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1. 发明授权

US5397212A Robot with dust-free and maintenance-free actuators 失效
标题翻译：机器人具有无尘和免维护的执行器
公开(公告)号：US5397212A
公开(公告)日：1995-03-14
申请号：US19678
申请日：1993-02-19
申请人： Katsuhide Watanabe , Yoichi Kanemitsu , Hiroyuki Shinozaki , Naoji Hiraki , Shinichi Moriyama
发明人： Katsuhide Watanabe , Yoichi Kanemitsu , Hiroyuki Shinozaki , Naoji Hiraki , Shinichi Moriyama
IPC分类号： B25J9/04 , B25J9/12 , B25J18/04
CPC分类号： H01L21/67766 , B25J9/041 , B25J9/123 , B25J9/126 , F16C32/0465 , H01L21/67742
摘要： A robot with no mechanically contacting components are suitable for use in special environments such as semiconductor manufacturing processes where dust and lubrication are matters of important concern. The robot has a linear actuator composed of magnetic bearings and a linear motor for moving a robot arm linearly without mechanical contact, and a rotary actuator composed of magnetic bearings and a rotary motor for rotating a body which supports the linear actuator, around the rotary actuator without mechanical contact.
摘要翻译：没有机械接触部件的机器人适用于特殊环境，如半导体制造过程，其中灰尘和润滑是重要关注的问题。机器人具有由磁性轴承构成的线性致动器和用于在不机械接触的情况下线性地移动机器人手臂的线性电动机，以及由磁性轴承和用于使支撑线性致动器的主体旋转的旋转电动机，围绕旋转致动器无机械接触。

2. 发明授权

US5720010A Control system for a linear actuator including magnetic bearings for levitating a robot arm 失效
标题翻译：用于线性致动器的控制系统，包括用于悬浮机器人臂的磁性轴承
公开(公告)号：US5720010A
公开(公告)日：1998-02-17
申请号：US699342
申请日：1996-08-19
申请人： Katsuhide Watanabe , Yoichi Kanemitsu , Shinichi Moriyama , Naoji Hiraki
发明人： Katsuhide Watanabe , Yoichi Kanemitsu , Shinichi Moriyama , Naoji Hiraki
IPC分类号： B25J13/00 , B25J9/18 , B25J18/02 , B25J19/00 , F16C32/04 , F16C39/06 , G05B19/19 , H02P25/06 , G05B15/00 , G05B19/00
CPC分类号： F16C32/0444 , G05B19/19 , F16C2300/62 , G05B2219/45083 , G05B2219/49271
摘要： A control system for controlling a linear actuator including magnetic bearings for levitating a robot arm and a pulse motor for linearly driving the arm in a non-contact manner is disclosed, which comprises a displacement detection unit including displacement sensors, first and second calculation units, moving amount detection unit and adding circuit. The displacement detection unit detects displacement values of the arm from a reference posture, the first calculation unit calculates guiding (y), levitation (z), roll (p), pitching (q), and yaw (r) control current values in response to the displacement values and provides guiding, levitation, roll, pitching, and yaw control current signals (, , , , ). The moving amount detecting circuit detects a moving amount (X.sub.0) of the arm from a reference position in response to an operation of the pulse motor, and provides a compensation current value (.DELTA.Iq") proportional to the moving amount, and the adding circuit adds the compensation current value (.DELTA.Iq") to the pitching control current signal (). The second calculation unit, in response to the guiding, levitation, roll and yaw control current signals (, , , ) and the added pitching control current signal (+.DELTA.Iq"), calculates drive current control values to compensate drive current flowing through the magnetic bearings.
摘要翻译：公开了一种用于控制线性致动器的控制系统，包括用于悬浮机器人臂的磁轴承和用于以非接触方式线性驱动臂的脉冲电机，其包括位移检测单元，其包括位移传感器，第一和第二计算单元，移动量检测单元和加法电路。位移检测单元从参考姿势检测臂的位移值，第一计算单元计算响应中的引导（y），悬浮（z），滚动（p），俯仰（q）和偏航（r）控制电流值提供位移值，并提供引导，悬挂，滚动，俯仰和偏航控制电流信号（+ Z，+ Z，+ Z，+ Z，+ Z）。移动量检测电路响应于脉冲电动机的操作从参考位置检测臂的移动量（X0），并且提供与移动量成比例的补偿电流值（DELTA Iq“），并且添加电路将补偿电流值（DELTA Iq“）添加到俯仰控制电流信号（+ Z）。第二计算单元响应于引导，悬挂，转向和偏转控制电流信号（+ Z，+ Z，+ Z，+ Z）和增加的俯仰控制电流信号（+ Z + DELTA Iq“），计算驱动电流控制值来补偿流经磁轴承的驱动电流。

