会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • Surface inspection method and surface inspection device
    • 表面检查方法和表面检查装置
    • US07477373B2
    • 2009-01-13
    • US11725849
    • 2007-03-20
    • Kazuhiro MiyakawaYoichiro Iwa
    • Kazuhiro MiyakawaYoichiro Iwa
    • G01N21/00
    • G01N21/94G01N21/8806G01N21/9501G01N2021/887
    • A surface inspection method for projecting a laser beam to an inspection surface and for scanning and detecting foreign objects or the like on the inspection surface, comprising a step of being had a required number of detecting regions by a photodetector against a projecting site of the laser beam, a step of receiving a detection light at the photodetector so that a detection light intensity is varied between the detecting regions, a step of acquiring a required number of output signals with different detection light intensities on an inspection site, and a step of selecting an output signal which is an unsaturated output signal and has the highest value among the required number of output signals as a surface detection signal.
    • 一种表面检查方法,用于将激光束投射到检查表面并用于在检查表面上扫描和检测异物等,包括通过光电检测器对激光的突出部位具有所需数量的检测区域的步骤 在所述光电检测器处接收检测光的步骤,使得检测区域之间的检测光强度变化,在检查部位获取具有不同检测光强度的所需数量的输出信号的步骤,以及选择步骤 作为不饱和输出信号的输出信号,并且在作为表面检测信号的输出信号的所需数量中具有最高值。
    • 3. 发明申请
    • Ophthalmologic apparatus
    • 眼科仪器
    • US20080151189A1
    • 2008-06-26
    • US12003011
    • 2007-12-19
    • Yoichiro IwaGaku TakeuchiTakao Tanabe
    • Yoichiro IwaGaku TakeuchiTakao Tanabe
    • A61B3/14A61B3/12
    • A61B3/12
    • The invention is directed to an opthalmologic apparatus. The apparatus includes a photographing system that illuminates an ocular fundus of a tested eye, and photographs an image of the ocular fundus of the tested eye based on a reflective beam from the ocular fundus, an aberration measurement part for measuring an optical aberration of the tested eye, an aberration compensation device disposed in the photographing system for compensating the aberration of the tested eye based on signals from the aberration measurement part, and a focusing device for substantially focusing corresponding to a refractive power of the tested eye by moving a part of an optical system comprising the photographing system along an optical axis direction.
    • 本发明涉及一种眼科装置。 该装置包括照射被测眼睛的眼底的摄影系统,并且基于来自眼底的反射光照射被测眼睛的眼底的图像,用于测量被测眼睛的光学像差的像差测量部 眼睛,设置在拍摄系统中的像差补偿装置,用于基于来自像差测量部分的信号补偿被测眼睛的像差;以及聚焦装置,用于通过移动一部分眼睛来实现对应于被测眼睛的屈光度的聚焦 光学系统包括沿着光轴方向的拍摄系统。
    • 4. 发明授权
    • Surface inspection apparatus
    • 表面检查装置
    • US07348585B2
    • 2008-03-25
    • US11135478
    • 2005-05-24
    • Kazuhiro MiyakawaYoichiro IwaAkihiko Sekine
    • Kazuhiro MiyakawaYoichiro IwaAkihiko Sekine
    • G01N21/86
    • G01B11/306G01N21/9501
    • A surface inspection apparatus of the present invention includes an irradiation optical unit having a multibeam irradiation optical unit for converging and irradiating multiple beams upon a surface of an object to be inspected; a detector which has a light-condensing optical unit including light-sensitive elements for respectively receiving the multiple beams reflected by the surface of the inspecting object; and a processor which obtains a plane-coordinate-position of a position to be irradiated and detected at a reference height position based on a difference between light-receiving reference positions of each of the light-sensitive elements when assumed that the irradiated and detected position of the inspecting object is at the reference height position and actual light-receiving positions of each of the light-sensitive elements, according to a result of analysis and process of surface state information.
    • 本发明的表面检查装置包括具有多光束照射光学单元的照射光学单元,用于会聚并照射被检测物体的表面上的多个光束; 具有聚光光学单元的检测器,所述聚光光学单元包括用于分别接收由检查对象的表面反射的多个光束的光敏元件; 以及处理器,其基于每个感光元件的光接收基准位置之间的差异,当假设被照射和检测位置时,获得要在基准高度位置处被照射和检测的位置的平面坐标位置 根据分析结果和表面状态信息的处理,检查对象的基准高度位置和每个感光元件的实际光接收位置。
    • 6. 发明授权
    • Method for inspecting surface and apparatus for inspecting it
    • 表面检查方法及检查仪器
    • US07154597B2
    • 2006-12-26
    • US10879856
    • 2004-06-29
    • Kazuhiro MiyakawaYoichiro IwaAkihiko Sekine
    • Kazuhiro MiyakawaYoichiro IwaAkihiko Sekine
    • G01N21/00
    • G01N21/47G01N21/94G01N21/9501G01N21/95623
    • A method for inspecting a surface, including entering a predetermined luminous flux at a predetermined incident angle in an inspected surface of an inspection object which is an object of a surface inspection, displaying relatively at least one of the luminous flux and the inspection object so that the luminous flux scans upon the inspected surface, decomposing spatially light intensity of scattered light reflected on an area of the inspected surface entering the luminous flux into a plurality of channels with respect to an one-dimensional direction corresponding to a predetermined direction in the area of the inspected surface entering the light flux, performing inspection of the inspected surface by detecting individually light intensity of each of the decomposed scattered lights obtained by the decomposition, and increasing uniformity of light intensity distribution with respect to at least the predetermined direction in the area of the inspected surface in which the luminous flux is entered.
