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1. 发明申请

US20130308850A1 OBJECT INFORMATION ACQUIRING APPARATUS 有权
标题翻译：对象信息获取设备
公开(公告)号：US20130308850A1
公开(公告)日：2013-11-21
申请号：US13982795
申请日：2012-01-31
申请人： Katsuya Oikawa , Haruo Yoda
发明人： Katsuya Oikawa , Haruo Yoda
IPC分类号： A61B5/00
CPC分类号： A61B5/0033 , A61B5/066 , A61B8/4477 , A61B8/483 , G01S7/52085 , G01S15/8918 , G01S15/8927 , G01S15/8945 , G01S15/8993 , G01S15/8997
摘要： There is used an object information acquiring apparatus including a probe for electrically scanning an object in first direction and mechanically scanning in second direction intersecting with the first direction, a first delay-and-sum unit for operating a delay-and-sum on a received signal, a memory for storing a first delay-and-sum signal for each plane in the second direction, a selecting unit for selecting signals corresponding to M sectional planes from among the stored signals, a second delay-and-sum unit for operating a delay-and-sum on the selected signals in the second direction, and a unit for acquiring image in the object from the second delay-and-sum signal, the second delay-and-sum unit switching, according to the mechanical scanning, a first case in which M signals are fixed and a delay pattern is varied and a second case in which a set of the M signals is varied and the delay pattern is fixed.
摘要翻译：使用对象信息获取装置，包括用于在第一方向上电子扫描物体并在与第一方向相交的第二方向上进行机械扫描的探针;第一延迟和和单元，用于对所接收的物体进行延迟和和操作信号，用于存储第二方向上的每个平面的第一延迟和和信号的存储器，用于从存储的信号中选择对应于M个截面的信号的选择单元，用于操作第一延迟和和单元对所选择的信号在第二方向上的延迟和和以及用于从第二延迟和和信号获取对象中的图像的单元，第二延迟和和单元根据机械扫描切换，其中M个信号是固定的并且延迟模式是变化的第一种情况以及一组M个信号被改变并且延迟模式是固定的第二种情况。

2. 发明申请

US20120281902A1 ULTRASONIC IMAGING APPARATUS AND METHOD OF CONTROLLING DELAY 有权
标题翻译：超声波成像装置和控制延迟的方法
公开(公告)号：US20120281902A1
公开(公告)日：2012-11-08
申请号：US13520410
申请日：2011-02-22
申请人： Katsuya Oikawa , Haruo Yoda
发明人： Katsuya Oikawa , Haruo Yoda
IPC分类号： G06K9/00
CPC分类号： G10K11/346 , G01S7/52034 , G01S7/52049
摘要： The present invention enables ultrasonic propagation time values after correction of refraction to be calculated in parallel for each receive channel, by using a recurrence relation in the depth direction. Moreover, accumulation of errors can be avoided by using an accurate propagation time value obtained in advance at a reference depth to correct the propagation time value each time the reference depth is reached. For this error correction, the recurrence relation to calculate the propagation time value can be an approximate expression. For example, the propagation time value can be calculated using the inclination of reference propagation time values between reference depths. In an actual circuit, received signals are sequentially stored in a memory, and a receive beam is formed by calculating an address position corresponding to the propagation time value of the ultrasonic wave, and adding the received signals stored in the calculated addresses.
摘要翻译：本发明通过使用深度方向上的递推关系，能够对每个接收通道平行计算校正折射后的超声波传播时间值。此外，通过使用在参考深度预先获得的准确的传播时间值，可以在每次达到参考深度时校正传播时间值，可以避免错误的累积。对于该纠错，计算传播时间值的递归关系可以是近似表达式。例如，可以使用参考深度之间的参考传播时间值的倾斜度来计算传播时间值。在实际电路中，接收信号被顺序地存储在存储器中，并且通过计算与超声波的传播时间值相对应的地址位置，并将存储在所计算的地址中的接收信号相加来形成接收波束。

