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    • 3. 发明申请
    • TEMPERATURE MEASURING PROBE, TEMPERATURE MEASURING APPARATUS, AND TEMPERATURE MEASURING METHOD
    • 温度测量探头,温度测量装置和温度测量方法
    • US20130010829A1
    • 2013-01-10
    • US13634690
    • 2011-05-13
    • Kaoru Ojima
    • Kaoru Ojima
    • G01K1/14
    • G01K5/486B82Y35/00G01K5/64G01K5/68G01Q60/58
    • A temperature measuring probe is characterized in that it has a film 4 on a part of a first surface of a cantilever 2 having an opening in the center, the film 4 is formed of a material different in coefficient of thermal expansion from the cantilever 2, it has a film 5 on a part of a surface of the cantilever 2 opposite to the first surface, the film 5 is formed of the same material as the film 4, and when the films 4 and 5 are projected onto a plane parallel to the cantilever 2, the projection image of the film 4 and the projection image of the film 5 do not coincide. Thus, a temperature measuring probe and a temperature measuring apparatus can be made that can be used with a general-purpose scanning probe microscope and is insusceptible to thermal deformation of a sample.
    • 温度测量探针的特征在于,在中心具有开口的悬臂2的第一表面的一部分上具有膜4,膜4由与悬臂2的热膨胀系数不同的材料形成, 它在悬臂2的与第一表面相对的表面的一部分上具有膜5,膜5由与膜4相同的材料形成,并且当膜4和5投影到平行于第一表面的平面上时 悬臂2,胶片4的投影图像和胶片5的投影图像不一致。 因此,可以制造能够与通用扫描探针显微镜一起使用的温度测量探针和温度测量装置,并且对样品的热变形不敏感。