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1. 发明授权

US10786988B2 Electromechanical transducer element, method of producing the element, liquid discharge head incorporating the element, and liquid discharge apparatus incorporating the head 有权
公开(公告)号：US10786988B2
公开(公告)日：2020-09-29
申请号：US15668839
申请日：2017-08-04
申请人： Atsushi Takeuchi , Osamu Machida , Akira Shimofuku , Shuya Abe , Masahiro Ishimori , Takuma Hirabayashi
发明人： Atsushi Takeuchi , Osamu Machida , Akira Shimofuku , Shuya Abe , Masahiro Ishimori , Takuma Hirabayashi
IPC分类号： H01L41/047 , H01L41/09 , B41J2/14 , B41J2/16 , H01L41/08 , H01L41/29 , H01L41/318
摘要： An electromechanical transducer element includes a first electrode on a substrate, an electromechanical transducer film on the first electrode, and a second electrode on the electromechanical transducer film. The electromechanical transducer film includes a thin line pattern. The thin line pattern includes a plurality of thin lines that are spaced away from each other.

2. 发明授权

US10150293B2 Electromechanical transducer element, method for producing electromechanical transducer element, liquid ejecting head, liquid ejecting unit, and apparatus for ejecting liquid 有权
公开(公告)号：US10150293B2
公开(公告)日：2018-12-11
申请号：US15405714
申请日：2017-01-13
申请人： Osamu Machida , Masahiro Ishimori , Atsushi Takeuchi , Shuya Abe
发明人： Osamu Machida , Masahiro Ishimori , Atsushi Takeuchi , Shuya Abe
IPC分类号： B41J2/14 , H01L41/08 , H01L41/09 , H01L41/29 , H01L41/331 , B41J2/16
摘要： An electromechanical transducer element includes a first electrode; an electromechanical transducer film stacked on one surface of the first electrode; a second electrode stacked on the electromechanical transducer film; and wiring formed on the second electrode. In an at least one cross section, each of a boundary, on a second electrode side, of the electromechanical transducer film and a boundary, on a side opposite to the electromechanical transducer film, of the second electrode is a curved shape protruding away from the first electrode. In the at least one cross section, each of a film thickness of the electromechanical transducer film and a film thickness of the second electrode becomes thinner toward end portions from a maximum height portion.

3. 发明申请

US20150070444A1 PIEZOELECTRIC ACTUATOR, FLUID DISCHARGE HEAD, AND IMAGE FORMING DEVICE 审中-公开
标题翻译：压电致动器，流体放电头和图像形成装置
公开(公告)号：US20150070444A1
公开(公告)日：2015-03-12
申请号：US14469700
申请日：2014-08-27
申请人： Masahiro Ishimori , Manabu Nishimura , Masaru Shinkai , Keiji UEDA , Tsutoh Aoyama , Toshiaki Masuda
发明人： Masahiro Ishimori , Manabu Nishimura , Masaru Shinkai , Keiji UEDA , Tsutoh Aoyama , Toshiaki Masuda
IPC分类号： H01L41/047 , H01L41/25 , B41J2/175 , H01L41/09 , B41J2/14
CPC分类号： H01L41/0477 , B41J2/14233 , B41J2/17503 , B41J2/17553 , B41J2202/03 , B82Y15/00 , H01L41/0815 , H01L41/1876 , H01L41/318 , Y10S977/837 , Y10T29/42
摘要： A piezoelectric actuator includes a vibrating plate, a lower electrode provided on the vibrating plate, including a platinum film and a titanium oxide film formed on the platinum film, a piezoelectric thin film provided on the lower electrode, and an upper electrode provided on the piezoelectric thin film, in which the titanium oxide film is provided between the platinum film and the piezoelectric thin film.
摘要翻译：压电致动器包括振动板，设置在振动板上的下电极，包括铂膜和形成在铂膜上的氧化钛膜，设置在下电极上的压电薄膜和设置在压电元件上的上电极薄膜，其中氧化钛膜设置在铂膜和压电薄膜之间。

