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1. 发明申请

US20220259035A1 SENSOR AND ELECTRONIC DEVICE 有权
公开(公告)号：US20220259035A1
公开(公告)日：2022-08-18
申请号：US17461835
申请日：2021-08-30
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Kei MASUNISHI , Yasushi TOMIZAWA , Etsuji OGAWA , Ryunosuke GANDO , Shiori KAJI , Hiroki HIRAGA , Fumito MIYAZAKI , Daiki ONO
IPC分类号： B81B3/00
摘要： According to one embodiment, a sensor includes a first detection element. The first detection element includes a base body, a first support member fixed to the base body, a conductive first movable member, and a first conductive part fixed to the base body. The first movable member includes first, second, third, fourth and fifth movable parts. In a second direction crossing a first direction from the base body toward the first movable member, the third movable part is between the first and second movable parts. In the second direction, the fourth movable part is between the first and third movable parts. In the second direction, the fifth movable part is between the third and second movable parts. The first movable part is supported by the first support member. The second, third, fourth and fifth movable parts are separated from the base body.

2. 发明申请

US20210047171A1 MEMS ELEMENT 有权
公开(公告)号：US20210047171A1
公开(公告)日：2021-02-18
申请号：US16808499
申请日：2020-03-04
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Fumitaka ISHIBASHI , Naofumi NAKAMURA , Hiroaki YAMAZAKI , Tomohiro SAITO , Tomohiko NAGATA , Kei MASUNISHI , Yoshihiko KURUI
IPC分类号： B81B3/00
摘要： According to one embodiment, a MEMS element includes a base body, a supporter, a film part, a first electrode, a second electrode, and an insulating member. The supporter is fixed to the base body. The film part is separated from the base body in a first direction and supported by the supporter. The first electrode is fixed to the base body and provided between the base body and the film part. The second electrode is fixed to the film part and provided between the first electrode and the film part. The insulating member includes a first insulating region and a second insulating region. The first insulating region is provided between the first electrode and the second electrode. A first gap is provided between the first insulating region and the second electrode. The second insulating region does not overlap the first electrode in the first direction.

3. 发明申请

US20160258824A1 STRAIN SENSING ELEMENT, PRESSURE SENSOR, AND MICROPHONE 审中-公开
标题翻译：应变感应元件，压力传感器和麦克风
公开(公告)号：US20160258824A1
公开(公告)日：2016-09-08
申请号：US14925494
申请日：2015-10-28
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Yoshihiko FUJI , Akio HORI , Kei MASUNISHI , Hideaki FUKUZAWA , Akiko YUZAWA , Kazuaki OKAMOTO
IPC分类号： G01L1/12
CPC分类号： G01L1/12 , G01B7/24 , G01L1/125 , G01L1/20 , G01L9/0051 , G01L9/007 , H04R19/04 , H04R2201/003
摘要： According to one embodiment, a strain sensing element provided at a deformable film part, includes a stacked body, a first electrode, and a second electrode. The stacked body includes a first magnetic layer, a second magnetic layer, and an intermediate layer provided between the first magnetic layer and the second magnetic layer. A magnetization direction of the first magnetic layer changes in accordance with a deformation of the film part. The first electrode includes a first alloy layer including a first alloy including Ta and Mo. The first electrode is electrically connected to the stacked body. The second electrode is electrically connected to the stacked body.
摘要翻译：根据一个实施例，设置在可变形膜部分处的应变感测元件包括堆叠体，第一电极和第二电极。层叠体包括第一磁性层，第二磁性层和设置在第一磁性层和第二磁性层之间的中间层。第一磁性层的磁化方向根据膜部的变形而变化。第一电极包括包括包括Ta和Mo的第一合金的第一合金层。第一电极电连接到层叠体。第二电极与层叠体电连接。

