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1. 发明授权

US06414828B1 Laser ventilation system 失效
标题翻译：激光通风系统
公开(公告)号：US06414828B1
公开(公告)日：2002-07-02
申请号：US09482182
申请日：2000-01-12
申请人： Kay Zimmerman , Ulrich Rebhan
发明人： Kay Zimmerman , Ulrich Rebhan
IPC分类号： H02H300
CPC分类号： F24F7/00 , B23K26/1435 , B23K26/1438
摘要： A ventilation system for industrial laser systems is disclosed which can minimize the cooling air intake required during normal operation. Adequate ventilation is maintained even if the housing is opened. Various sensors monitor the condition of the cooling air and can increase the air intake if required for cooling or safety. Such a ventilation system is of particular advantage for excimer lasers in microlithography applications because the consumption of conditioned clean room air is controlled by the actual needs of the laser device.
摘要翻译：公开了用于工业激光系统的通风系统，其可以使正常操作期间所需的冷却空气进入最小化。即使外壳打开，仍保持足够的通风。各种传感器监测冷却空气的状况，如果冷却或安全需要，可以增加进气口。这种通风系统对于微光刻应用中的准分子激光器是特别有利的，因为经过激光设备的实际需要来控制空调洁净室空气的消耗。

2. 发明授权

US06556609B2 Discharge unit for a high repetition rate excimer or molecular fluorine laser 有权
公开(公告)号：US06556609B2
公开(公告)日：2003-04-29
申请号：US09826301
申请日：2001-04-03
申请人： Igor Bragin , Vadim Berger , Uwe Stamm , Ulrich Rebhan
发明人： Igor Bragin , Vadim Berger , Uwe Stamm , Ulrich Rebhan
IPC分类号： H01S322
CPC分类号： H01S3/036 , H01S3/038 , H01S3/0971 , H01S3/225
摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

3. 发明授权

US06430205B2 Discharge unit for a high repetition rate excimer or molecular fluorine laser 有权
公开(公告)号：US06430205B2
公开(公告)日：2002-08-06
申请号：US09826372
申请日：2001-04-03
申请人： Igor Bragin , Vadim Berger , Uwe Stamm , Ulrich Rebhan
发明人： Igor Bragin , Vadim Berger , Uwe Stamm , Ulrich Rebhan
IPC分类号： H01S322
CPC分类号： H01S3/036 , H01S3/038 , H01S3/0971 , H01S3/225
摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

4. 发明授权

US06587202B2 Optical materials testing method 失效
标题翻译：光学材料测试方法
公开(公告)号：US06587202B2
公开(公告)日：2003-07-01
申请号：US09726871
申请日：2000-11-30
申请人： Ulrich Rebhan
发明人： Ulrich Rebhan
IPC分类号： G01N2100
CPC分类号： G01N21/59 , G01N21/33
摘要： A method for testing a material block prior to forming the material block into one or more optical components for use with a sub-micron lithographic, high power, narrow bandwidth laser system having high wavelength stability includes the step of selecting a block of material having appropriate characteristic optical properties for the source laser system being used. The next step is to test the material block for absorption performance. Then, if the block exhibits a sufficient absorption performance, then one of more optical components such as one or more prisms, etalons, and/or windows, etc. are formed from the material block. Finally, the optical components formed from the block are inserted into a wavelength selection module of the resonator of the laser to participate in producing a high power, narrow bandwidth laser beam which may be used in sub-micron photolithographic applications.
摘要翻译：在将材料块形成用于具有高波长稳定性的亚微米光刻，高功率，窄带宽激光系统的一个或多个光学部件之前用于测试材料块的方法包括以下步骤：选择具有适当的材料块使用的源激光系统的特性光学特性。下一步是测试材料块的吸收性能。然后，如果块具有足够的吸收性能，则从材料块形成更多的光学部件之一，例如一个或多个棱镜，标准具和/或窗户等。最后，将从块形成的光学部件插入到激光器的谐振器的波长选择模块中，以参与产生可用于亚微米光刻应用的高功率窄带宽激光束。

