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1. 发明授权

US07245366B2 Surface inspection method and surface inspection apparatus 失效
标题翻译：表面检查方法和表面检查装置
公开(公告)号：US07245366B2
公开(公告)日：2007-07-17
申请号：US10864062
申请日：2004-06-09
申请人： Kazuhiro Miyakawa , Yoichiro Iwa , Akihiko Sekine
发明人： Kazuhiro Miyakawa , Yoichiro Iwa , Akihiko Sekine
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/4738 , G01N21/94
摘要： A surface inspection apparatus includes an LD (10 for emitting a laser beam (L0), an irradiation optical system for entering the emitted laser beam (L0) onto an inspection surface (210) of a wafer at predetermined depression angle (α), a scanning device (30) to displace the wafer (200) in order for the laser beam (L0) scans the inspection surface (210) in a spiral, an light intensity detecting device (50) to detect light intensity, and a scattered light detecting optical system (40) for guiding scattered light (L2) emitted from an irradiation area (220) in which the laser beam (L0) is entered. The light intensity detecting device (50) includes a multianode PMT (51) for detecting the light intensity by decomposing the scattered light (L2) into 10 channels (ch) in a one-dimensional direction (Y axis direction).
摘要翻译：表面检查装置包括：LD（10），用于发射激光束（L 0）;照射光学系统，用于以预定的下降角（α）将发射的激光束（L 0）输入到晶片的检查表面（210），扫描装置（30），用于使激光束（L 0）以螺旋扫描检查表面（210），光强度检测装置（50）以检测光强度，以及散射光检测光学系统（40），用于引导从其中输入激光束（L 0）的照射区域（220）发射的散射光（L 2），光强度检测装置（50）包括多重点阵PMT ）用于通过在一维方向（Y轴方向）上将散射光（L 2）分解为10个通道（ch）来检测光强度。

2. 发明授权

US07227649B2 Surface inspection apparatus 失效
标题翻译：表面检查装置
公开(公告)号：US07227649B2
公开(公告)日：2007-06-05
申请号：US11274248
申请日：2005-11-16
申请人： Kazuhiro Miyakawa , Yoichiro Iwa
发明人： Kazuhiro Miyakawa , Yoichiro Iwa
IPC分类号： G01B11/28 , G01J4/04
CPC分类号： G01B11/0641
摘要： A surface inspection apparatus (100) comprises a light (10) source for emitting a light beam L0, an optical illumination system (30) for projecting the light beam on an inspected surface (220) formed by a film 210, an optical detection system (50) having lenses to spatially split reflection lights and an aperture stop (60) having apertures disposed with polarization elements (61–64) for transilluminating mutually different polarized light components, a light intensity detection device (41–44) for individually detecting the light intensities of the respective reflection lights passed through the respective polarization elements, a scanning device (20), and an arithmetic processing device (70) for detecting the polarization conditions of the respective reflection lights and obtaining a film thickness of the film and at least one of the physical properties of the film.
摘要翻译：表面检查装置（100）包括用于发射光束L 0的光（10）源，用于将光束投射在由膜210形成的检查表面（220）上的光学照明系统（30），光学检测具有用于空间分离反射光的透镜的系统（50）和具有设置有用于透射相互不同的偏振光分量的偏振元件（61-64）的孔的孔径光阑（60），用于单独检测的光强度检测装置通过各个偏振元件的各反射光的光强度，扫描装置（20）和运算处理装置（70），用于检测各反射光的偏振状态，并获得薄膜的膜厚，电影的物理属性中最少的一个。

