会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明授权
    • Trench dual-gate MOSFET
    • 沟槽双栅极MOSFET
    • US4975754A
    • 1990-12-04
    • US373059
    • 1989-06-29
    • Hidemi IshiuchiToshiharu WatanabeKinuyo Tanaka
    • Hidemi IshiuchiToshiharu WatanabeKinuyo Tanaka
    • H01L29/78
    • H01L29/7827H01L29/7831
    • A trench dual-gate MOSFET comprises a projection which is bent to enclose a predetermined region on a semiconductor substrate of a first conductivity type. This projection is defined by a trench formed by selectively removing the surface region of the semiconductor substrate. A gate insulation film is formed on the side wall of the projection and on the semiconductor substrate portion located around the base of the projection. A gate electrode is formed on the side wall of the projection and on the semiconductor substrate portion located around the base of the projection, with the gate insulation film interposed and in a manner to surround the projection. A first impurity region of a second conductivity type, which serves as either a source or drain region, is formed in the top portion of the projection. A second impurity region of the second conductivity, which serves as either a drain or source region, is formed in the surface region of that portion of the semiconductor substrate which is located around the base of the projection.
    • 沟槽双栅极MOSFET包括弯曲以包围第一导电类型的半导体衬底上的预定区域的突起。 该突起由通过选择性地去除半导体衬底的表面区域形成的沟槽限定。 在突起的侧壁和位于突起的基部周围的半导体基板部分上形成栅极绝缘膜。 在突起的侧壁和位于突起的基部周围的半导体基板部分上形成有栅电极,栅极绝缘膜以介于突起的方式插入。 在突起的顶部形成有用作源极或漏极区域的第二导电类型的第一杂质区域。 第二导电性的第二杂质区域,其用作漏极或源极区域,形成在半导体衬底的位于突起的基部周围的部分的表面区域中。