4. 发明申请

US20150338293A1 PRESSURE SENSOR, MICROPHONE, ULTRASONIC SENSOR, BLOOD PRESSURE SENSOR, AND TOUCH PANEL 有权
标题翻译：压力传感器，麦克风，超声波传感器，血压传感器和触控面板
公开(公告)号：US20150338293A1
公开(公告)日：2015-11-26
申请号：US14721497
申请日：2015-05-26
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Kei MASUNISHI , Hideaki FUKUZAWA , Yoshihiko FUJI , Akiko YUZAWA , Kazuaki OKAMOTO
IPC分类号： G01L1/22 , A61B5/021
CPC分类号： G01L1/22 , A61B5/021 , A61B5/02141 , A61B5/05 , A61B5/6898 , A61B5/7475 , A61B2562/0204 , A61B2562/0247 , A61B2562/028 , G01L1/125 , G01L9/007
摘要： According to an embodiment, a pressure sensor includes a substrate, a support part, a flexible membrane part, and a magnetoresistive element. The support part is adhered on the substrate by using a first adhesive material with a first Young's modulus and a second adhesive material with a second Young's modulus different from the first Young's modulus. The membrane part is supported by the support part. The magnetoresistive element is provided on the membrane part, and includes a first magnetic layer, a second magnetic layer, and a spacer layer provided between the first magnetic layer and the second magnetic layer.
摘要翻译：根据实施例，压力传感器包括基板，支撑部分，柔性膜部分和磁阻元件。通过使用具有第一杨氏模量的第一粘合材料和具有与第一杨氏模量不同的第二杨氏模量的第二粘合材料将支撑部分附着在基底上。膜部由支撑部支撑。磁阻元件设置在膜部分上，并且包括第一磁性层，第二磁性层和设置在第一磁性层和第二磁性层之间的间隔层。

5. 发明申请

US20210041311A1 PRESSURE SENSOR 有权
公开(公告)号：US20210041311A1
公开(公告)日：2021-02-11
申请号：US16789748
申请日：2020-02-13
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Kei MASUNISHI , Naofumi Nakamura , Hiroaki Yamazaki , Tomohiro Saito , Fumitaka Ishibashi , Yoshihiko Kurui , Tomohiko Nagata
IPC分类号： G01L1/14
摘要： According to one embodiment, a pressure sensor includes a base body, a supporter, a film part, a first electrode, and a second electrode. The supporter is fixed to the base body. The film part is separated from the base body. The film part includes first, second, and third partial regions, and a rim portion. The rim portion is supported by the supporter. The second partial region is between the first partial region and the rim portion. The third partial region is between the second partial region and the rim portion. The first electrode is provided between the base body and the first partial region and between the base body and the second partial region. The first electrode is fixed to the base body. The second electrode is provided between the first electrode and the first partial region and between the first electrode and the second partial region.

6. 发明申请

US20150338300A1 PRESSURE SENSOR, MICROPHONE, ULTRASONIC SENSOR, BLOOD PRESSURE SENSOR, AND TOUCH PANEL 有权
标题翻译：压力传感器，麦克风，超声波传感器，血压传感器和触控面板
公开(公告)号：US20150338300A1
公开(公告)日：2015-11-26
申请号：US14721523
申请日：2015-05-26
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Kei MASUNISHI , Hideaki Fukuzawa , Yoshihiko Fuji , Akiko Yuzawa , Kazuaki Okamoto
IPC分类号： G01L9/00
CPC分类号： G01L9/16 , A61B5/02141 , A61B2562/0247 , A61B2562/028 , A61B2562/12
摘要： According to an embodiment, a pressure sensor includes a support part, a flexible membrane part, and a magnetoresistive element. The flexible membrane part is supported by the support part, and includes a first region and a second region with rigidity lower than rigidity of the first region. The magnetoresistive element is provided on the membrane part, and includes a first magnetic layer, a second magnetic layer, and a spacer layer provided between the first magnetic layer and the second magnetic layer.
摘要翻译：根据实施例，压力传感器包括支撑部分，柔性膜部分和磁阻元件。柔性膜部分由支撑部分支撑，并且包括刚性低于第一区域刚度的第一区域和第二区域。磁阻元件设置在膜部分上，并且包括第一磁性层，第二磁性层和设置在第一磁性层和第二磁性层之间的间隔层。

7. 发明申请

US20150068314A1 MEMS DEVICE 有权
标题翻译： MEMS器件
公开(公告)号：US20150068314A1
公开(公告)日：2015-03-12
申请号：US14188342
申请日：2014-02-24
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Naofumi NAKAMURA , Kei MASUNISHI , Yumi HAYASHI , Yusaku ASANO , Tamio IKEHASHI , Jun DEGUCHI , Daiki ONO
IPC分类号： G01L9/12
CPC分类号： G01L19/04 , G01L9/0072 , G01L9/0075
摘要： According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first and second MEMS elements on the substrate. Each of the first and second MEMS elements includes a fixed electrode on the substrate, a movable electrode above the fixed electrode, a first insulating film, the first insulating film and the substrate defining a cavity in which the fixed and movable electrodes are contained, and a first anchor on a surface of the first insulating film inside the cavity and configured to connect the movable electrode to the first insulating film. The cavity of the first MEMS element is closed. The cavity of the second MEMS element is opened by a through hole.
摘要翻译：根据一个实施例，公开了一种MEMS器件。该器件包括衬底，衬底上的第一和第二MEMS元件。第一和第二MEMS元件中的每一个包括基板上的固定电极，固定电极上方的可动电极，第一绝缘膜，第一绝缘膜和基板，其限定了容纳固定和可移动电极的空腔，以及在所述腔内的所述第一绝缘膜的表面上的第一锚定件，并且将所述可动电极连接到所述第一绝缘膜。第一MEMS元件的空腔是封闭的。第二MEMS元件的空腔由通孔打开。

