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    • 3. 发明申请
    • Semiconductor laser device and method of manufacturing the same
    • 半导体激光器件及其制造方法
    • US20080013582A1
    • 2008-01-17
    • US11708135
    • 2007-02-20
    • Kaoru OkamotoRyu WashinoKazuhiro KomatsuYasushi Sakuma
    • Kaoru OkamotoRyu WashinoKazuhiro KomatsuYasushi Sakuma
    • H01S5/026H01L33/00
    • H01S5/12B82Y20/00H01S5/1231H01S5/125H01S5/34306H01S5/34313
    • A method of manufacturing semiconductor laser device capable of reducing κL, with manufacturing restrictions satisfied, is provided. In a distributed-feedback or distributed-reflective semiconductor laser device, immediately before burying regrowth of a diffraction grating, halogen-based gas is introduced to a reactor, and etching is performed on the diffraction grating so that each side wall has at least two or more crystal faces and a ratio of length of an upper side in a waveguide direction to a bottom side parallel to a (100) surface is 0 to 0.3. And, a reactive product formed on side surfaces of the diffraction grating and in trench portions between stripes of the diffraction grating at an increase of temperature for regrowth is removed. Therefore, the diffraction grating with reduced height and a sine wave shape is obtained, thereby κL of the device is reduced. Thus, an oscillation threshold and optical output efficiency can be improved.
    • 提供了一种制造能够减少kappa的半导体激光装置的方法,其制造限制被满足。 在分布反馈或分布反射半导体激光器件中,在埋入衍射光栅的再生长之前,将卤素基气体引入反应器,并在衍射光栅上进行蚀刻,使得每个侧壁具有至少两个或 更多的晶面和波导方向的上侧与平行于(100)面的底面的长度的比率为0〜0.3。 并且,在再生长温度升高时,衍射光栅的侧面和衍射光栅的条纹之间的沟槽部分中形成的反应产物被去除。 因此,获得具有降低的高度和正弦波形的衍射光栅,从而减小了器件的κ。 因此,可以提高振荡阈值和光输出效率。
    • 4. 发明授权
    • Semiconductor laser device and method of manufacturing the same
    • 半导体激光器件及其制造方法
    • US07855093B2
    • 2010-12-21
    • US12572720
    • 2009-10-02
    • Kaoru OkamotoRyu WashinoKazuhiro KomatsuYasushi Sakuma
    • Kaoru OkamotoRyu WashinoKazuhiro KomatsuYasushi Sakuma
    • H01L21/30
    • H01S5/12B82Y20/00H01S5/1231H01S5/125H01S5/34306H01S5/34313
    • A method of manufacturing semiconductor laser device capable of reducing κL, with manufacturing restrictions satisfied, is provided. In a distributed-feedback or distributed-reflective semiconductor laser device, immediately before burying regrowth of a diffraction grating, halogen-based gas is introduced to a reactor, and etching is performed on the diffraction grating so that each side wall has at least two or more crystal faces and a ratio of length of an upper side in a waveguide direction to a bottom side parallel to a (100) surface is 0 to 0.3. And, a reactive product formed on side surfaces of the diffraction grating and in trench portions between stripes of the diffraction grating at an increase of temperature for regrowth is removed. Therefore, the diffraction grating with reduced height and a sine wave shape is obtained, thereby κL of the device is reduced. Thus, an oscillation threshold and optical output efficiency can be improved.
    • 提供了一种制造半导体激光器件的方法,该半导体激光器装置能够在制造限制满足的情况下降低L。 在分布反馈或分布反射半导体激光器件中,在埋入衍射光栅的再生长之前,将卤素基气体引入反应器,并在衍射光栅上进行蚀刻,使得每个侧壁具有至少两个或 更多的晶面和波导方向的上侧与平行于(100)面的底面的长度的比率为0〜0.3。 并且,在再生长温度升高时,衍射光栅的侧面和衍射光栅的条纹之间的沟槽部分中形成的反应产物被去除。 因此,获得具有降低的高度和正弦波形的衍射光栅,从而减小了器件的衰减。 因此,可以提高振荡阈值和光输出效率。
    • 5. 发明授权
    • Semiconductor element and manufacturing method thereof
    • 半导体元件及其制造方法
    • US07998766B2
    • 2011-08-16
    • US12108553
    • 2008-04-24
    • Yasushi SakumaDaisuke NakaiShigenori HayakawaKazuhiro Komatsu
    • Yasushi SakumaDaisuke NakaiShigenori HayakawaKazuhiro Komatsu
    • H01L21/00
    • H01S5/0265H01S5/0425
    • A semiconductor element and a manufacturing method of the semiconductor element are provided. A ridge waveguide type semiconductor integrated element includes: an electrode of an EA portion and an electrode of an LD portion which are arranged so as to be away from each other; a contact layer of the EA portion and a contact layer of the LD portion which are arranged so as to be away from each other and in each of which the electrode is formed on an upper surface and an edge of at least a part of the upper surface is set to the same electric potential as that of the electrode; a passivation film as an insulative concave/convex structure extending from an edge of one of the two contact layers to an edge of the other contact layer; and a polyimide resin for embedding the passivation film.
    • 提供半导体元件和半导体元件的制造方法。 脊形波导型半导体集成元件包括:EA部分的电极和LD部分的电极,被布置为彼此远离; EA部分的接触层和LD部分的接触层被布置成彼此远离,并且其中每个电极形成在上表面的至少一部分的上表面和边缘上 表面设置为与电极相同的电位; 作为从所述两个接触层中的一个的边缘延伸到所述另一接触层的边缘的绝缘性凹/凸结构的钝化膜; 以及用于嵌入钝化膜的聚酰亚胺树脂。
    • 8. 发明授权
    • Method for manufacturing multilayer ceramic capacitor
    • 多层陶瓷电容器制造方法
    • US07335328B2
    • 2008-02-26
    • US10502602
    • 2003-10-24
    • Kazuki HirataKenji OkaKazuhiro KomatsuAtsuo Nagai
    • Kazuki HirataKenji OkaKazuhiro KomatsuAtsuo Nagai
    • H01G4/00C04B33/32
    • H01G4/30H01G4/1227
    • A method of manufacturing a multilayer ceramic capacitor includes the steps of: preparing a mixture of a raw material powder mainly composed of barium titanate particles; forming the mixture and a binder into a green sheet; alternately layering the green sheet and an internal electrode to obtain a laminated body; and sintering the laminated body. The step of preparing the mixture includes the steps of: introducing the raw material powder and the dispersion medium into a mixing container, and stirring them with balls serving as a mixing medium, to obtain a slurry containing a raw material powder mixture; and drying the slurry. The mixing medium has a diameter that is equal to or less than 400 times the mean particle size of the barium titanate particles of the raw material. The present invention provides a multilayer ceramic capacitor having good DC bias characteristics by suppressing the variation in crystal particles.
    • 制造多层陶瓷电容器的方法包括以下步骤:制备主要由钛酸钡颗粒组成的原料粉末的混合物; 将所述混合物和粘合剂形成生片; 交替层叠生片和内部电极以获得层压体; 并烧结层叠体。 制备混合物的步骤包括以下步骤:将原料粉末和分散介质引入混合容器中,并用作为混合介质的滚珠搅拌,得到含有原料粉末混合物的浆料; 并干燥浆料。 混合介质的直径等于或小于原料的钛酸钡颗粒的平均粒度的400倍。 本发明通过抑制晶体颗粒的变化来提供具有良好DC偏置特性的多层陶瓷电容器。