    • 一种用于检查表面的方法,包括在作为表面检查对象的检查对象的检查表面中以预定入射角输入预定光束,相对地显示光通量和检查对象中的至少一个,使得 在受检表面上扫描光通量,将进入光通量的被检查面的区域上反射的散射光的空间光强度分解为相对于与该预定方向相对应的一定方向的多个通道 检查面进入光束,通过检测通过分解获得的每个分解的散射光的单独的光强度来检查被检查的表面,并且在至少预定方向上的光强度分布的均匀性相对于 其中光通量i的检查表面 进入。
    • 7. 发明申请
    • Particle monitoring apparatus and vacuum processing apparatus
    • 粒子监测装置和真空处理装置
    • US20060132769A1
    • 2006-06-22
    • US11271945
    • 2005-11-14
    • Yoichiro IwaKazuhiro MiyakawaSusumu Saito
    • Yoichiro IwaKazuhiro MiyakawaSusumu Saito
    • G01N15/02
    • G01N15/1434G01N2015/1486G01N2015/1493
    • A particle monitoring apparatus comprises: a light source configured to emit a light having a given intensity; a projecting optical system configured to converting the light emitted from the light source into a band-shaped light flux and to lead the light flux onto a flow passage of a given gas stream so that the given gas stream may pass the band-shaped light flux; a light detector configured to detect the intensity of the light: a detecting optical system configured to lead the light scattered by particles contained in the gas stream and passing the light flux to the light detector, and a particle detector configured to determine sizes of the particles passing the light flux based on intensities of the scattered lights detected by the light detector and to count the number of the particles passing the light flux for a given period, wherein the light intensity of the band-shaped light flux is set to have an almost uniform distribution in a horizontal direction.
    • 粒子监测装置包括:被配置为发射具有给定强度的光的光源; 投影光学系统,被配置为将从光源发射的光转换成带状光束并且将光束引导到给定气流的流动通道上,使得给定的气流可以通过带状光通量 ; 被配置为检测光的强度的光检测器;检测光学系统,被配置为引导由气流中包含的颗粒散射的光并将光通量传递到光检测器;以及粒子检测器,被配置为确定粒子的尺寸 基于由光检测器检测到的散射光的强度使光束通过,并计算通过光通量的粒子的数量达到给定的周期,其中,将带状光通量的光强度设定为几乎 在水平方向均匀分布。
    • 8. 发明申请
    • Surface inspection apparatus
    • 表面检查装置
    • US20050270522A1
    • 2005-12-08
    • US11135478
    • 2005-05-24
    • Kazuhiro MiyakawaYoichiro IwaAkihiko Sekine
    • Kazuhiro MiyakawaYoichiro IwaAkihiko Sekine
    • G01B11/30G01B11/02G01B11/16G01N21/88G01N21/95G01N21/956
    • G01B11/306G01N21/9501
    • A surface inspection apparatus of the present invention includes an irradiation optical unit having a multibeam irradiation optical unit for converging and irradiating multiple beams upon a surface of an object to be inspected; a detector which has a light-condensing optical unit including light-sensitive elements for respectively receiving the multiple beams reflected by the surface of the inspecting object; and a processor which obtains a plane-coordinate-position of a position to be irradiated and detected at a reference height position based on a difference between light-receiving reference positions of each of the light-sensitive elements when assumed that the irradiated and detected position of the inspecting object is at the reference height position and actual light-receiving positions of each of the light-sensitive elements, according to a result of analysis and process of surface state information.
    • 本发明的表面检查装置包括具有多光束照射光学单元的照射光学单元,用于会聚并照射被检测物体的表面上的多个光束; 具有聚光光学单元的检测器,所述聚光光学单元包括用于分别接收由检查对象的表面反射的多个光束的光敏元件; 以及处理器,其基于每个感光元件的光接收基准位置之间的差异,当假设被照射和检测位置时,获得要在基准高度位置处被照射和检测的位置的平面坐标位置 根据分析结果和表面状态信息的处理,检查对象的基准高度位置和每个感光元件的实际光接收位置。