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    • 1. 发明授权
    • Synchronous circuit for FM multiple broadcast receiver
    • FM多播接收机同步电路
    • US06363063B1
    • 2002-03-26
    • US09047824
    • 1998-03-25
    • Kazuhiro KimuraShigeaki HayashibeTakahiko MasumotoYutaka HirakosoHiroshi Kaneko
    • Kazuhiro KimuraShigeaki HayashibeTakahiko MasumotoYutaka HirakosoHiroshi Kaneko
    • H04B700
    • H03J1/0066H04H20/22H04H60/37H04H2201/13
    • A receiver receives FM multiplex broadcast data of both RDS and DARC systems by using one front end. A BIC detection circuit (101) detects a block identification code (BIC) included in received data. A coincidence/non-coincidence detection circuit (104) judges whether or not a BIC detection timing is correct and emits a coincidence/non-coincidence pulse. A forward protection circuit (106) counts a frequency of outputs of non-coincidence pulses and retains an established synchronous condition until the counted value exceeds a predetermined value. Then, a forward protection control circuit (108) inhibits the forward protection circuit from performing a count operation while a search is performed for selecting a station. Also, a rearward protection circuit (105) counts a frequency of outputs of coincidence pulses and establishes a synchronous condition when the counted value reaches a predetermined value. Further, a rearward protection control circuit (800) inhibits the rearward protection circuit from performing a count operation while a search is performed.
    • 接收机通过使用一个前端接收RDS和DARC系统的FM多路复用广播数据。 BIC检测电路(101)检测包含在接收数据中的块识别码(BIC)。 一致/不符合检测电路(104)判断BIC检测定时是否正确并且发出一致/非重合脉冲。 正向保护电路(106)对不一致脉冲的输出频率进行计数,并保持建立的同步状态,直到计数值超过预定值。 然后,当进行用于选择站的搜索时,前向保护控制电路(108)禁止前向保护电路执行计数操作。 此外,后方保护电路(105)对一致脉冲的输出频率进行计数,并且当计数值达到预定值时建立同步状态。 此外,在执行搜索时,后向保护控制电路(800)禁止后向保护电路执行计数操作。
    • 5. 发明授权
    • Synchronous circuit of FM multiplex broadcasting receiver
    • FM多重广播接收机同步电路
    • US06560207B1
    • 2003-05-06
    • US09255525
    • 1999-02-22
    • Kazuhiro KimuraYutaka Hirakoso
    • Kazuhiro KimuraYutaka Hirakoso
    • H04L700
    • H04H40/18H04H20/55H04H60/70
    • Data counters and perform a counting operation which is synchronized with the respective timing of receiving multiplex data from a VICS data broadcasting station and a D-GPS data broadcasting station. While receiving the multiplex data from the VICS data broadcasting station, based on an output C2 of the data counter and a BIC detection output BP, block synchronization is detected. When the broadcasting station is switched from the VICS data broadcasting station to the D-GPS data broadcasting station, an output C2 of the data counter is selected in response to a control signal CONT and block synchronization is detected based on an output C2 and an output BP. Further, an output C1 is always inputted to the block counter. Thus, even while receiving the multiplex data from the D-GPS data broadcasting station, frame synchronization of the multiplex data of the VICS data broadcasting station is detected without causing miscounting.
    • 数据计数器并执行与从VICS数据广播站和D-GPS数据广播站接收多路复用数据的相应定时同步的计数操作。 在从VICS数据广播站接收多路复用数据的同时,基于数据计数器的输出C2和BIC检测输出BP,检测块同步。 当广播站从VICS数据广播站切换到D-GPS数据广播站时,响应于控制信号CONT选择数据计数器的输出C2,并且基于输出C2和输出来检测块同步 BP。 此外,输出C1总是输入到块计数器。 因此,即使在从D-GPS数据广播站接收多路复用数据的同时,也可以检测VICS数据广播电台的复用数据的帧同步,而不会造成错误计数。
    • 10. 发明申请
    • Device for processing substrate and method of manufacturing semiconductor device
    • 用于处理衬底的器件和制造半导体器件的方法
    • US20100136714A1
    • 2010-06-03
    • US12656497
    • 2010-02-01
    • Kazuhiro YuasaKazuhiro KimuraYasuhiro Megawa
    • Kazuhiro YuasaKazuhiro KimuraYasuhiro Megawa
    • H01L21/66B05C11/10
    • H01L21/67253Y10S438/908Y10S438/913
    • Provided is a substrate processing apparatus and a method of manufacturing a semiconductor device, which are hard to cause a defect in processing a substrate owing to that a pressure inside a process chamber is not kept constant, and which enable a better processing of a substrate. The substrate processing apparatus has: a process chamber for processing a substrate; a reactive gas-supplying module for supplying a reactive gas into the process chamber; a reactive gas-supplying line for supplying the reactive gas from the reactive gas-supplying module into the process chamber; an exhaust line for exhausting an inside of the process chamber; a pump provided in the exhaust line for vacuumizing the inside of the process chamber; a pressure-adjusting valve provided in the exhaust line for adjusting a pressure in the process chamber; a first pressure-measuring instrument for measuring an inside pressure of the process chamber; a second pressure-measuring instrument for measuring a differential pressure between the inside pressure of the process chamber and an outside pressure thereof; and a controller which controls the pressure-adjusting valve based on a value of the inside pressure of the process chamber measured by the first pressure-measuring instrument so as to keep the inside pressure of the process chamber constant, and controls the reactive gas-supplying module based on a value of the differential pressure measured by the second pressure-measuring instrument so as to allow supply of the reactive gas into the process chamber in a case of the inside pressure of the process chamber being smaller than the outside pressure thereof, and so as to preclude supply of the reactive gas into the process chamber in a case of the inside pressure of the process chamber being larger than the outside pressure thereof when processing the substrate.
    • 提供了由于处理室内的压力不保持恒定而难以引起基板处理缺陷的基板处理装置和半导体装置的制造方法,能够更好地处理基板。 基板处理装置具有:处理基板的处理室; 用于将反应性气体供应到处理室中的反应气体供应模块; 用于将来自反应气体供应模块的反应气体供应到处理室中的反应气体供应管线; 用于排出处理室内部的排气管线; 设置在排气管线中的用于对处理室的内部进行抽真空的泵; 设置在所述排气管路中用于调节所述处理室中的压力的​​压力调节阀; 用于测量处理室的内部压力的第一压力测量仪器; 用于测量处理室的内部压力与其外部压力之间的压差的第二压力测量仪器; 以及控制器,其基于由所述第一压力测量仪测量的所述处理室的内部压力的值来控制所述压力调节阀,以便保持所述处理室的内部压力恒定,并且控制所述反应性气体供给 模块,其基于由所述第二压力测量仪测量的所述压差的值,以便在所述处理室的内部压力小于其外部压力的情况下允许将所述反应气体供应到所述处理室中;以及 在处理基板时,在处理室的内部压力大于其外部压力的情况下,防止反应气体供应到处理室中。