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1. 发明授权

US5847466A Semiconductor device and manufacturing method for the same 失效
标题翻译：半导体器件及其制造方法相同
公开(公告)号：US5847466A
公开(公告)日：1998-12-08
申请号：US759441
申请日：1996-12-05
申请人： Kazunori Ito , Mitsugu Irinoda , Kaichi Ueno , Mamoru Ishida , Takahiko Kuroda
发明人： Kazunori Ito , Mitsugu Irinoda , Kaichi Ueno , Mamoru Ishida , Takahiko Kuroda
IPC分类号： H01L21/66 , H01L21/302 , H01L21/3065 , H01L21/3205 , H01L21/60 , H01L21/768 , H01L23/485 , H01L23/522 , H01L23/48 , H01L23/52 , H01L29/40
CPC分类号： H01L24/05 , H01L24/03 , H01L2224/05093 , H01L2224/05096 , H01L2224/05556 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01011 , H01L2924/01013 , H01L2924/01014 , H01L2924/01033 , H01L2924/01074 , H01L2924/01082 , H01L2924/14
摘要： A semiconductor device having a multilayer interconnection structure, includes a substrate having a metal interconnect layer provided thereon and N number (N being an integer of 2 or greater) of layers of insulating film formed one on top of another on the substrate. Each layer of insulating film has a metal interconnect layer including at least one bonding pad section provided thereon. At least one via hole filled with an electrically conductive material is provided in each of the layers for interconnecting metal interconnect layers. At least one bonding pad connecting hole filled with an electrically conductive material is provided in each of the layers for interconnecting bonding pad sections. The at least one bonding pad connecting hole is no more than twice as large in diameter as a smallest via hole.
摘要翻译：具有多层互连结构的半导体器件包括其上设置有金属互连层的基板和在基板上一个在其上彼此形成的N个绝缘膜层的N个（N为2以上的整数）。每层绝缘膜具有包括设置在其上的至少一个接合焊盘部分的金属互连层。在每个层中设置至少一个填充有导电材料的通孔，用于互连金属互连层。在每个层中设置至少一个填充有导电材料的焊盘连接孔，用于互连焊盘区段。所述至少一个焊盘连接孔的直径不小于最小通孔的直径的两倍。

2. 发明申请

US20080309734A1 ELECTROSTATIC ACTUATOR FORMED BY A SEMICONDUCTOR MANUFACTURING PROCESS 有权
标题翻译：由半导体制造工艺形成的静电致动器
公开(公告)号：US20080309734A1
公开(公告)日：2008-12-18
申请号：US12174342
申请日：2008-07-16
申请人： Man Abu NISHIMURA , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
发明人： Man Abu NISHIMURA , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
IPC分类号： B41J2/045
CPC分类号： B41J2/1628 , B06B1/0292 , B41J2/14314 , B41J2/16 , B41J2/1623 , B41J2/1629 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14411
摘要： An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.
摘要翻译：静电致动器具有高可靠性和较小的特性变化。在基板（1）上形成电极（12a），在电极上形成有多个分隔部（50a）。振动板（19）形成在分隔部分（50a）上，并且由施加到电极（12a）的电压产生的静电力变形，使得在分隔部分（50a）之间形成气隙）通过蚀刻形成在电极（12a）和振动板（19）之间的牺牲层（14）的一部分。在蚀刻之后，分隔部分（50a）由牺牲层（14）的剩余部分形成。

3. 发明授权

US08052249B2 Liquid discharge head, liquid supply cartridge, and liquid jet apparatus having electrostatic actuator formed by a semiconductor manufacturing process 有权
标题翻译：液体排出头，液体供应盒和具有由半导体制造工艺形成的静电致动器的液体喷射装置
公开(公告)号：US08052249B2
公开(公告)日：2011-11-08
申请号：US12174342
申请日：2008-07-16
申请人： Manabu Nishimura , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
发明人： Manabu Nishimura , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
IPC分类号： B41J2/04 , H02N1/00
CPC分类号： B41J2/1628 , B06B1/0292 , B41J2/14314 , B41J2/16 , B41J2/1623 , B41J2/1629 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14411
摘要： An approach applying a semiconductor manufacturing process in the manufacturing of an electrostatic actuator, such as for a droplet discharging head, liquid supply cartridge, inkjet recording apparatus and/or liquid jet apparatus, is provided. Such electrostatic actuator has high-reliability and less variation in characteristics.
摘要翻译：提供了一种在诸如液滴喷射头，液体供应盒，喷墨记录装置和/或液体喷射装置的静电致动器的制造中应用半导体制造工艺的方法。这种静电致动器具有高可靠性和较小的特性变化。