3. 发明授权

US07154597B2 Method for inspecting surface and apparatus for inspecting it 失效
标题翻译：表面检查方法及检查仪器
公开(公告)号：US07154597B2
公开(公告)日：2006-12-26
申请号：US10879856
申请日：2004-06-29
申请人： Kazuhiro Miyakawa , Yoichiro Iwa , Akihiko Sekine
发明人： Kazuhiro Miyakawa , Yoichiro Iwa , Akihiko Sekine
IPC分类号： G01N21/00
CPC分类号： G01N21/47 , G01N21/94 , G01N21/9501 , G01N21/95623
摘要： A method for inspecting a surface, including entering a predetermined luminous flux at a predetermined incident angle in an inspected surface of an inspection object which is an object of a surface inspection, displaying relatively at least one of the luminous flux and the inspection object so that the luminous flux scans upon the inspected surface, decomposing spatially light intensity of scattered light reflected on an area of the inspected surface entering the luminous flux into a plurality of channels with respect to an one-dimensional direction corresponding to a predetermined direction in the area of the inspected surface entering the light flux, performing inspection of the inspected surface by detecting individually light intensity of each of the decomposed scattered lights obtained by the decomposition, and increasing uniformity of light intensity distribution with respect to at least the predetermined direction in the area of the inspected surface in which the luminous flux is entered.
摘要翻译：一种用于检查表面的方法，包括在作为表面检查对象的检查对象的检查表面中以预定入射角输入预定光束，相对地显示光通量和检查对象中的至少一个，使得在受检表面上扫描光通量，将进入光通量的被检查面的区域上反射的散射光的空间光强度分解为相对于与该预定方向相对应的一定方向的多个通道检查面进入光束，通过检测通过分解获得的每个分解的散射光的单独的光强度来检查被检查的表面，并且在至少预定方向上的光强度分布的均匀性相对于其中光通量i的检查表面进入。

4. 发明申请

US20060132769A1 Particle monitoring apparatus and vacuum processing apparatus 有权
标题翻译：粒子监测装置和真空处理装置
公开(公告)号：US20060132769A1
公开(公告)日：2006-06-22
申请号：US11271945
申请日：2005-11-14
申请人： Yoichiro Iwa , Kazuhiro Miyakawa , Susumu Saito
发明人： Yoichiro Iwa , Kazuhiro Miyakawa , Susumu Saito
IPC分类号： G01N15/02
CPC分类号： G01N15/1434 , G01N2015/1486 , G01N2015/1493
摘要： A particle monitoring apparatus comprises: a light source configured to emit a light having a given intensity; a projecting optical system configured to converting the light emitted from the light source into a band-shaped light flux and to lead the light flux onto a flow passage of a given gas stream so that the given gas stream may pass the band-shaped light flux; a light detector configured to detect the intensity of the light: a detecting optical system configured to lead the light scattered by particles contained in the gas stream and passing the light flux to the light detector, and a particle detector configured to determine sizes of the particles passing the light flux based on intensities of the scattered lights detected by the light detector and to count the number of the particles passing the light flux for a given period, wherein the light intensity of the band-shaped light flux is set to have an almost uniform distribution in a horizontal direction.
摘要翻译：粒子监测装置包括：被配置为发射具有给定强度的光的光源; 投影光学系统，被配置为将从光源发射的光转换成带状光束并且将光束引导到给定气流的流动通道上，使得给定的气流可以通过带状光通量 ; 被配置为检测光的强度的光检测器;检测光学系统，被配置为引导由气流中包含的颗粒散射的光并将光通量传递到光检测器;以及粒子检测器，被配置为确定粒子的尺寸基于由光检测器检测到的散射光的强度使光束通过，并计算通过光通量的粒子的数量达到给定的周期，其中，将带状光通量的光强度设定为几乎在水平方向均匀分布。

5. 发明申请

US20050270522A1 Surface inspection apparatus 失效
标题翻译：表面检查装置
公开(公告)号：US20050270522A1
公开(公告)日：2005-12-08
申请号：US11135478
申请日：2005-05-24
申请人： Kazuhiro Miyakawa , Yoichiro Iwa , Akihiko Sekine
发明人： Kazuhiro Miyakawa , Yoichiro Iwa , Akihiko Sekine
IPC分类号： G01B11/30 , G01B11/02 , G01B11/16 , G01N21/88 , G01N21/95 , G01N21/956
CPC分类号： G01B11/306 , G01N21/9501
摘要： A surface inspection apparatus of the present invention includes an irradiation optical unit having a multibeam irradiation optical unit for converging and irradiating multiple beams upon a surface of an object to be inspected; a detector which has a light-condensing optical unit including light-sensitive elements for respectively receiving the multiple beams reflected by the surface of the inspecting object; and a processor which obtains a plane-coordinate-position of a position to be irradiated and detected at a reference height position based on a difference between light-receiving reference positions of each of the light-sensitive elements when assumed that the irradiated and detected position of the inspecting object is at the reference height position and actual light-receiving positions of each of the light-sensitive elements, according to a result of analysis and process of surface state information.
摘要翻译：本发明的表面检查装置包括具有多光束照射光学单元的照射光学单元，用于会聚并照射被检测物体的表面上的多个光束; 具有聚光光学单元的检测器，所述聚光光学单元包括用于分别接收由检查对象的表面反射的多个光束的光敏元件; 以及处理器，其基于每个感光元件的光接收基准位置之间的差异，当假设被照射和检测位置时，获得要在基准高度位置处被照射和检测的位置的平面坐标位置根据分析结果和表面状态信息的处理，检查对象的基准高度位置和每个感光元件的实际光接收位置。

