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    • 4. 发明授权
    • Superluminescent diode
    • 超发光二极管
    • US4896195A
    • 1990-01-23
    • US168067
    • 1988-03-14
    • Michael JansenMoshe SergantSzutsun S. OuJaroslava Z. WilcoxJane J. YangLarry R. Eaton
    • Michael JansenMoshe SergantSzutsun S. OuJaroslava Z. WilcoxJane J. YangLarry R. Eaton
    • H01L33/00
    • H01L33/0045
    • A semiconductor diode structure including a light-absorbing substrate, an active region, and a pair of cladding layers surrounding the active region. Lasing is inhibited by means of an inclined end facet, which reflects light down into the substrate, where it is absorbed, to provide only one pass of the spontaneously emitted light through the active region. One disclosed embodiment has a conventional end facet for the out-coupling of edge-emitted light. Another embodiment includes a surface-emitting facet formed in an opening in the substrate adjacent to the inclined facet. Yet another embodiment has two inclined facets. One inclined facet may serve to reflect light into the absorbing substrate, or both may serve to reflect light through separate surface emitting facets.
    • 一种半导体二极管结构,包括光吸收衬底,有源区和围绕有源区的一对覆层。 激光通过倾斜端面被抑制,该倾斜端面将光线向下反射到衬底中,在其被吸收的位置,仅提供通过有源区域的自发发射的光的一次通过。 一个公开的实施例具有用于边缘发射光的外耦合的常规端面。 另一个实施例包括形成在与倾斜面相邻的衬底的开口中的表面发射小面。 又一实施例具有两个倾斜面。 一个倾斜小面可以用于将光反射到吸收衬底中,或者两者可以用于通过单独的表面发射面反射光。
    • 5. 发明授权
    • Ion milling method
    • 离子研磨法
    • US4869780A
    • 1989-09-26
    • US178711
    • 1988-04-07
    • Jane J. J. YangWilliam W. SimmonsMichael JansenJaroslava Z. WilcoxMoshe Sergant
    • Jane J. J. YangWilliam W. SimmonsMichael JansenJaroslava Z. WilcoxMoshe Sergant
    • H01L21/263
    • H01L21/2633
    • An ion milling method is disclosed that provides a manufacturing technique for mass producing microscopic surface features using a wide variety of media that includes semiconductors, metals, and glasses. In the preferred embodiment, vertical and 45 degree mirrors are formed simultaneously in semiconductor laser diodes in order to produce monolithic two dimensional arrays of surface emitting lasers. Standard double heterostructure semiconductor laser diodes are first grown on a wafer using metalorganic chemical vapor deposition techniques. An ion milling gun is oriented at a particular angle from the longitudinal axis of the active layer of the laser and emits a stream of atomic particles toward the lasers producing a generally two sided cut or notch that extends downward from the top surface of the semiconductor laser and traverses the active layer. The two sides of the cut consist of a vertical face that is perpendicular to the active layer and an inclined mirror surface that connects to the bottom of the vertical face and the slopes back upward to the top of the laser. Although the preferred utilization of this invention is the production of high power semiconductor laser arrays and subsequent wafer scale integration, the ion milling technique may be employed to construct a wide variety of micro-miniature radiation interfaces, reflectors, transmitters, or absorbers. Virtually any surface that requires a specifically determined configuration of uniform topography of atomic proportions may be produced.
    • 公开了一种离子铣削方法,其提供使用包括半导体,金属和玻璃的各种介质大规模生产微观表面特征的制造技术。 在优选实施例中,在半导体激光二极管中同时形成垂直和45度反射镜,以便产生表面发射激光器的单片二维阵列。 首先使用金属有机化学气相沉积技术在晶片上生长标准双异质结半导体激光二极管。 离子铣刀从激光器的有源层的纵向轴线以特定的角度定向,并且向激光器发射原子粒子流,从而产生从半导体激光器的顶表面向下延伸的大致双面切割或凹口 并穿过活动层。 切割的两侧包括垂直于有源层的垂直面和连接到垂直面的底部并且倾斜回到激光顶部的倾斜镜面。 虽然本发明的优选利用是生产高功率半导体激光器阵列和随后的晶片级整合,但是可以采用离子铣削技术来构造各种微型微型辐射接口,反射器,发射器或吸收器。 实际上可以产生需要具有原子比例的均匀地形的具体确定构型的任何表面。