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    • 6. 发明申请
    • APPARATUS FOR PRODUCING SILICON NANOPARTICLE USING INDUCTIVE COUPLED PLASMA
    • 使用电感耦合等离子体生产硅纳米粒子的装置
    • US20160362302A1
    • 2016-12-15
    • US15039206
    • 2013-11-25
    • KOREA INSTITUTE OF ENERGY RESEARCH
    • Bo-Yun JANGJoon-Soo KIMHee-Eun SONG
    • C01B33/029B01J19/08
    • C01B33/029B01J19/088B01J2219/0869B01J2219/0871B01J2219/0883B01J2219/0894B01J2219/1203C01B33/021C01P2004/64
    • An apparatus for producing silicon nanoparticles using ICP includes a gas supply part in which first and second pipes for introducing a respective first and second gas into the plasma reactor therethrough are arranged alternately, the first pipes extending from an inlet of the reactor to a plasma initiation region; a plasma reaction part having an ICP coil wound therearound in which the particles are formed as the gases introduced through the respective pipes undergo a plasma reaction; and a collection part for collecting the particles. The apparatus can fully mix the gases introduced through the first gas supply pipes, thus allowing for uniform plasma reaction between the first and second gas, minimizing plasma expansion to increase plasma density within short retention time, easily controlling the size distribution by quenching and capturing nanoparticles, and improving the production yield by preventing the secondary aggregation of particles with cooling gas.
    • 使用ICP制造硅纳米颗粒的装置包括:气体供给部,其中用于将相应的第一和第二气体引入等离子体反应器的第一和第二管交替排列,第一管从反应器的入口延伸到等离子体引发 地区; 等离子体反应部件具有缠绕在其周围的ICP线圈,其中通过各个管道引入的气体形成颗粒进行等离子体反应; 以及用于收集颗粒的收集部件。 该设备可以充分混合通过第一气体供应管引入的气体,从而允许第一和第二气体之间的均匀等离子体反应,最小化等离子体膨胀以在短的保留时间内增加等离子体密度,通过淬灭和捕获纳米颗粒容易控制尺寸分布 并且通过防止具有冷却气体的颗粒的二次聚集来提高生产率。