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    • 5. 发明授权
    • Optical disc drive and method for controlling the same
    • 光盘驱动器及其控制方法
    • US07088662B2
    • 2006-08-08
    • US10488370
    • 2003-08-01
    • Tetsuya ShiharaTatsuya TakeuchiKenji Fujiune
    • Tetsuya ShiharaTatsuya TakeuchiKenji Fujiune
    • G11B7/007
    • G11B7/0901G11B7/0045G11B7/005
    • An optical disc drive according to the present invention can read and write data from/on an optical disc 100 including record tracks to write data thereon and guide tracks for guiding a light beam 40. The drive includes: an optical pickup 101 with a converging optical system to focus the light beam 40 and form a spot thereof on the optical disc 100 for reading or writing the data; a tracking control section for controlling the converging optical system of the optical pickup 101 such that the light beam spot 40 follows a selected track on the optical disc 100 rotating; and a control unit 35 for operating the tracking control section in a first mode or in a second mode. In the first mode, the tracking control section makes the light beam spot 40 follow the recording tracks. In the second mode, the tracking control section makes the light beam spot 40 follow the guide tracks.
    • 根据本发明的光盘驱动器可以从包括记录轨道的光盘100上的数据读取数据,以便在其上写入数据,以及用于引导光束40的引导轨道。 驱动器包括:具有会聚光学系统的光学拾取器101,用于聚焦光束40并在光盘100上形成一个点,用于读取或写入数据; 跟踪控制部分,用于控制光学拾取器101的会聚光学系统,使得光束光点40跟随旋转的光盘100上的选定轨道; 以及用于以第一模式或第二模式操作跟踪控制部的控制单元35。 在第一模式中,跟踪控制部分使光束点40跟随记录轨道。 在第二模式中,跟踪控制部分使光束点40跟随导轨。
    • 10. 发明授权
    • Method for controlling apparatus for supplying steam for ashing process
    • 控制用于灰化过程的蒸汽的设备的方法
    • US5832177A
    • 1998-11-03
    • US426185
    • 1995-04-21
    • Keisuke ShinagawaShuzo FujimuraYuuji MatobaYoshimasa NakanoTatsuya TakeuchiTakeshi Miyanaga
    • Keisuke ShinagawaShuzo FujimuraYuuji MatobaYoshimasa NakanoTatsuya TakeuchiTakeshi Miyanaga
    • C23C16/448H01L21/00A61M33/06B05C11/00F22B29/06
    • H01L21/67017C23C16/4485
    • A method for controlling an apparatus for supplying steam to an ashing process. The apparatus includes a closed water-containing vessel formed from a material having good heat conductive characteristics for evaporating water to provide steam to a vacuum chamber housing an ongoing ashing process. In accordance with the procedure, steam evaporated in a closed steam supply tank is introduced into a vacuum chamber via a pressure reducing mass-flow controller. The temperature of the water in the supply tank, the temperature of the steam in the pipes leading from the supply tank to the mass-flow controller, the temperature of the steam in the pipes from the mass-flow controller to the vacuum chamber and the temperature of the steam in the mass-flow controller itself are all independently controlled such that the temperature in the water tank is equal to or less than the temperature in the pipes leading to and from the mass-flow controller and the temperature in the pipes is less than or equal to the temperature in the mass-flow controller.
    • 一种用于控制用于向灰化过程供应蒸汽的装置的方法。 该装置包括由具有良好导热特性的材料形成的封闭的含水容器,用于蒸发水以向容纳正在进行的灰化过程的真空室提供蒸汽。 按照该程序,在封闭的蒸汽供应罐中蒸发的蒸汽通过减压质量流量控制器引入真空室。 供水箱内水的温度,从供水箱通向质量流量控制器的管道中的蒸汽温度,从质量流量控制器到真空室的管道中的蒸汽温度以及 质量流量控制器本身的蒸汽温度都是独立控制的,使得水箱中的温度等于或小于通向质量流量控制器的管道中的温度,并且管道中的温度为 小于或等于质量流量控制器中的温度。