4. 发明授权

US07416281B2 Electrostatic actuator formed by a semiconductor manufacturing process 有权
标题翻译：由半导体制造工艺形成的静电致动器
公开(公告)号：US07416281B2
公开(公告)日：2008-08-26
申请号：US10521055
申请日：2003-08-05
申请人： Manabu Nishimura , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
发明人： Manabu Nishimura , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
IPC分类号： B41J2/04 , H02N1/00 , G02B26/00
CPC分类号： B41J2/1628 , B06B1/0292 , B41J2/14314 , B41J2/16 , B41J2/1623 , B41J2/1629 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14411
摘要： An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.
摘要翻译：静电致动器具有高可靠性和较小的特性变化。在基板（1）上形成电极（12a），在电极上形成多个分隔部（50a）。振动板（19）形成在分隔部分（50a）上，并且由施加到电极（12a）的电压产生的静电力变形，使得在隔板通过蚀刻形成在电极（12a）和振动板（19）之间的牺牲层（14）的一部分，部分（50μm）。在蚀刻之后，分隔部分（50a）由牺牲层（14）的剩余部分形成。

5. 发明申请

US20050264617A1 Electrostatic actuator formed by a semiconductor manufacturing process 有权
标题翻译：由半导体制造工艺形成的静电致动器
公开(公告)号：US20050264617A1
公开(公告)日：2005-12-01
申请号：US10521055
申请日：2003-08-05
申请人： Manabu Nishimura , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
发明人： Manabu Nishimura , Takahiko Kuroda , Shuya Abe , Makoto Tanaka , Mitsugu Irinoda , Kenichiroh Hashimoto
IPC分类号： B41J2/14 , B41J2/16 , B41J2/045
CPC分类号： B41J2/1628 , B06B1/0292 , B41J2/14314 , B41J2/16 , B41J2/1623 , B41J2/1629 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14411
摘要： An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.
摘要翻译：静电致动器具有高可靠性和较小的特性变化。在基板（1）上形成电极（12a），在电极上形成多个分隔部（50a）。振动板（19）形成在分隔部分（50a）上，并且由施加到电极（12a）的电压产生的静电力变形，使得在隔板通过蚀刻形成在电极（12a）和振动板（19）之间的牺牲层（14）的一部分，部分（50μm）。在蚀刻之后，分隔部分（50a）由牺牲层（14）的剩余部分形成。

6. 发明授权

US09033468B2 Actuator element, liquid drop discharge head, liquid drop discharge apparatus and image forming apparatus 有权
标题翻译：驱动元件，液滴排出头，液滴排出装置和成像装置
公开(公告)号：US09033468B2
公开(公告)日：2015-05-19
申请号：US14208004
申请日：2014-03-13
申请人： Kouji Ohnishi , Takahiko Kuroda , Manabu Nishimura , Kaichi Ueno
发明人： Kouji Ohnishi , Takahiko Kuroda , Manabu Nishimura , Kaichi Ueno
IPC分类号： B41J2/14 , B41J2/045 , H01L41/047
CPC分类号： B41J2/14201 , B41J2/14233 , B41J2202/11 , B41J2202/18 , H01L41/0475 , H01L41/0973
摘要： An actuator element includes an electrode film; and an insulation film layered on the electrode film including a through hole for connecting a wiring which is formed on the insulation film to the electrode film. A shape of a rim of the through hole is either a closed curve free of corners or a polygon with vertex angles which are larger than 90 degrees.
摘要翻译：致动器元件包括电极膜; 以及层叠在电极膜上的绝缘膜，包括用于将形成在绝缘膜上的布线连接到电极膜的通孔。通孔的边缘的形状是无角的闭合曲线或顶角大于90度的多边形。

7. 发明授权

US10828894B2 Actuator, liquid discharge head, liquid discharge device, and liquid discharge apparatus 有权
公开(公告)号：US10828894B2
公开(公告)日：2020-11-10
申请号：US16352895
申请日：2019-03-14
申请人： Takahiko Kuroda
发明人： Takahiko Kuroda
IPC分类号： B41J2/14 , H01L41/09 , B41J2/16
摘要： An actuator includes an actuator substrate and a diaphragm forming an inner wall defining a space in the actuator substrate. The diaphragm includes a first layer made of material that does not transmit light of a specific wavelength; a second layer made of material that transmits the light of a specific wavelength; an active region covering a central area of the diaphragm, the active region including the first layer and the second layer; and at least two transmissive regions formed at a circumference of the diaphragm, each of the at least two transmissive regions including the second layer without the first layer.