3. 发明申请

US20120044785A1 MEASURING APPARATUS 有权
标题翻译：测量装置
公开(公告)号：US20120044785A1
公开(公告)日：2012-02-23
申请号：US13266981
申请日：2010-04-28
申请人： Haruo Yoda , Katsuya Oikawa , Kenichi Nagae
发明人： Haruo Yoda , Katsuya Oikawa , Kenichi Nagae
IPC分类号： G01S15/00
CPC分类号： G01S7/52046 , A61B8/483 , G01S7/52085 , G01S15/8909 , G01S15/8915 , G01S15/8934 , G01S15/8945 , G01S15/8993 , G01S15/8997 , G10K11/346 , G10K11/352
摘要： Provided is a measuring apparatus, including: a moving mechanism for moving a probe in an elevation direction; a first delay and sum circuit for performing delay and sum of reception signals at individual positions along the elevation direction to output a first add signal; a signal extraction circuit for letting an output of the first delay and sum circuit to pass through delay circuits to output in parallel first add signals obtained at different positions; a second delay and sum circuit for performing delay and sum of the first add signals output from the signal extraction circuit to output a second add signal; and an image processing circuit for generating image data by using the second add signal. Accordingly, image resolution in the elevation direction may be improved with a simple structure without deteriorating an image obtaining speed in the measuring apparatus for obtaining an ultrasonic image.
摘要翻译：提供一种测量装置，包括：移动机构，用于沿高度方向移动探针; 第一延迟和和电路，用于在沿着高度方向的各个位置处执行接收信号的延迟和和，以输出第一加法信号; 信号提取电路，用于使第一延迟和和电路的输出通过延迟电路并行输出在不同位置获得的第一加法信号; 第二延迟和和电路，用于执行从信号提取电路输出的第一加法信号的延迟和和输出第二加法信号; 以及用于通过使用第二加法信号产生图像数据的图像处理电路。因此，通过简单的结构可以提高仰角方向上的图像分辨率，而不会在用于获得超声波图像的测量装置中使图像获得速度恶化。

4. 发明授权

US09116225B2 Measuring apparatus 有权
标题翻译：测量装置
公开(公告)号：US09116225B2
公开(公告)日：2015-08-25
申请号：US13266981
申请日：2010-04-28
申请人： Haruo Yoda , Katsuya Oikawa , Kenichi Nagae
发明人： Haruo Yoda , Katsuya Oikawa , Kenichi Nagae
IPC分类号： G01S7/52 , G01S15/00 , G01S15/89 , G10K11/34 , G10K11/35 , A61B8/08
CPC分类号： G01S7/52046 , A61B8/483 , G01S7/52085 , G01S15/8909 , G01S15/8915 , G01S15/8934 , G01S15/8945 , G01S15/8993 , G01S15/8997 , G10K11/346 , G10K11/352
摘要： Provided is a measuring apparatus, including: a moving mechanism for moving a probe in an elevation direction; a first delay and sum circuit for performing delay and sum of reception signals at individual positions along the elevation direction to output a first add signal; a signal extraction circuit for letting an output of the first delay and sum circuit to pass through delay circuits to output in parallel first add signals obtained at different positions; a second delay and sum circuit for performing delay and sum of the first add signals output from the signal extraction circuit to output a second add signal; and an image processing circuit for generating image data by using the second add signal. Accordingly, image resolution in the elevation direction may be improved with a simple structure without deteriorating an image obtaining speed in the measuring apparatus for obtaining an ultrasonic image.
摘要翻译：提供一种测量装置，包括：移动机构，用于沿高度方向移动探针; 第一延迟和和电路，用于在沿着高度方向的各个位置处执行接收信号的延迟和和，以输出第一加法信号; 信号提取电路，用于使第一延迟和和电路的输出通过延迟电路并行输出在不同位置获得的第一加法信号; 第二延迟和和电路，用于执行从信号提取电路输出的第一加法信号的延迟和和输出第二加法信号; 以及用于通过使用第二加法信号产生图像数据的图像处理电路。因此，通过简单的结构可以提高仰角方向上的图像分辨率，而不会在用于获得超声波图像的测量装置中使图像获得速度恶化。