5. 发明授权

US5140600A Method of controlling the total energy amount of a plurality of laser pulses 失效
标题翻译：控制多个激光脉冲的总能量的方法
公开(公告)号：US5140600A
公开(公告)日：1992-08-18
申请号：US680385
申请日：1991-04-04
申请人： Ulrich Rebhan
发明人： Ulrich Rebhan
IPC分类号： G05D25/00 , B23K26/06 , H01S3/00 , H01S3/10 , H01S3/23
CPC分类号： B23K26/06 , H01S3/005
摘要： A method of controlling the total energy amount of a plurality of laser pulses in which the accumulation of the energy amounts of the individual pulses is measured with an energy measuring device and the laser pulses are interrupted when a dose desired value of the accumulated energy amounts is reached, provides that for increasing the accuracy of the energy dose achieved several laser pulses before reaching the dose desired value the energy amount of the individual laser pulses is reduced.
摘要翻译：一种控制多个激光脉冲的总能量的方法，其中用能量测量装置测量各个脉冲的能量积累，并且当累积能量的剂量期望值为提供了为了提高在达到剂量期望值之前实现的几个激光脉冲的能量剂量的准确度，单个激光脉冲的能量量减少。

6. 发明授权

US06727731B1 Energy control for an excimer or molecular fluorine laser 失效
标题翻译：准分子或分子氟激光的能量控制
公开(公告)号：US06727731B1
公开(公告)日：2004-04-27
申请号：US09688561
申请日：2000-10-16
申请人： Ulrich Rebhan , Guenter Nowinski
发明人： Ulrich Rebhan , Guenter Nowinski
IPC分类号： H01S313
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/036 , H01S3/038 , H01S3/134 , H01S3/22 , H01S3/225 , H01S3/2258
摘要： A method and gas replenishment algorithm for excimer and molecular fluorine lasers is based on parameters upon which gas aging more closely depends than pulse count, such as input energy to the electrical discharge, and also preferably time. A burst control method and algorithm includes measuring the energies of initial pulses of a first burst occurring after a long burst break, calculating values of input voltages for the initial pulses that would bring output energies of the individual laser pulses or groups of pulses to substantially the same values, and applying the calculated voltages in a subsequent first burst after a long burst break to achieve substantially same predetermined output energy values for the pulses or groups of pulses. Similar operations may be performed for one or more subsequent bursts following the first burst. The values for the first burst may be maintained in a first table of input voltage values to be read by a processor which signals a power supply circuit to apply the voltages according to the voltage values in the table. The values for subsequent bursts may be maintained in a second table, and a third table, etc. A final table such as the third table may be used for all subsequent bursts until another long burst break again occurs, after which the first table is again used for the first burst following the long burst break.
摘要翻译：准分子和分子氟激光器的方法和气体补充算法基于气体老化比脉冲计数更接近的参数，例如放电的输入能量，并且还优选时间。脉冲串控制方法和算法包括测量在长突发间隔之后发生的第一脉冲串的初始脉冲的能量，计算将使各个激光脉冲或脉冲组的输出能量基本上达到的初始脉冲的输入电压值相同的值，并且在长突发间隔之后的随后的第一突发中应用所计算的电压以实现脉冲或脉冲组的基本相同的预定输出能量值。可以在第一突发之后的一个或多个后续脉冲串执行类似的操作。第一脉冲串的值可以保持在输入电压值的第一表中，以由处理器读取，该处理器向电源电路发信号，以根据表中的电压值施加电压。后续脉冲串的值可以保持在第二表中，并且第三表等。对于所有后续脉冲串，可以使用诸如第三表的最终表，直到再次出现另一个长突发中断，此后第一个表再次发生用于长时间突击后的第一次爆发。

7. 发明授权

US06493364B1 Beam shutter for excimer laser 失效
标题翻译：光束快门用于准分子激光
公开(公告)号：US06493364B1
公开(公告)日：2002-12-10
申请号：US09475775
申请日：1999-12-30
申请人： Jurgen Baumler , Ulrich Rebhan , Markus Ritcher
发明人： Jurgen Baumler , Ulrich Rebhan , Markus Ritcher
IPC分类号： H01S3123
CPC分类号： H01S3/03 , H01S3/225
摘要： A beam shutter apparatus designed to handle high powered UV radiation is disclosed. The shutter includes a high reflectivity mirror mounted on a plate which can be rotated between a first position where the beam is reflected and redirected to a tool such as a beam dump and a second position where the beam is free to pass out of the laser, where the beam is free to pass out of the laser The shutter includes a support base with an angled upper surface upon which the mirror plate rests when in the second position. The support base has a beam path channel designed so that a beam can pass through the support base and out of the shutter when the mirrored plate is in the first position. The mirrored plate is rotated by a linkage, which is driven by an electrically powered actuator on a rotational magnet. The support base is machined out of a monolithic piece of metal allowing very high precision without the need for cumbersome alignment procedures.
摘要翻译：公开了一种设计用于处理高功率UV辐射的光束快门装置。快门包括安装在板上的高反射率反射镜，该反射镜可以在第一位置和第二位置之间旋转，该第一位置在光束被反射并重定向到诸如光束倾倒的工具和第二位置之间，其中光束自由地从激光器中通过。快门包括具有成角度的上表面的支撑基座，当处于第二位置时，所述镜板停靠在支撑基座上。支撑基座具有光束通道通道，其被设计成当镜像板处于第一位置时，光束可以穿过支撑基座并离开快门。镜面板通过联动装置旋转，联动装置由旋转磁体上的电动致动器驱动。支撑基座由单块金属制成，允许非常高的精度，而不需要繁琐的对准程序。

