receiving portion, for engaging with various types of lids of different attachment methods.
摘要翻译：本发明公开了一种薄板收纳运送容器，该容器包括：容纳体，用于容纳多个薄板，同时保持容器内部的清洁，包括：设置在容器主体上的定位装置，用于精确地调节容器主体;盖容纳部，其设置在容器主体中并且盖被附接到该容器主体; 设置在盖接收部分处的用于与各种类型的具有不同附接方式的盖接合的接合装置。

10. 发明授权

US06474474B2 Sheet support container 有权
标题翻译：纸张支撑容器
公开(公告)号：US06474474B2
公开(公告)日：2002-11-05
申请号：US09381460
申请日：1999-09-21
申请人： Yukihiro Hyobu , Yasunori Oka
发明人： Yukihiro Hyobu , Yasunori Oka
IPC分类号： B65D8530
CPC分类号： H01L21/67379 , H01L21/67383
摘要： The present invention relates to a thin-plate supporting container 1 having a container body 2, and a thin-plate supporting unit 3 for supporting the semiconductor wafers from both sides thereof in the container body. There are provided a lid 4, and an easy attach/detach mechanism for attaching and detaching the lid 4. The easy attach/detach mechanism 31 is composed of a lid engaging claw 32 provided on the circumference of the lid 4, and object engagement part 28, provided on the container body 2, for engaging with the lid engagement claw 32 so as to secure the lid 4 to the container body 2, an arm 34 for releasing the lid engagement claw 32 from the object engagement part 28; and an elevating mechanism for slightly elevating the lid 4 from the container body 2 when the lid engagement claw 32 is released by means of the arm 34. The thin-plate supporting unit 3, the top flange 5, the carrying handle 6 are detachably mounted. The thin-plate supporting unit 3 is formed with a V-shaped groove 38. For the container 1 to be easily stacked, there are provided leg 18 and a leg receiving part 30. Thereby, the operations of attaching and detaching the lid 4 and the operation of washing the whole container are made easy.
摘要翻译：本发明涉及一种具有容器主体2的薄板支撑容器1和用于从容器主体的两侧支撑半导体晶片的薄板支撑单元3。设置有盖4，以及用于安装和拆卸盖4的容易的安装/拆卸机构。容易的安装/拆卸机构31由设置在盖4的圆周上的盖接合爪32和物体接合部如图28所示，设置在容器主体2上，用于与盖接合爪32接合以将盖4固定到容器主体2;用于将盖接合爪32从物体接合部28释放的臂34; 以及用于当通过臂34释放盖接合爪32时从容器主体2稍微升高盖4的升降机构。薄板支撑单元3，顶部凸缘5，运载手柄6可拆卸地安装。薄板支撑单元3形成有V形槽38.对于易于堆叠的容器1，设置有腿部18和腿部容纳部30.由此，安装和拆卸盖4和清洗整个容器的操作变得容易。

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