5. 发明授权

US09364152B2 Object information acquiring apparatus 有权
标题翻译：对象信息获取装置
公开(公告)号：US09364152B2
公开(公告)日：2016-06-14
申请号：US13982795
申请日：2012-01-31
申请人： Katsuya Oikawa , Haruo Yoda
发明人： Katsuya Oikawa , Haruo Yoda
IPC分类号： A61B5/00 , G01S15/89 , A61B5/06 , G01S7/52 , A61B8/00 , A61B8/08
CPC分类号： A61B5/0033 , A61B5/066 , A61B8/4477 , A61B8/483 , G01S7/52085 , G01S15/8918 , G01S15/8927 , G01S15/8945 , G01S15/8993 , G01S15/8997
摘要： There is used an object information acquiring apparatus including a probe for electrically scanning an object in first direction and mechanically scanning in second direction intersecting with the first direction, a first delay-and-sum unit for operating a delay-and-sum on a received signal, a memory for storing a first delay-and-sum signal for each plane in the second direction, a selecting unit for selecting signals corresponding to M sectional planes from among the stored signals, a second delay-and-sum unit for operating a delay-and-sum on the selected signals in the second direction, and a unit for acquiring image in the object from the second delay-and-sum signal, the second delay-and-sum unit switching, according to the mechanical scanning, a first case in which M signals are fixed and a delay pattern is varied and a second case in which a set of the M signals is varied and the delay pattern is fixed.
摘要翻译：使用对象信息获取装置，其包括用于在第一方向上电子扫描物体的探针和在与第一方向相交的第二方向上机械扫描的对象信息获取装置，用于在所接收的第一方向上操作延迟和和的第一延迟和和单元信号，用于存储第二方向上的每个平面的第一延迟和和信号的存储器，用于从存储的信号中选择与M个截面相对应的信号的选择单元，用于操作第二延迟和和单元对所选择的信号在第二方向上的延迟和和以及用于从第二延迟和和信号获取对象中的图像的单元，第二延迟和和单元根据机械扫描切换，其中M个信号是固定的并且延迟模式是变化的第一种情况以及一组M个信号被改变并且延迟模式是固定的第二种情况。

6. 发明授权

US09165552B2 Ultrasonic imaging apparatus and method of controlling delay 有权
标题翻译：超声波成像装置及延迟控制方法
公开(公告)号：US09165552B2
公开(公告)日：2015-10-20
申请号：US13520410
申请日：2011-02-22
申请人： Katsuya Oikawa , Haruo Yoda
发明人： Katsuya Oikawa , Haruo Yoda
IPC分类号： G06K9/00 , G10K11/34 , G01S7/52
CPC分类号： G10K11/346 , G01S7/52034 , G01S7/52049
摘要： The present invention enables ultrasonic propagation time values after correction of refraction to be calculated in parallel for each receive channel, by using a recurrence relation in the depth direction. Moreover, accumulation of errors can be avoided by using an accurate propagation time value obtained in advance at a reference depth to correct the propagation time value each time the reference depth is reached. For this error correction, the recurrence relation to calculate the propagation time value can be an approximate expression. For example, the propagation time value can be calculated using the inclination of reference propagation time values between reference depths. In an actual circuit, received signals are sequentially stored in a memory, and a receive beam is formed by calculating an address position corresponding to the propagation time value of the ultrasonic wave, and adding the received signals stored in the calculated addresses.
摘要翻译：本发明通过使用深度方向上的递推关系，能够对每个接收通道平行计算校正折射后的超声波传播时间值。此外，通过使用在参考深度预先获得的准确的传播时间值，可以在每次达到参考深度时校正传播时间值，可以避免错误的累积。对于该纠错，计算传播时间值的递归关系可以是近似表达式。例如，可以使用参考深度之间的参考传播时间值的倾斜度来计算传播时间值。在实际电路中，接收信号被顺序地存储在存储器中，并且通过计算与超声波的传播时间值相对应的地址位置，并将存储在所计算的地址中的接收信号相加来形成接收波束。

7. 发明授权

US09390068B2 Signal processing circuit and ultrasonic diagnostic apparatus 有权
标题翻译：信号处理电路及超声波诊断仪
公开(公告)号：US09390068B2
公开(公告)日：2016-07-12
申请号：US13980193
申请日：2012-01-13
申请人： Haruo Yoda
发明人： Haruo Yoda
IPC分类号： G06F17/10 , G06F17/16 , G01S7/52
CPC分类号： G06F17/16 , G01S7/52046
摘要： A signal processing circuit respectively transforms complex covariance matrices, which are consecutively inputted at a predetermined period, into upper triangular matrices. The signal processing circuit includes: a storage unit that stores at least N-number of complex covariance matrices; a reading unit that reads matrix elements of the stored complex covariance matrices; a CORDIC calculation circuit that implements a CORDIC algorithm by a pipelined circuit system; and a QR decomposition unit that controls the reading unit and the CORDIC calculation circuit unit to calculate an upper triangular matrix by iteratively using the CORDIC calculation circuit unit on a single complex covariance matrix and that calculates in parallel a transformation of N-number of complex covariance matrices into upper triangular matrices in an interleaved format.
摘要翻译：信号处理电路分别将以预定周期连续输入的复协方差矩阵变换为上三角矩阵。信号处理电路包括：存储单元，其存储至少N个复数协方差矩阵; 读取单元，读取存储的复协方差矩阵的矩阵元素; CORDIC计算电路，通过流水线电路系统实现CORDIC算法; 以及QR分解单元，其控制读取单元和CORDIC计算电路单元，通过在单个复协方差矩阵上迭代地使用CORDIC计算电路单元来计算上三角矩阵，并且并行计算N个复数协方差的变换矩阵以交错格式转换成上三角矩阵。