6. 发明授权

US07477373B2 Surface inspection method and surface inspection device 失效
标题翻译：表面检查方法和表面检查装置
公开(公告)号：US07477373B2
公开(公告)日：2009-01-13
申请号：US11725849
申请日：2007-03-20
申请人： Kazuhiro Miyakawa , Yoichiro Iwa
发明人： Kazuhiro Miyakawa , Yoichiro Iwa
IPC分类号： G01N21/00
CPC分类号： G01N21/94 , G01N21/8806 , G01N21/9501 , G01N2021/887
摘要： A surface inspection method for projecting a laser beam to an inspection surface and for scanning and detecting foreign objects or the like on the inspection surface, comprising a step of being had a required number of detecting regions by a photodetector against a projecting site of the laser beam, a step of receiving a detection light at the photodetector so that a detection light intensity is varied between the detecting regions, a step of acquiring a required number of output signals with different detection light intensities on an inspection site, and a step of selecting an output signal which is an unsaturated output signal and has the highest value among the required number of output signals as a surface detection signal.
摘要翻译：一种表面检查方法，用于将激光束投射到检查表面并用于在检查表面上扫描和检测异物等，包括通过光电检测器对激光的突出部位具有所需数量的检测区域的步骤在所述光电检测器处接收检测光的步骤，使得检测区域之间的检测光强度变化，在检查部位获取具有不同检测光强度的所需数量的输出信号的步骤，以及选择步骤作为不饱和输出信号的输出信号，并且在作为表面检测信号的输出信号的所需数量中具有最高值。

7. 发明授权

US07348585B2 Surface inspection apparatus 失效
标题翻译：表面检查装置
公开(公告)号：US07348585B2
公开(公告)日：2008-03-25
申请号：US11135478
申请日：2005-05-24
申请人： Kazuhiro Miyakawa , Yoichiro Iwa , Akihiko Sekine
发明人： Kazuhiro Miyakawa , Yoichiro Iwa , Akihiko Sekine
IPC分类号： G01N21/86
CPC分类号： G01B11/306 , G01N21/9501
摘要： A surface inspection apparatus of the present invention includes an irradiation optical unit having a multibeam irradiation optical unit for converging and irradiating multiple beams upon a surface of an object to be inspected; a detector which has a light-condensing optical unit including light-sensitive elements for respectively receiving the multiple beams reflected by the surface of the inspecting object; and a processor which obtains a plane-coordinate-position of a position to be irradiated and detected at a reference height position based on a difference between light-receiving reference positions of each of the light-sensitive elements when assumed that the irradiated and detected position of the inspecting object is at the reference height position and actual light-receiving positions of each of the light-sensitive elements, according to a result of analysis and process of surface state information.
摘要翻译：本发明的表面检查装置包括具有多光束照射光学单元的照射光学单元，用于会聚并照射被检测物体的表面上的多个光束; 具有聚光光学单元的检测器，所述聚光光学单元包括用于分别接收由检查对象的表面反射的多个光束的光敏元件; 以及处理器，其基于每个感光元件的光接收基准位置之间的差异，当假设被照射和检测位置时，获得要在基准高度位置处被照射和检测的位置的平面坐标位置根据分析结果和表面状态信息的处理，检查对象的基准高度位置和每个感光元件的实际光接收位置。

