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    • 1. 发明授权
    • Resonant device, communication module, communication device, and method for manufacturing resonant device
    • 共振装置,通信模块,通信装置及谐振装置的制造方法
    • US08222970B2
    • 2012-07-17
    • US12503558
    • 2009-07-15
    • Kazunori InoueTokihiro NishiharaTakashi MatsudaShinji Taniguchi
    • Kazunori InoueTokihiro NishiharaTakashi MatsudaShinji Taniguchi
    • H03H9/54H03H9/70
    • H03H3/04H03H9/02133H03H9/583H03H9/588H03H2003/023
    • A resonant device includes first and second piezoelectric thin film resonators. The first piezoelectric thin film resonator includes a substrate, a first lower electrode formed on the substrate, a first piezoelectric film formed over the first lower electrode, and a first upper electrode formed on the piezoelectric film and opposed to the first lower electrode. The second piezoelectric thin film resonator includes a second lower electrode formed above the first upper electrode, a second piezoelectric film formed over the second lower electrode, and a second upper electrode formed on the piezoelectric film and opposed to the second lower electrode. The first membrane region in which the first lower electrode opposes to the first upper electrode through the first piezoelectric film and a second membrane region in which the second lower electrode opposes to the second upper electrode through the second piezoelectric film are laminated through a second cavity.
    • 谐振装置包括第一和第二压电薄膜谐振器。 第一压电薄膜谐振器包括基板,形成在基板上的第一下电极,形成在第一下电极上的第一压电膜,以及形成在压电膜上并与第一下电极相对的第一上电极。 第二压电薄膜谐振器包括形成在第一上电极上的第二下电极,形成在第二下电极上的第二压电薄膜和形成在压电薄膜上并与第二下电极相对的第二上电极。 其中第一下部电极通过第一压电膜与第一上部电极相对的第一膜区域和通过第二压电膜将第二下部电极与第二上部电极相对的第二膜区域通过第二腔层叠。