8. 发明授权

US08008622B2 Electron beam apparatus and method of generating an electron beam irradiation pattern 有权
标题翻译：电子束装置和产生电子束照射图案的方法
公开(公告)号：US08008622B2
公开(公告)日：2011-08-30
申请号：US12630346
申请日：2009-12-03
申请人： Ryo Fujita , Haruo Yoda , Kimiaki Ando , Yuji Inoue , Masato Muraki
发明人： Ryo Fujita , Haruo Yoda , Kimiaki Ando , Yuji Inoue , Masato Muraki
IPC分类号： H01J37/26
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31762 , H01J2237/31769
摘要： High-contrast exposure is performed by use of a small dose of electron beams, a pattern is formed on a wafer with high accuracy, and high-precision inspection is performed. In pattern formation, proximity effect correction processing is performed. Moreover, exposure of electron beams is performed based on a result of filtering using an inverse characteristic of exposure characteristics of the electron beams. Furthermore, in pattern inspection, electron beams are irradiated based on a result of filtering for obtaining a peripheral region of an edge of the pattern formed.
摘要翻译：通过使用小剂量的电子束进行高对比度曝光，以高精度在晶片上形成图案，进行高精度检查。在图案形成中，执行邻近效应校正处理。此外，基于使用电子束的曝光特性的逆特性的滤波结果来执行电子束的曝光。此外，在图案检查中，基于滤波结果照射电子束，以获得形成的图案的边缘的周边区域。

9. 发明授权

US07692166B2 Charged particle beam exposure apparatus 有权
标题翻译：带电粒子束曝光装置
公开(公告)号：US07692166B2
公开(公告)日：2010-04-06
申请号：US11762182
申请日：2007-06-13
申请人： Masato Muraki , Haruo Yoda
发明人： Masato Muraki , Haruo Yoda
IPC分类号： H01J37/304 , H01L21/027
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/304 , H01J2237/043 , H01J2237/24507 , H01J2237/3045 , H01J2237/30455 , H01J2237/30477 , H01J2237/30483
摘要： An exposure apparatus which draws a pattern on a substrate with a charged particle beam is disclosed. The exposure apparatus includes a detector which detects a charged particle beam, a deflector which deflects the charged particle beam to scan the substrate or the detector with the charged particle beam, and a controller which controls the deflector to scan each of a plurality of scanning ranges on the detector with the charged particle beam, and calculates, on the basis of the charged particle beam amount detected by the detector upon scanning the plurality of scanning ranges, the intensity distribution of the charged particle beam which strikes the detector.
摘要翻译：公开了一种在具有带电粒子束的基板上绘制图案的曝光装置。曝光装置包括检测带电粒子束的检测器，使带电粒子束偏转以利用带电粒子束扫描基板或检测器的偏转器，以及控制偏转器扫描多个扫描范围中的每一个的控制器在具有带电粒子束的检测器上，并且基于扫描多个扫描范围时由检测器检测到的带电粒子束量计算撞击检测器的带电粒子束的强度分布。

10. 发明授权

US07642514B2 Charged particle beam apparatus 失效
标题翻译：带电粒子束装置
公开(公告)号：US07642514B2
公开(公告)日：2010-01-05
申请号：US12005387
申请日：2007-12-27
申请人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
发明人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
IPC分类号： H01J37/21
CPC分类号： G06T5/002 , G06T5/003 , G06T5/20 , G06T5/50 , G06T7/13 , G06T7/62 , G06T2207/10061 , G06T2207/30148 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/216 , H01J2237/221 , H01J2237/226 , H01J2237/281 , H01J2237/2815 , H01J2237/2817
摘要： It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.
摘要翻译：本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器，发射的带电粒子束，以及用于基于所述带电粒子束聚焦的信号来组合样品的表面部分的二维图像的装置，所述信号在从带电粒子检测器输出的信号中。

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