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    • 5. 发明授权
    • Instrument and method for metrology
    • 仪器和计量方法
    • US06928184B2
    • 2005-08-09
    • US09877223
    • 2001-06-08
    • Kazuhiro Honda
    • Kazuhiro Honda
    • G06T7/00G06K9/00A61N5/00G06K9/32G21G5/00
    • G06T7/001G06T7/0002G06T7/33G06T2207/30141G06T2207/30148
    • A metrology instrument and method is offered which is capable of measuring the deviations between elements of an actual pattern at their joint without making any sample pattern for inspection in measuring and inspecting deviations produced at the joint portion when the pattern is drawn or transferred. The deviation ΔX parallel to the joint portion is found from an image obtained for inspection. On the other hand, the dose distribution diagrams of both elements of the pattern on the opposite sides of the joint portion are calculated. These dose distribution diagrams are shifted by ΔX along the joint portion and by a desired amount ΔY vertical to the joint portion. Then, the diagrams are superimposed together. The resulting image is compared with the image for the inspection and the correlation between them is found. The value of ΔY which minimizes the correlation (i.e., maximizes the degree of similarity) is found.
    • 提供了一种计量仪器和方法,其能够测量在其接头处的实际图案的元件之间的偏差,而不用于在绘制或转移图案时在测量和检查在接合部分处产生的偏差时进行检查的任何样品图案。 从获得的用于检查的图像中找到平行于关节部分的偏差DeltaX。 另一方面,计算关节部分两侧的图案的两个元件的剂量分布图。 这些剂量分布图沿着关节部分移动DeltaX,并且垂直于关节部分的期望量DeltaY移位。 然后,将图叠加在一起。 将所得图像与用于检查的图像进行比较,并且发现它们之间的相关性。 找到最小化相关性(即,使相似度最大化)的DeltaY的值。
    • 6. 发明授权
    • Antenna and its electronic circuit combination
    • 天线及其电子电路组合
    • US4924237A
    • 1990-05-08
    • US243744
    • 1988-09-13
    • Kazuhiro HondaKouji YamashitaMasanori KawaiKazuo NakahiKuniharu Tatetsuki
    • Kazuhiro HondaKouji YamashitaMasanori KawaiKazuo NakahiKuniharu Tatetsuki
    • H01Q13/08H01Q1/24H01Q7/00H01Q9/04H01Q23/00H04B1/38H05K1/02H05K1/18
    • H01Q1/243H01Q23/00H01Q7/00H01Q9/0421H01Q9/0442H05K1/0237H05K1/18
    • An antenna and its electronic circuit combination is presented to comprise a ground conductor plane 30, a radiating conductor plane 40 disposed in parallel spaced relation to the ground plane 30 and shorted at its one end to the ground plane 30. A ground plane 30 is preferably formed on a printed board 10 which is disposed in parallel relation to the radiating plane 40 to define therebetween an open air space. Mounted on the printed board 10 and received within the open air space are electronic components which form a receiving or transmitting electronic circuit 60 associated with the antenna structure and electrically coupled by means of a feed element 20 to a feed point 44 on the radiating plane 40. Consequently, a number of electronic components forming the electronic circuit for the antenna can well be incorporated within the antenna structure by better utilization of the open air space formed between the radiating and ground planes, giving a space saving compact arrangement to the antenna and its electronic combination suitable for installation in a limited space.
    • 天线及其电子电路组合被呈现为包括接地导体平面30,与接地平面30平行间隔设置的辐射导体平面40,并在其一端短接到接地平面30.接地平面30优选地 形成在印刷电路板10上,印刷电路板10平行于辐射平面40设置,以便在其间形成露天空间。 安装在印刷电路板10上并被接收在露天空间内的是电子部件,其形成与天线结构相关联的接收或发射电子电路60,并通过馈电元件20电耦合到辐射平面40上的馈电点44 因此,通过更好地利用在辐射和接地平面之间形成的开放空间,能够将形成天线的电子电路的多个电子部件很好地并入天线结构内,为天线及其天线提供节省空间的紧凑布置 电子组合适合安装在有限的空间。
    • 8. 发明申请
    • SHEET PROCESSING APPARATUS AND IMAGE FORMING APPARATUS
    • 表格处理装置和图像形成装置
    • US20070231035A1
    • 2007-10-04
    • US11690491
    • 2007-03-23
    • Kazuhiro HondaMasahiro Yonenuma
    • Kazuhiro HondaMasahiro Yonenuma
    • G03G15/00
    • G03G15/6538B42C1/12B65H29/14B65H31/3027B65H2301/4213B65H2301/42262B65H2511/30B65H2513/10G03G2215/00421G03G2215/00827B65H2220/01B65H2220/02
    • A sheet processing apparatus including: a conveying unit, which conveys a sheet; a stacking unit on which the conveyed sheet is stacked; a processing unit, which processes the stacked sheet; a buffering unit, which allows the sheet conveyed to the stacking unit by the conveying unit to pass, and buffers a predetermined number of sheets to be passed during an operation of the processing unit; a transferring unit, which receives the buffer sheets and transfers the predetermined number of buffer sheets from the buffering unit to the stacking unit; and a controlling unit, which controls a sheet conveying speed to make a speed when the transferring unit transfers the buffer sheet lower than a speed when the transferring unit receives the buffer sheets to prevent the sheet conveyed by the conveying unit from interfering the transferring unit during an operation of transferring the sheet.
    • 一种片材处理设备,包括:输送单元,其传送片材; 堆叠单元,其上堆放所传送的薄片; 处理单元,其处理堆叠的片材; 缓冲单元,其允许由输送单元输送到堆叠单元的纸张通过,并且在处理单元的操作期间缓冲要通过的预定数量的纸张; 传送单元,其接收缓冲片并将预定数量的缓冲片从缓冲单元传送到堆叠单元; 以及控制单元,当传送单元接收到缓冲片时,当传送单元将缓冲片传送到比传送单元接收缓冲片的速度低时,控制片材传送速度以使速度达到速度,以防止由传送单元传送的片材干扰传送单元 传送纸张的操作。
    • 10. 发明授权
    • Aberration corrector for instrument utilizing charged-particle beam
    • 使用带电粒子束的仪器畸变校正器
    • US06723997B2
    • 2004-04-20
    • US10281378
    • 2002-10-25
    • Miyuki MatsuyaKazuhiro Honda
    • Miyuki MatsuyaKazuhiro Honda
    • H01J314
    • H01J37/153G01N23/225G21K1/087H01J37/265H01J37/28
    • An aberration corrector comprises four stages of electrostatic quadrupole elements, two stages of electrostatic quadrupole elements for superimposing a magnetic potential distribution analogous to the electric potential distribution created by the two central ones of the four stages of the electrostatic quadrupole elements on the electric potential distribution, an objective lens, a manual operation portion permitting a user to modify the accelerating voltage or the working distance, a power supply for supplying voltages to the four stages of electrostatic quadrupole elements, a power supply for exciting the two stages of magnetic quadrupole elements, a power supply for the objective lens, and a control portion for controlling the power supplies according to a manual operation or setting performed on the manual operation portion.
    • 像差校正器包括四级静电四极元件,两级静电四极元件,用于叠加与由静电四极元件四级中的两个中心的电位分布类似的电位分布,该电位分布与电位分布相同, 物镜,允许用户修改加速电压或工作距离的手动操作部分,用于向四级静电四极元件提供电压的电源,用于激励两级磁四极元件的电源, 用于物镜的电源,以及用于根据在手动操作部分执行的手动操作或设置来控制电源的控制部分。