4. 发明授权

US08896132B2 Electronic device and fabrication method thereof 有权
标题翻译：电子器件及其制造方法
公开(公告)号：US08896132B2
公开(公告)日：2014-11-25
申请号：US13703810
申请日：2010-06-21
申请人： Naoki Noda , Mitsuru Koarai , Toshio Yokouchi , Masahiro Ishimori
发明人： Naoki Noda , Mitsuru Koarai , Toshio Yokouchi , Masahiro Ishimori
IPC分类号： H01L23/52 , H01L21/30 , H01L23/538 , B81C1/00 , H01L21/02
CPC分类号： H01L23/5384 , B81B2207/012 , B81C1/00238 , B81C2203/035 , H01L21/02 , H01L2924/0002 , H01L2924/00
摘要： An electronic device 1 has a first semiconductor substrate 2 on which a bonding projection section 42 is projected via an insulation film 41, a second semiconductor substrate 3 that is bonded by welding the bonding projection section 42 of the first semiconductor substrate 2 via conductive bonding material, a through hole 54 that is formed to penetrate the bonding projection section 42 and the insulation film 41 in a bonding direction, and a conduction wiring section 44 that is formed by the conductive bonding material filled in the through hole 54 at a time of bonding by welding and conducts the first semiconductor substrate 2 with the second semiconductor substrate 3 to have same electric potential.
摘要翻译：电子设备1具有第一半导体基板2，第一半导体基板2经由绝缘膜41突出接合投影部42，第二半导体基板3通过经由导电接合材料焊接第一半导体基板2的接合突起部42而被接合形成为在接合方向上贯通接合突起部42和绝缘膜41的通孔54以及在接合时由填充在通孔54中的导电性接合材料形成的导电配线部44 通过焊接并将第一半导体衬底2与第二半导体衬底3导通以具有相同的电位。

5. 发明授权

US08089851B2 Driving apparatus and recording/reproducing apparatus 失效
标题翻译：驱动装置和记录/再现装置
公开(公告)号：US08089851B2
公开(公告)日：2012-01-03
申请号：US12439038
申请日：2006-09-01
申请人： Kenjiro Fujimoto , Shuntaro Mori , Masahiro Ishimori , Takanori Maeda
发明人： Kenjiro Fujimoto , Shuntaro Mori , Masahiro Ishimori , Takanori Maeda
IPC分类号： G11B7/00
CPC分类号： G11B9/1436 , B82Y10/00 , G11B9/02
摘要： A driving apparatus (1) is provided with: a fixed part (11) having a fixed-part plane (12); and a driven part (13) having a driven-part plane (14), which faces the fixed-part plane, and driven in a direction substantially parallel to the fixed-part plane, a liquid lubricant (30) is between the fixed-portion plane and the driven-part plane, the driven-part plane faces the fixed-part plane such that the driven-part plane is substantially parallel to the fixed-part plane.
摘要翻译：驱动装置（1）具有：具有固定部分平面（12）的固定部分（11）; 和具有从动部件平面（14）的被驱动部件（13），所述被驱动部件平面（14）面向固定部件平面，并且沿大致平行于固定部件平面的方向被驱动，液体润滑剂（30）从动部件平面面向固定部件平面，使得从动部件平面基本上平行于固定部件平面。

