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1. 发明申请

US20210047171A1 MEMS ELEMENT 有权
公开(公告)号：US20210047171A1
公开(公告)日：2021-02-18
申请号：US16808499
申请日：2020-03-04
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Fumitaka ISHIBASHI , Naofumi NAKAMURA , Hiroaki YAMAZAKI , Tomohiro SAITO , Tomohiko NAGATA , Kei MASUNISHI , Yoshihiko KURUI
IPC分类号： B81B3/00
摘要： According to one embodiment, a MEMS element includes a base body, a supporter, a film part, a first electrode, a second electrode, and an insulating member. The supporter is fixed to the base body. The film part is separated from the base body in a first direction and supported by the supporter. The first electrode is fixed to the base body and provided between the base body and the film part. The second electrode is fixed to the film part and provided between the first electrode and the film part. The insulating member includes a first insulating region and a second insulating region. The first insulating region is provided between the first electrode and the second electrode. A first gap is provided between the first insulating region and the second electrode. The second insulating region does not overlap the first electrode in the first direction.

2. 发明申请

US20160268052A1 VARIABLE CAPACITANCE BANK DEVICE 审中-公开
标题翻译：可变电容银行设备
公开(公告)号：US20160268052A1
公开(公告)日：2016-09-15
申请号：US14824625
申请日：2015-08-12
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Ryunosuke GANDO , Daiki ONO , Hiroaki YAMAZAKI , Yoshihiko KURUI , Tamio IKEHASHI
IPC分类号： H01G5/38 , H01G5/16 , H01G5/011
CPC分类号： H01G5/38 , H01G5/011 , H01G5/16
摘要： According to one embodiment, a variable capacitance bank device, including a plurality of capacitor banks for generation of a variable capacitance, the plurality of capacitor banks being connected parallel with each other. each of the capacitor banks being constituted by serially connecting a fixed capacitor for generation of a fixed capacitance and a MEMS capacitor for generation of the variable capacitance. capacitances of the fixed capacitors in different capacitor banks being set at different values. capacitances of the MEMS capacitors in different capacitor banks being set at an equal value.
摘要翻译：根据一个实施例，一种可变电容组装置，包括用于产生可变电容的多个电容器组，所述多个电容器组彼此并联连接。每个电容器组通过串联连接用于产生固定电容的固定电容器和用于产生可变电容的MEMS电容器构成。不同电容器组中的固定电容器的电容被设置为不同的值。不同电容器组中的MEMS电容器的电容被设置为相等的值。

3. 发明申请

US20160272481A1 MEMS DEVICE 审中-公开
标题翻译： MEMS器件
公开(公告)号：US20160272481A1
公开(公告)日：2016-09-22
申请号：US15067110
申请日：2016-03-10
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Hiroaki YAMAZAKI , Yoshihiko KURUI , Tamio IKEHASHI
IPC分类号： B81B3/00
CPC分类号： B81B3/0008 , B81B2201/0221 , B81B2203/04 , H01G5/18
摘要： According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first electrode fixed on the substrate. The first electrode includes a first one end portion and a first other end portion. A capacitor insulating film is provided on the first electrode. An insulating film is provided on the substrate and located around a periphery of the first electrode. A second electrode is provided above the first electrode and movable. The second electrode includes a second one end portion corresponding to the first one end portion, and a second other end portion corresponding to the first other end portion. The second one end portion extends outside the first one end portion and includes a first bent portion bent downward.
摘要翻译：根据一个实施例，公开了一种MEMS器件。该装置包括基板，固定在基板上的第一电极。第一电极包括第一端部和第一另一端部。电容绝缘膜设置在第一电极上。绝缘膜设置在基板上并且位于第一电极的周边周围。第二电极设置在第一电极上方并可移动。第二电极包括对应于第一一个端部的第二一个端部和与第一另一个端部对应的第二另一个端部。第二一个端部在第一一个端部的外侧延伸并且包括向下弯曲的第一弯曲部分。

4. 发明申请

US20160077144A1 ELECTRONIC DEVICE 审中-公开
标题翻译：电子设备
公开(公告)号：US20160077144A1
公开(公告)日：2016-03-17
申请号：US14643904
申请日：2015-03-10
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Yoshihiko KURUI , Tamio IKEHASHI
IPC分类号： G01R31/02 , G01R19/165 , H03M1/38
CPC分类号： G01R31/028 , H01G5/16 , H03M1/38
摘要： According to one embodiment, an electronic device includes a variable capacitor includes first and second electrodes, and indicating a first state in which a distance between the first and second electrodes is a first distance and a second state in which the distance between the first and second electrodes is a second distance shorter than the first distance, in accordance with a voltage applied between the first and second electrodes, a voltage applying circuit applying a voltage between the first and second electrodes, and a voltage detecting circuit detecting a first voltage based on an interelectrode voltage between the first and second electrodes. The variable capacitor, the voltage applying circuit and the voltage detecting circuit are provided in a same chip.
摘要翻译：根据一个实施例，电子设备包括可变电容器，其包括第一和第二电极，并且指示第一状态和第二状态，其中第一和第二电极之间的距离是第一距离，第二状态中第一和第二电极之间的距离根据施加在第一和第二电极之间的电压，施加第一和第二电极之间的电压的电压施加电路和基于第一电极检测第一电压的电压检测电路，电极比第一距离短的第二距离第一和第二电极之间的电极间电压。可变电容器，电压施加电路和电压检测电路设置在同一芯片中。

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