3. 发明授权

US5760578A Inductive displacement sensor system detecting displacements in two directions using a multi-bridge circuit 失效
标题翻译：感应位移传感器，用于使用多桥电路检测两个方向的位移
公开(公告)号：US5760578A
公开(公告)日：1998-06-02
申请号：US697007
申请日：1996-08-16
申请人： Katsuhide Watanabe , Naoji Hiraki , Shinichi Moriyama
发明人： Katsuhide Watanabe , Naoji Hiraki , Shinichi Moriyama
IPC分类号： G01B7/14 , G01B7/312 , G01D5/20
CPC分类号： G01D5/2013 , G01B7/14 , G01B7/312
摘要： A displacement sensor system is provided which is capable of simultaneously and independently detecting displacements in two directions orthogonal to an axis of an object to be detected, using a less number of displacement sensors than before. The displacement sensor system, for enabling the simultaneous detection of displacements in two directions orthogonal to an axial direction of a pillar-shaped member, has a plurality of displacement sensors positioned around the pillar-shaped member, and a detector circuit for receiving outputs of the plurality of displacement sensors to output signals indicative of displacements in the two directions orthogonal to the axial direction of the pillar-shaped member. The detector circuit includes a multi-bridge circuit for parallelly connecting a circuit having the plurality of displacement sensors connected in series to a plurality of resistor circuits. In one embodiment of the present invention, the pillar-shaped member has a square prism portion, and the plurality of displacement sensors include four displacement sensors, where the displacement sensors are positioned in a plane parallel to a set of opposite surfaces of the square prism portion and in the vicinity of four corners of the square prism portion, respectively. The four displacement sensors are connected in series to form an inductance circuit which constitutes a part of the multi-bridge circuit.
摘要翻译：提供一种位移传感器系统，其能够使用比以前更少数量的位移传感器来同时且独立地检测与待检测物体的轴线正交的两个方向上的位移。位移传感器系统，用于能够同时检测与柱状构件的轴向正交的两个方向上的位移，具有位于柱状构件周围的多个位移传感器，以及检测器电路，其用于接收多个位移传感器，以输出指示与柱状构件的轴向正交的两个方向上的位移的信号。检测器电路包括用于并联连接具有与多个电阻器电路串联连接的多个位移传感器的电路的多桥电路。在本发明的一个实施例中，柱状部件具有正方形棱镜部分，并且多个位移传感器包括四个位移传感器，其中位移传感器位于与正方形棱镜的一组相对表面平行的平面中并且分别在正方形棱镜部分的四个角附近。四个位移传感器串联连接以形成构成多桥电路的一部分的电感电路。

4. 发明授权

US5793598A Magnetically levitated vibration damping apparatus 失效
标题翻译：磁悬浮减振装置
公开(公告)号：US5793598A
公开(公告)日：1998-08-11
申请号：US695850
申请日：1996-08-09
申请人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
发明人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
IPC分类号： F16F15/02 , F16F15/03 , B66C13/06
CPC分类号： F16F15/02 , F16F15/03
摘要： A magnetically levitated vibration damping apparatus includes a table having a flat board of a magnetic material, an electromagnetic actuator for applying magnetic attractive forces to the flat board to levitate the table, a displacement sensor for detecting relative displacement between the flat board and the electromagnetic actuator, an acceleration sensor for detecting absolute acceleration of the table, and a control system for controlling a current supplied to the electromagnetic actuator based on signals from the displacement sensor and the acceleration sensor according to a first control rule for controlling a gap between the flat board and the electromagnetic actuator based on the signal from the acceleration sensor and a second control rule for controlling vibrations of the table based on the signal from the acceleration sensor, the second control rule including stability control of relative displacement of the table.
摘要翻译：一种磁悬浮减振装置，包括具有磁性材料的平板的工作台，用于向平板施加磁性吸引力以浮动工作台的电磁致动器，用于检测平板与电磁致动器之间的相对位移的位移传感器，用于检测工作台的绝对加速度的加速度传感器，以及用于根据用于控制平板之间的间隙的第一控制规则，根据来自位移传感器和加速度传感器的信号控制提供给电磁致动器的电流的控制系统以及基于来自加速度传感器的信号的电磁致动器和用于基于来自加速度传感器的信号控制工作台的振动的第二控制规则，第二控制规则包括对工作台的相对位移的稳定性控制。