6. 发明申请

US20100110849A1 INFORMATION RECORDING/REPRODUCING DEVICE AND METHOD 审中-公开
标题翻译：信息记录/再现装置和方法
公开(公告)号：US20100110849A1
公开(公告)日：2010-05-06
申请号：US12531756
申请日：2007-03-19
申请人： Takanori Maeda , Tomotaka Yabe , Hirokazu Takahashi , Masahiro Ishimori , Jun Suzuki
发明人： Takanori Maeda , Tomotaka Yabe , Hirokazu Takahashi , Masahiro Ishimori , Jun Suzuki
IPC分类号： G11B7/12
CPC分类号： G11B9/02 , G11B9/1436
摘要： An information recording/reproducing device includes with a recording medium having a recording surface and a probe array in which a plurality of probes are disposed in a direction intersecting at least a track direction for carrying out either the record processing or the reproduction processing of information by scanning a plurality of information tracks in parallel with the track direction along the rack direction on the recording surface. One of the recording medium and the probe array is divided into a plurality of divided portions in the intersecting direction, so that each of them is configured to include at least one information track or probe. The information recording/reproducing device also includes a first driving element for driving each of the plural portions divided in the intersecting direction and a second driving element for driving each of the probe arrays in the track direction with respect to the recording surface.
摘要翻译：一种信息记录/再现装置，包括具有记录表面和探针阵列的记录介质，其中多个探针沿至少一个轨道方向相交的方向设置，用于执行信息的记录处理或再现处理沿着记录表面上的齿条方向沿轨道方向平行地扫描多条信息轨道。记录介质和探针阵列中的一个在交叉方向被分成多个分割部分，使得它们中的每一个被配置为包括至少一个信息轨道或探针。信息记录/再现装置还包括用于驱动在交叉方向上划分的多个部分中的每一个的第一驱动元件和用于相对于记录表面沿轨道方向驱动每个探针阵列的第二驱动元件。

7. 发明申请

US20170306471A1 ELECTROMECHANICAL TRANSDUCER, SENSOR, ACTUATOR, METHODS OF PRODUCING ELECTROMECHANICAL TRANSDUCER, SENSOR, AND ACTUATOR, LIQUID DISCHARGE HEAD, LIQUID DISCHARGE DEVICE, AND LIQUID DISCHARGE APPARATUS 审中-公开
公开(公告)号：US20170306471A1
公开(公告)日：2017-10-26
申请号：US15491354
申请日：2017-04-19
申请人： Shuya ABE , Osamu MACHIDA , Masahiro ISHIMORI , Takuma HIRABAYASHI
发明人： Shuya ABE , Osamu MACHIDA , Masahiro ISHIMORI , Takuma HIRABAYASHI
IPC分类号： C23C14/16 , B41J2/14 , B41J2/16
摘要： There is provided a method of producing an electromechanical transducer that includes a plurality of electromechanical transducer elements on a substrate. The method includes forming a plurality of individual electrodes corresponding to the plurality of electromechanical transducer elements on the substrate, forming an insulation film to cover the plurality of individual electrodes on the substrate, forming a conductive film on the insulation film, forming a plurality of openings to expose the plurality of individual electrodes in each of the insulation film and the conductive film, and forming a plurality of electromechanical transducer films on the plurality of individual electrodes exposed in the plurality of openings.

8. 发明授权

US08592285B2 Method of bonding semiconductor substrate and MEMS device 有权
标题翻译：半导体衬底和MEMS器件的接合方法
公开(公告)号：US08592285B2
公开(公告)日：2013-11-26
申请号：US13513055
申请日：2009-12-11
申请人： Naoki Noda , Toshio Yokouchi , Masahiro Ishimori
发明人： Naoki Noda , Toshio Yokouchi , Masahiro Ishimori
IPC分类号： H01L29/84
CPC分类号： B81C1/00269 , B23K20/023 , B23K20/16 , B23K20/233 , B23K2101/40 , B81B2201/0235 , B81C2203/0118 , B81C2203/019 , B81C2203/035
摘要： A method of bonding a semiconductor substrate has a step of pressurizing and heating to bond a substrate 11 with a substrate 12 by eutectic bonding in a state that an aluminum containing layer 31 and a germanium layer 32 between a bonding section 30a of the substrate 11 and a bonding section 30b of the substrate 21 are overlaid and an outer end 32a of the germanium layer 32 is receded inward with respect to an outer end 31a of the aluminum containing layer 31.
摘要翻译：接合半导体衬底的方法具有加压和加热的步骤，通过共晶接合将基板11与基板12接合，在基板11的接合部分30a和基板11的接合部分30a之间的含铝层32和锗层32的状态覆盖基板21的接合部30b，锗层32的外端32a相对于含铝层31的外端31a向内侧退缩。