8. 发明授权

US06466599B1 Discharge unit for a high repetition rate excimer or molecular fluorine laser 有权
公开(公告)号：US06466599B1
公开(公告)日：2002-10-15
申请号：US09453670
申请日：1999-12-03
申请人： Igor Bragin , Vadim Berger , Uwe Stamm , Ulrich Rebhan
发明人： Igor Bragin , Vadim Berger , Uwe Stamm , Ulrich Rebhan
IPC分类号： H01S3225
CPC分类号： H01S3/036 , H01S3/038 , H01S3/0971 , H01S3/225
摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

9. 发明申请

US20050002427A1 Cooled electrodes for high repetition excimer or molecular fluorine lasers 审中-公开
标题翻译：用于高重复准分子或分子氟激光器的冷却电极
公开(公告)号：US20050002427A1
公开(公告)日：2005-01-06
申请号：US10833455
申请日：2004-04-28
申请人： Igor Bragin , Vadim Berger , Ulrich Rebhan , Norbert Niemoller , Konstantin Aab
发明人： Igor Bragin , Vadim Berger , Ulrich Rebhan , Norbert Niemoller , Konstantin Aab
IPC分类号： H01S3/038 , H01S3/04 , H01S3/041 , H01S3/22 , H01S3/223 , H01S3/225
CPC分类号： H01S3/0385 , H01S3/041 , H01S3/225
摘要： The consumption and/or erosion of electrodes in high repetition rate gas discharge lasers, such as excimer or molecular fluorine lasers, can be reduced using any of a number of temperature regulation approaches described herein. A flow of a cooling medium can be used to remove heat from the electrodes during laser operation, in order to reduce the rate of consumption and/or erosion. The rate of erosion can be controlled by adjusting the rate and/or temperature of the cooling medium flowing through the electrodes, or in bodies in good thermal contact with those electrodes. The cooled electrodes also can function to remove heat from the laser gas, and can have finned surfaces to facilitate such heat removal. Regulating the temperature of the electrodes and laser gas also can function to minimize resonance effects in the laser gas due to the presence of temperature gradients.
摘要翻译：高重复率气体放电激光器（例如准分子或分子氟激光器）中的电极的消耗和/或腐蚀可以使用本文所述的多种温度调节方法中的任何一种来减少。为了降低消耗和/或侵蚀的速度，可以使用冷却介质的流动来在激光操作期间从电极去除热量。可以通过调节流过电极的冷却介质的速率和/或温度，或与这些电极良好的热接触的体内来控制侵蚀速率。冷却的电极还可以用于从激光气体中除去热量，并且可以具有翅片表面以促进这种除热。由于温度梯度的存在，调节电极和激光气体的温度也可以使激光气体中的谐振效应最小化。

10. 发明授权

US06735233B2 Gas discharge laser with means for removing gas impurities 失效
标题翻译：气体放电激光器，用于除去气体杂质
公开(公告)号：US06735233B2
公开(公告)日：2004-05-11
申请号：US10170972
申请日：2002-06-12
申请人： Rustem Osmanow , Ulrich Rebhan
发明人： Rustem Osmanow , Ulrich Rebhan
IPC分类号： H01S322
CPC分类号： G03F7/708 , H01S3/03 , H01S3/036 , H01S3/0384 , H01S3/225
摘要： In an excimer laser or a molecular fluorine laser, a heating element is used which is heated to temperatures in excess of 60° C., in order to remove impurities from the laser gas.
摘要翻译：在准分子激光器或分子氟激光器中，使用加热到超过60℃的加热元件，以便从激光气体中除去杂质。

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