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    • 7. 发明授权
    • Thin film transistor
    • 薄膜晶体管
    • US07973305B2
    • 2011-07-05
    • US12384299
    • 2009-04-02
    • Kai-Li JiangQun-Qing LiShou-Shan Fan
    • Kai-Li JiangQun-Qing LiShou-Shan Fan
    • H01L29/06
    • H01L51/0048B82Y10/00H01L51/0541H01L51/0545H01L51/0562
    • A thin film transistor includes a source electrode, a drain electrode, a semiconducting layer, and a gate electrode. The drain electrode is spaced from the source electrode. The semiconducting layer is connected to the source electrode and the drain electrode. The gate electrode is insulated from the source electrode, the drain electrode, and the semiconducting layer by an insulating layer. The semiconducting layer comprises at least two stacked carbon nanotube films, and each carbon nanotube film comprises a plurality of carbon nanotubes primarily oriented along a same direction, and the carbon nanotubes in at least two adjacent carbon nanotube films are aligned along different directions.
    • 薄膜晶体管包括源电极,漏电极,半导体层和栅电极。 漏电极与源电极间隔开。 半导体层连接到源电极和漏电极。 栅电极通过绝缘层与源电极,漏电极和半导体层绝缘。 半导体层包括至少两个层叠的碳纳米管膜,并且每个碳纳米管膜包括主要沿相同方向定向的多个碳纳米管,并且至少两个相邻的碳纳米管膜中的碳纳米管沿着不同的方向排列。