5. 发明授权

US5765800A Vibration damping apparatus 失效
标题翻译：减震装置
公开(公告)号：US5765800A
公开(公告)日：1998-06-16
申请号：US724829
申请日：1996-10-02
申请人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Mamoru Suzuki
发明人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Mamoru Suzuki
IPC分类号： F16F15/023 , F16M13/00
CPC分类号： F16F15/0232
摘要： A vibration damping apparatus has a vibration-isolating table for placing an object thereon which is to be isolated from vibrations, an air spring mounted on an installation floor and supporting the vibration-isolating table for attenuating vibrations from the installation floor, an air pressure controller for controlling an air pressure of the air spring, a displacement sensor for detecting a relative displacement between the vibration-isolating table and the installation floor and supplying a signal indicative of the detected relative displacement to the air pressure controller, and a spring element acting between the vibration-isolating table and the installation floor for positioning the vibration-isolating table horizontally. An electromagnet is disposed between the vibration-isolating table and the installation floor for actively attenuating vibrations of the vibration-isolating table. The vibration damping apparatus is operated to position the vibration-isolating table horizontally by means of the spring elements, and vertically by means of the air spring.
摘要翻译：减震装置具有用于放置要与振动隔离的物体的隔振台，安装在安装地板上的空气弹簧和支撑用于衰减来自安装地板的振动的防振台，空气压力控制器用于控制所述空气弹簧的空气压力的位移传感器，用于检测所述防振台和所述安装地板之间的相对位移并将指示所述检测到的相对位移的信号提供给所述空气压力控制器的位移传感器;以及弹簧元件，隔振台和用于水平定位防振台的安装地板。电磁铁设置在防振台和安装地板之间，用于主动衰减隔振台的振动。振动阻尼装置的作用是通过弹簧元件将隔振台水平放置，并通过空气弹簧垂直地定位。

6. 发明授权

US5814814A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US5814814A
公开(公告)日：1998-09-29
申请号：US607613
申请日：1996-02-27
申请人： Yoichi Kanemitsu , Katsuhide Watanabe
发明人： Yoichi Kanemitsu , Katsuhide Watanabe
IPC分类号： H01J37/28 , H01J37/244
CPC分类号： H01J37/28 , H01J2237/0216 , H01J2237/15 , H01J2237/248
摘要： An electron microscope has an electron gun for emitting an electron beam, a specimen holder for holding a specimen thereon, and a deflection coil for applying the electron beam from the electron gun to the specimen on the specimen holder. A controller produces a differential signal representing the difference between a signal from a vibration sensor which detects vibrations of the electron gun and a signal from another vibration sensor which detects vibrations of the specimen holder. The differential signal is added to a deflection signal for the deflection coil for thereby effecting feedforward control of the electron beam to cause the electron beam to reach the specimen on the specimen holder, irrespective of the vibrations of the electron gun and the specimen holder.
摘要翻译：电子显微镜具有用于发射电子束的电子枪，用于在其上保持试样的试样保持器和用于将来自电子枪的电子束施加到试样保持器上的试样的偏转线圈。控制器产生表示来自检测电子枪的振动的振动传感器的信号与检测试样保持器的振动的另一振动传感器的信号之间的差的差分信号。差分信号被加到偏转线圈的偏转信号上，从而进行电子束的前馈控制，使电子束到达试样架上的试样，而与电子枪和试样架的振动无关。

7. 发明授权

US5449985A Zero-power control type vibration eliminating apparatus 失效
标题翻译：零功率控制型振动消除装置
公开(公告)号：US5449985A
公开(公告)日：1995-09-12
申请号：US111412
申请日：1993-08-25
申请人： Yoichi Kanemitsu , Katsuhide Watanabe
发明人： Yoichi Kanemitsu , Katsuhide Watanabe
IPC分类号： F16F15/02 , F16F15/03 , G05D19/02 , G12B9/08 , H01J37/16
CPC分类号： F16F15/03
摘要： There is provided a vibration eliminating apparatus utilizing a magnetic suspending system which achieves zero power control. The vibration eliminating apparatus includes a table on which equipment to be installed, magnetic yokes fixed on the table, control magnets for suspending the magnetic yokes from an installation floor, displacement sensors for measuring gaps between the control magnets and the magnetic yokes, power amplifiers for supplying exciting currents to the control magnets, and compensation circuits for controlling the exciting currents of the control magnets by supplying outputs from the displacement sensors to the power amplifiers. Each control magnet includes a permanent magnet for generating a bias magnetic flux and an electromagnet for generating a control magnetic flux to form a magnetic circuit. An integrated value of the exciting current fed to the electromagnet is fed back to the power amplifier.
摘要翻译：提供一种利用实现零功率控制的磁悬浮系统的振动消除装置。振动消除装置包括：安装设备的桌子，固定在桌子上的磁轭，用于将磁轭悬挂在安装地板上的控制磁铁，用于测量控制磁铁与磁轭之间的间隙的位移传感器，用于向控制磁体提供激励电流，以及补偿电路，用于通过将位移传感器的输出提供给功率放大器来控制控制磁体的励磁电流。每个控制磁体包括用于产生偏磁通的永磁体和用于产生控制磁通以形成磁路的电磁体。馈送到电磁体的励磁电流的积分值被反馈给功率放大器。