8. 发明申请

US20220326013A1 SENSOR AND ELECTRONIC DEVICE 有权
公开(公告)号：US20220326013A1
公开(公告)日：2022-10-13
申请号：US17650749
申请日：2022-02-11
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Fumito MIYAZAKI , Yasushi TOMIZAWA , Ryunosuke GANDO , Hiroki HIRAGA , Kei MASUNISHI , Shiori KAJI , Daiki ONO , Etsuji OGAWA
IPC分类号： G01C19/5712
摘要： According to one embodiment, a sensor includes a base body including a first surface including first and second base body regions, a first structure body provided in the first base body region, a second structure body provided in the second base body region, and a control device. The first structure body includes a first movable member configured to vibrate. The vibration of the first movable member includes first and second components. The second structure body includes a second movable member configured to vibrate. The control device includes a controller configured to perform a processing operation. The processing operation includes outputting a second rotation angle, The second rotation angle is obtained by correcting a first rotation angle based on a resonance frequency of the second movable member. The first rotation angle of the first movable member is obtained based on the first component and the second component.

9. 发明申请

US20190086481A1 SENSOR AND ELECTRONIC DEVICE 审中-公开
公开(公告)号：US20190086481A1
公开(公告)日：2019-03-21
申请号：US15896123
申请日：2018-02-14
申请人： Kabushiki Kaisha Toshiba
发明人： Shotaro BABA , Yoshihiko FUJI , Akiko YUZAWA , Kei MASUNISHI , Michiko HARA , Shiori KAJI , Tomohiko NAGATA , Yoshihiro HIGASHI , Kazuaki OKAMOTO
IPC分类号： G01R33/00 , G01R1/04 , G01R33/09 , H04R1/02 , H04R15/00
摘要： According to one embodiment, a sensor includes a supporter, a first film portion, a first sensing element, and a first magnetic portion. The first film portion is supported by the supporter, is deformable, and includes a first fixed end extending along a first fixed end direction. A first sensing element is fixed to the first film portion, and includes a first magnetic layer, a first opposing magnetic layer provided between the first magnetic layer and the first film portion, and a first intermediate layer provided between the first magnetic layer and the first opposing magnetic layer. A direction from the first opposing magnetic layer toward the first magnetic layer is aligned with a first element direction. The first magnetic portion includes a first end portion extending along a first end portion direction tilted with respect to the first fixed end direction, and overlaps a portion of the supporter.

10. 发明申请

US20170241851A1 PRESSURE SENSOR, PRESSURE SENSOR SYSTEM, MICROPHONE, BLOOD PRESSURE SENSOR AND TOUCH PANEL 审中-公开
公开(公告)号：US20170241851A1
公开(公告)日：2017-08-24
申请号：US15262795
申请日：2016-09-12
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Shotaro BABA , Yoshihiko FUJI , Kei MASUNISHI , Michiko HARA , Akiko YUZAWA , Shiori KAJI , Tomohiko NAGATA , Yoshihiro HIGASHI , Kenji OTSU , Kazuaki OKAMOTO
IPC分类号： G01L9/00 , A61B5/021 , A61B5/00 , G06F3/041
CPC分类号： G01L9/0041 , A61B5/02141 , A61B5/6801 , A61B5/6824 , A61B2562/0247 , B82Y25/00 , G01L1/125 , G01L9/0051 , G01R33/093 , G06F3/0414 , H04R15/00 , H04R19/04 , H04R2499/11
摘要： According to one embodiment, a pressure sensor includes a film portion, a sensor unit, and a structure body. The film portion has a front surface and is deformable. The sensor unit includes a plurality of sensing elements arranged along the front surface. One of the plurality of sensing elements includes a magnetic layer, a opposing magnetic layer, and a nonmagnetic intermediate layer. The structure body is arranged with the first sensor unit along the arrangement direction of the plurality of sensing elements. The structure body includes a structure body layer, a opposing structure body layer, and a intermediate structure body layer. The structure body layer has at least one of a floating potential with respect to the opposing structure body layer or same potential as a potential of the opposing structure body layer.

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