8. 发明授权

US07417732B2 Particle monitoring apparatus and vacuum processing apparatus 有权
标题翻译：粒子监测装置和真空处理装置
公开(公告)号：US07417732B2
公开(公告)日：2008-08-26
申请号：US11271945
申请日：2005-11-14
申请人： Yoichiro Iwa , Kazuhiro Miyakawa , Susumu Saito
发明人： Yoichiro Iwa , Kazuhiro Miyakawa , Susumu Saito
IPC分类号： G01N15/02
CPC分类号： G01N15/1434 , G01N2015/1486 , G01N2015/1493
摘要： A particle monitoring apparatus including a light source configured to emit plural light fluxes, a projecting optical system configured to convert the plural light fluxes into a band-shaped light flux, to lead the band-shaped light flux into a flow passage of a given gas stream, and to partially superpose the plural light fluxes to form a substantially uniform light intensity distribution of the band-shaped light flux in a widthwise direction; a light detector configured to detect intensity of light; and a particle detector configured to determine sizes of the particles passing the light flux based on intensities of the scattered lights detected by the light detector and to count the number of the particles.
摘要翻译：一种粒子监测装置，包括配置为发射多个光束的光源，投影光学系统，被配置为将多个光束转换成带状光束，以将带状光束引导到给定气体的流路中并且部分地叠加多个光束以在宽度方向上形成带状光通量的基本上均匀的光强度分布; 光检测器，被配置为检测光的强度; 以及粒子检测器，被配置为基于由光检测器检测到的散射光的强度来确定通过光通量的粒子的尺寸，并对粒子的数量进行计数。

9. 发明申请

US20070229813A1 Surface inspection method and surface inspection device 失效
标题翻译：表面检查方法和表面检查装置
公开(公告)号：US20070229813A1
公开(公告)日：2007-10-04
申请号：US11725849
申请日：2007-03-20
申请人： Kazuhiro Miyakawa , Yoichiro Iwa
发明人： Kazuhiro Miyakawa , Yoichiro Iwa
IPC分类号： G01N21/88 , G01N21/00
CPC分类号： G01N21/94 , G01N21/8806 , G01N21/9501 , G01N2021/887
摘要： A surface inspection method for projecting a laser beam to an inspection surface and for scanning and detecting foreign objects or the like on the inspection surface, comprising a step of being had a required number of detecting regions by a photodetector against a projecting site of the laser beam, a step of receiving a detection light at the photodetector so that a detection light intensity is varied between the detecting regions, a step of acquiring a required number of output signals with different detection light intensities on an inspection site, and a step of selecting an output signal which is an unsaturated output signal and has the highest value among the required number of output signals as a surface detection signal.
摘要翻译：一种表面检查方法，用于将激光束投射到检查表面并用于在检查表面上扫描和检测异物等，包括通过光电检测器对激光的突出部位具有所需数量的检测区域的步骤在所述光电检测器处接收检测光的步骤，使得检测区域之间的检测光强度变化，在检查部位获取具有不同检测光强度的所需数量的输出信号的步骤，以及选择步骤作为不饱和输出信号的输出信号，并且在作为表面检测信号的输出信号的所需数量中具有最高值。

10. 发明申请

US20060103856A1 Surface inspection apparatus 失效
标题翻译：表面检查装置
公开(公告)号：US20060103856A1
公开(公告)日：2006-05-18
申请号：US11274248
申请日：2005-11-16
申请人： Kazuhiro Miyakawa , Yoichiro Iwa
发明人： Kazuhiro Miyakawa , Yoichiro Iwa
IPC分类号： G01B11/28
CPC分类号： G01B11/0641
摘要： A surface inspection apparatus (100) comprises a light (10) source for emitting a light beam L0, an optical illumination system (30) for projecting the light beam on an inspected surface (220) formed by a film 210, an optical detection system (50) having lenses to spatially split reflection lights and an aperture stop (60) having apertures disposed with polarization elements (61-64) for transilluminating mutually different polarized light components, a light intensity detection device (41-44) for individually detecting the light intensities of the respective reflection lights passed through the respective polarization elements, a scanning device (20), and an arithmetic processing device (70) for detecting the polarization conditions of the respective reflection lights and obtaining a film thickness of the film and at least one of the physical properties of the film.
摘要翻译：表面检查装置（100）包括用于发射光束L 0的光（10）源，用于将光束投射在由膜210形成的检查表面（220）上的光学照明系统（30），光学检测具有用于空间分离反射光的透镜的光学系统（50）和具有设置有用于透射相互不同的偏振光分量的偏振元件（61-64）的孔的孔径光阑（60），用于单独检测通过各个偏振元件的各反射光的光强度，扫描装置（20）和运算处理装置（70），用于检测各反射光的偏振状态，并获得薄膜的膜厚，电影的物理属性中最少的一个。

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