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    • 4. 发明申请
    • Method of producing thin film magnetic head
    • 制造薄膜磁头的方法
    • US20080087630A1
    • 2008-04-17
    • US11892773
    • 2007-08-27
    • Yuji ItoHiraku HirabayashiYoshiyuki MizoguchiNobuya Oyama
    • Yuji ItoHiraku HirabayashiYoshiyuki MizoguchiNobuya Oyama
    • B44C1/22
    • G11B5/3163G11B5/00826
    • A method of producing a thin film magnetic head includes the steps of: forming a second lower magnetic pole layer in a part on a first lower magnetic pole layer; forming, over the entire wafer surface, an insulating layer so as to be thicker than the thickness of the second lower magnetic pole layer in the stacking direction, the insulating layer being less likely to be etched than the second lower magnetic pole layer; carrying out a planarizing process by CMP on the entire wafer surface until the second lower magnetic pole layer is exposed; forming a concave portion including the second lower magnetic pole layer and the insulating layer by ion beam etching on the entire wafer surface; forming a recording gap layer over the entire wafer surface; and forming a first upper magnetic pole layer in the upper magnetic pole layer so as to fill the concave portion.
    • 一种制造薄膜磁头的方法包括以下步骤:在第一下磁极层的一部分上形成第二下磁极层; 在整个晶片表面上形成绝缘层,以便比层叠方向上的第二下磁极层的厚度厚,绝缘层比第二下磁极层更不易蚀刻; 在整个晶片表面上通过CMP进行平坦化处理,直到第二下磁极层露出; 在整个晶片表面上通过离子束蚀刻形成包括第二下磁极层和绝缘层的凹部; 在整个晶片表面上形成记录间隙层; 以及在所述上磁极层中形成第一上磁极层以填充所述凹部。
    • 5. 发明授权
    • Method of producing thin film magnetic head
    • 制造薄膜磁头的方法
    • US07828985B2
    • 2010-11-09
    • US11892773
    • 2007-08-27
    • Yuji ItoHiraku HirabayashiYoshiyuki MizoguchiNobuya Oyama
    • Yuji ItoHiraku HirabayashiYoshiyuki MizoguchiNobuya Oyama
    • C23F1/00B44C1/22H01L21/00H01L21/302
    • G11B5/3163G11B5/00826
    • A method of producing a thin film magnetic head includes the steps of: forming a second lower magnetic pole layer in a part on a first lower magnetic pole layer; forming, over the entire wafer surface, an insulating layer so as to be thicker than the thickness of the second lower magnetic pole layer in the stacking direction, the insulating layer being less likely to be etched than the second lower magnetic pole layer; carrying out a planarizing process by CMP on the entire wafer surface until the second lower magnetic pole layer is exposed; forming a concave portion including the second lower magnetic pole layer and the insulating layer by ion beam etching on the entire wafer surface; forming a recording gap layer over the entire wafer surface; and forming a first upper magnetic pole layer in the upper magnetic pole layer so as to fill the concave portion.
    • 一种制造薄膜磁头的方法包括以下步骤:在第一下磁极层的一部分上形成第二下磁极层; 在整个晶片表面上形成绝缘层,以便比层叠方向上的第二下磁极层的厚度厚,绝缘层比第二下磁极层更不易蚀刻; 在整个晶片表面上通过CMP进行平坦化处理,直到第二下磁极层露出; 在整个晶片表面上通过离子束蚀刻形成包括第二下磁极层和绝缘层的凹部; 在整个晶片表面上形成记录间隙层; 以及在所述上磁极层中形成第一上磁极层以填充所述凹部。
    • 10. 发明申请
    • Method for grinding a bar of thin film magnetic elements utilizing a plurality of resistive films
    • 利用多个电阻膜研磨棒状薄膜磁性元件的方法
    • US20050237673A1
    • 2005-10-27
    • US11114035
    • 2005-04-26
    • Yoshiyuki MizoguchiKazuhide YamadaTsuyoshi UmeharaNobuya OyamaSoji Koide
    • Yoshiyuki MizoguchiKazuhide YamadaTsuyoshi UmeharaNobuya OyamaSoji Koide
    • B24B19/26G11B5/127G11B5/31G11B5/33
    • G11B5/3173B24B19/26G11B5/3163G11B5/3166Y10T29/49004Y10T29/49048
    • A method is presented for grinding a surface of an elongate bar having a plurality of thin film magnetic elements aligned in a line, each of the thin film magnetic elements having a magnetoresistive sensor for reading a magnetic record from a recording medium and an inductive electromagnetic transducer for writing a magnetic record into the recording medium in a stacked structure, the surface of the bar being a grind surface so that it can be formed into an air-bearing surface by means of the grinding. The method has steps of providing first resistive films on the grind surface in advance along a first longitudinal line parallel to a longitudinal direction of the bar, and providing second resistive films on the grind surface in advance along a second longitudinal line parallel to the longitudinal direction of the bar. The method further has a step of grinding the grind surface while pressing the bar against a rotating grinding disc with the longitudinal direction of the bar positioned toward a radial direction of the grinding disc, measuring electric resistance values of the first and second resistive films, and controlling an amount that is ground of the grind surface in the longitudinal direction and a direction perpendicular to the longitudinal direction based on the electric resistance values of the first resistive film and the second resistive films.
    • 提出了一种用于研磨细长条的表面的方法,所述细长条的表面具有排列成一行的多个薄膜磁性元件,每个薄膜磁性元件具有用于从记录介质读取磁记录的磁阻传感器和感应电磁换能器 为了以堆叠的结构将磁记录写入记录介质中,该条的表面是研磨表面,使得其可以通过研磨形成为空气轴承表面。 该方法具有以下步骤:沿着平行于条的纵向方向的第一纵向线预先在研磨表面上提供第一电阻膜,并且沿平行于纵向的第二纵向线预先在研磨表面上提供第二电阻膜 的酒吧。 该方法还具有如下步骤:在将棒压靠在旋转的研磨盘上的条件下研磨研磨表面,其中杆的纵向朝向研磨盘的径向方向,测量第一和第二电阻膜的电阻值,以及 基于第一电阻膜和第二电阻膜的电阻值,控制研磨表面在纵向方向上的垂直于纵向的方向的磨削量。