8. 发明授权

US5471802A Electromagnetically suspended floating floor apparatus 失效
标题翻译：电磁悬浮浮地板设备
公开(公告)号：US5471802A
公开(公告)日：1995-12-05
申请号：US111438
申请日：1993-08-25
申请人： Kenichi Yano , Yoichi Kanemitsu , Katsuhide Watanabe
发明人： Kenichi Yano , Yoichi Kanemitsu , Katsuhide Watanabe
IPC分类号： E04F15/18 , F16F15/03 , E04F15/00
CPC分类号： F16F15/03
摘要： An electromagnetically suspended floating floor apparatus in which a floating floor on which machines are set up is suspended from an installation floor with electromagnetic actuators so that the floating floor is spatially separated from the installation floor whereby no vibration is transmitted to equipment on the floating floor. The floating floor apparatus comprises the floating floor suspended from the installation floor at a plurality of supporting points by electromagnetic actuators, a light emitting member, fixed to a beam or a pillar, which emits a horizontal light beam, and a photosensor fixed to the installation floor which outputs a position signal representing a position of incidence of the horizontal light beam to the electromagnetic actuators. On the basis of the position signal, the electromagnetic actuators control a vertical position of the floating floor.
摘要翻译：一种电磁悬浮浮动地板装置，其中设置有机器的浮动地板从电磁致动器从安装地板悬挂，使得浮动地板在空间上与安装地板分离，从而没有振动传递到浮动地板上的设备。浮动地板装置包括通过电磁致动器在多个支撑点处从安装地板悬吊的浮动地板，固定到发射水平光束的梁或柱的发光构件，以及固定到该装置的光电传感器输出表示水平光束入射到电磁致动器的位置的位置信号。基于位置信号，电磁致动器控制浮动地板的垂直位置。

9. 发明授权

US06515388B1 Magnetic levitation control apparatus 失效
标题翻译：磁悬浮控制装置
公开(公告)号：US06515388B1
公开(公告)日：2003-02-04
申请号：US09680954
申请日：2000-10-10
申请人： Shinichi Moriyama , Katsuhide Watanabe , Takahide Haga
发明人： Shinichi Moriyama , Katsuhide Watanabe , Takahide Haga
IPC分类号： H02K709
CPC分类号： F16C32/0448 , F16C32/0451 , H02N15/00
摘要： A magnetic levitation control apparatus comprises a pair of electromagnets for holding a levitated body having a magnetic body in the levitated state. A signal source for supplying a voltage signal of a frequency on a level such that enables the electromagnets to function as the position sensor, wherein a control voltage signal for controlling the magnetic attraction of the electromagnets is superimposed on the voltage signal. A circuit differentially supplies the voltage signal to the pair of electromagnets to form a position signal of the levitated body from an add signal of currents respectively from the electromagnets, and a circuit detects a control current of the electromagnets from a subtraction signal of currents respectively from the electromagnets. A controller generates a control voltage signal of the electromagnets from the detected position signal of the levitated body and, in addition, corrects the position signal detected from the detected control current of the electromagnets.
摘要翻译：一种磁悬浮控制装置包括一对电磁体，用于保持具有处于悬浮状态的磁体的悬浮体。一种用于提供频率电压信号的信号源，其电平使得电磁体能够用作位置传感器，其中用于控制电磁体的磁吸引力的控制电压信号叠加在电压信号上。电路差分地将电压信号提供给该对电磁体，以从电磁体分别从电流的相加信号形成悬浮体的位置信号，并且电路从电流的减法信号分别检测电磁体的控制电流电磁铁。控制器根据检测到的悬浮体的位置信号产生电磁体的控制电压信号，并且还校正从检测到的电磁体的控制电流检测的位置信号。

10. 发明申请

US20070128364A1 SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD 审中-公开
公开(公告)号：US20070128364A1
公开(公告)日：2007-06-07
申请号：US11615640
申请日：2006-12-22
申请人： Hiroyuki Shinozaki , Norihiro Yamaguchi , Katsuhide Watanabe
发明人： Hiroyuki Shinozaki , Norihiro Yamaguchi , Katsuhide Watanabe
IPC分类号： B05D3/00 , B05C5/00 , C23C14/00
CPC分类号： H01L21/6831 , H01L21/67259
摘要： A substrate treatment apparatus is disclosed. The substrate treatment apparatus has an electrostatic chuck mechanism, a grounding mechanism, and an electron beam radiating mechanism. The electrostatic chuck mechanism electrostatically sucks and holds a substrate under treatment. The grounding mechanism freely contacts a predetermined film of a plurality of films formed on a treatment surface of the substrate under treatment sucked and held by the electrostatic chuck mechanism. The electron beam radiating mechanism radiates a resist film formed on the treatment surface side of the substrate under treatment with an electron beam.

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