8. 发明授权

US09362478B2 Method of producing electromechanical transducer element, electromechanical transducer element, liquid droplet discharge head, and image forming apparatus 有权
标题翻译：制造机电换能器元件，机电换能器元件，液滴喷射头和成像装置的方法
公开(公告)号：US09362478B2
公开(公告)日：2016-06-07
申请号：US14572930
申请日：2014-12-17
申请人： Toshiaki Masuda , Keishi Miwa , Keisuke Hayashi , Takahiko Kuroda
发明人： Toshiaki Masuda , Keishi Miwa , Keisuke Hayashi , Takahiko Kuroda
IPC分类号： B41J2/015 , B41J2/045 , B21D53/76 , B23P17/00 , H01L41/22 , H04R17/00 , H01L41/053 , H01L41/23 , H01L41/08 , H01L41/09
CPC分类号： H01L41/0533 , H01L41/0805 , H01L41/0973 , H01L41/23
摘要： A method of producing an electromechanical transducer element includes forming a first, common electrode on one of a substrate and an undercoat layer; forming an electromechanical transducer film on the first electrode; forming a second electrode on the electromechanical transducer film; forming a first protective film on an upper surface of the second electrode, the electromechanical transducer film, and a side wall of the second electrode, and selectively forming a second protective film on a portion of the first protective film protecting the electromechanical transducer film and the side wall of the second electrode.
摘要翻译：一种制造机电换能器元件的方法包括在基底和底涂层之一上形成第一公共电极; 在所述第一电极上形成机电换能器膜; 在所述机电换能器膜上形成第二电极; 在第二电极的上表面，机电换能器膜和第二电极的侧壁上形成第一保护膜，并且在保护机电换能器膜的第一保护膜的一部分上选择性地形成第二保护膜，第二电极的侧壁。

9. 发明申请

US20120206545A1 INKJET HEAD AND IMAGE FORMING DEVICE 有权
标题翻译：喷墨头和图像形成装置
公开(公告)号：US20120206545A1
公开(公告)日：2012-08-16
申请号：US13365352
申请日：2012-02-03
申请人： Masaki Kato , Kiyoshi Yamaguchi , Takahiko Kuroda , Satoshi Mizukami
发明人： Masaki Kato , Kiyoshi Yamaguchi , Takahiko Kuroda , Satoshi Mizukami
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14491
摘要： Disclosed is an inkjet head that includes individual liquid chambers having liquid droplet discharging holes; an oscillation plate; piezoelectric elements formed by laminating a lower electrode, a piezoelectric material, and upper electrodes on the oscillation plate, wherein the lower electrode is a common electrode and the upper electrode is an individual electrode; a common electrode wiring connected to the lower electrode;and individual electrode wirings connected to the corresponding upper electrodes of the piezoelectric elements, wherein driving signals are individually input to the corresponding individual electrode wirings. The inkjet head further includes an upper layer insulator film; an intermediate layer insulator film; and a lower layer insulator film. The intermediate layer insulator film and the upper layer insulator film have openings for exposing the piezoelectric elements.
摘要翻译：公开了一种喷墨头，其包括具有液滴排出孔的各个液室; 振荡板; 通过在振荡板上层叠下电极，压电材料和上电极而形成的压电元件，其中下电极是公共电极，上电极是单独电极; 连接到下电极的公共电极布线; 以及连接到压电元件的相应上电极的单独电极配线，其中驱动信号被单独输入到相应的单独电极布线。喷墨头还包括上层绝缘膜; 中间层绝缘膜; 和下层绝缘膜。中间层绝缘膜和上层绝缘膜具有用于使压电元件露出的开口。

10. 发明授权

US09385298B2 Electromechanical conversion element, liquid drop discharge head and image forming apparatus 有权
标题翻译：机电转换元件，液滴排出头和成像设备
公开(公告)号：US09385298B2
公开(公告)日：2016-07-05
申请号：US14867350
申请日：2015-09-28
申请人： Satoshi Mizukami , Takahiko Kuroda , Masahiro Ishimori
发明人： Satoshi Mizukami , Takahiko Kuroda , Masahiro Ishimori
IPC分类号： B41J2/045 , H01L41/08 , H01L41/18 , B41J2/14 , H01L41/083
CPC分类号： B41J2/14233 , B41J2/14201 , B41J2/14274 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2202/03 , H01L41/08 , H01L41/0815 , H01L41/083 , H01L41/0831 , H01L41/0973 , H01L41/1876 , H01L41/318
摘要： An electromechanical conversion element includes a lower electrode formed directly or indirectly on a substrate or a base film; an electromechanical conversion film formed on the lower electrode and including a piezoelectric body having a perovskite crystal structure preferentially oriented with a {n00} plane where n is a positive integer; and an upper electrode formed on the electromechanical conversion film. A diffraction peak at a position 2θ at which a diffraction intensity has a maximum value and which corresponds to a (X00) plane or a (00X) plane, X being 1 or 2, obtained by θ-2θ measurement in X-ray diffraction measurement, shows a trapezoidal peak shape and has two or more bending points.
摘要翻译：机电转换元件包括直接或间接地形成在基板或基膜上的下电极; 一种机电转换膜，形成在下电极上并且包括具有优先取向为{n00}面的钙钛矿晶体结构的压电体，其中n为正整数; 以及形成在机电转换膜上的上电极。位置2处的衍射峰; 其中衍射强度具有最大值并且对应于（X00）面或（00X）面，X为1或2，由＆thetas获得; -2＆thetas; X射线衍射测量中的测量显示梯形峰形，并具有两个或多个弯曲点。

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