9. 发明申请

US20130250009A1 ELECTROMECHANICAL CONVERSION ELEMENT, MANUFACTURING METHOD THEREOF, PIEZOELECTRIC TYPE ACTUATOR, LIQUID DROPLET JETTING HEAD, AND INKJET RECORDING APPARATUS 有权
标题翻译：电动转换元件及其制造方法，压电类型执行器，液滴喷射头和喷墨记录装置
公开(公告)号：US20130250009A1
公开(公告)日：2013-09-26
申请号：US13848243
申请日：2013-03-21
申请人： Masahiro Ishimori , Masaru SHINKAI , Satoshi MIZUKAMI , Takahiko KURODA
发明人： Masahiro Ishimori , Masaru SHINKAI , Satoshi MIZUKAMI , Takahiko KURODA
IPC分类号： H01L41/08 , B41J2/045 , H01L41/09
CPC分类号： H01L41/0805 , B41J2/045 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2/1645 , B41J2/1646 , H01L41/0478 , H01L41/0815 , H01L41/0973 , H01L41/29 , H01L41/318
摘要： An electromechanical conversion element for converting an electric signal into mechanical displacement or converting mechanical displacement into an electric signal, includes a bottom electrode in which an alumina film, a metal film, and a conductive oxide film are sequentially laminated; an electromechanical conversion film disposed on the conductive oxide film of the bottom electrode; and a top electrode disposed on the electromechanical conversion film, wherein the metal film is solid.
摘要翻译：一种用于将电信号转换为机械位移或将机械位移转换为电信号的机电转换元件包括：底电极，其中氧化铝膜，金属膜和导电氧化膜依次层叠; 设置在底电极的导电氧化膜上的机电转换膜; 以及设置在所述机电转换膜上的顶部电极，其中所述金属膜是固体的。

10. 发明申请

US20130250007A1 PIEZOELECTRIC THIN FILM ELEMENT AND METHOD OF MANUFACTURING THE SAME, DROPLET DISCHARGE HEAD AND INKJET RECORDING DEVICE USING THE PIEZOELECTRIC THIN FILM ELEMENT 有权
标题翻译：压电薄膜元件及其制造方法，使用压电薄膜元件的喷射头放电头和喷墨记录装置
公开(公告)号：US20130250007A1
公开(公告)日：2013-09-26
申请号：US13835987
申请日：2013-03-15
申请人： Masahiro Ishimori , Masaru Shinkai , Satoshi Mizukami
发明人： Masahiro Ishimori , Masaru Shinkai , Satoshi Mizukami
IPC分类号： H01L41/047 , B41J2/045 , H01L41/314 , H01L41/09
CPC分类号： H01L41/0477 , B41J2/045 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14241 , B41J2202/03 , H01L41/0478 , H01L41/0973 , H01L41/29 , H01L41/314 , H01L41/318
摘要： A piezoelectric thin film element includes a vibration plate, a lower electrode provided on the vibration plate and made of a conductive oxide, a piezoelectric thin film provided on the lower electrode and made of a polycrystalline substance, and an upper electrode provided on the piezoelectric thin film, wherein the lower electrode includes a titanium oxide film formed on the vibration plate, a platinum film formed on the titanium oxide film, and a conductive oxide film formed on the platinum film and, the platinum film and the conductive oxide film being a solid film with no holes.
摘要翻译：压电薄膜元件包括振动板，设置在振动板上并由导电氧化物制成的下电极，设置在下电极上并由多晶物质制成的压电薄膜，以及设置在压电薄片上的上电极膜，其中所述下电极包括形成在所述振动板上的氧化钛膜，形成在所述氧化钛膜上的铂膜和形成在所述铂膜上的导电氧化膜，并且所述铂膜和所述导电氧化物膜为固体没有孔的电影。

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